Method of manufacturing microfluidic chip and a microfluidic chip made thereby

Patent metadata

Field	Value
Publication number	US-10646867-B2
Application number	US-201715670645-A
Country	US
Kind code	B2
Filing date	Aug 7, 2017
Priority date	Aug 9, 2016
Publication date	May 12, 2020
Grant date	May 12, 2020

Abstract

A method of manufacturing a microfluidic chip includes providing an upper mold having multiple upper ribs extending along a second direction, and a lower mold having multiple lower ribs extending along a first direction different from the second direction, forming a forming material in a filling space defined by the upper and lower molds to provide a channeled plate having multiple upper microfluidic channels complementary in shape to the upper ribs, lower microfluidic channels complementary in shape to the lower ribs, and multiple thin film valves formed at intersections where the upper microfluidic channels intersect the lower microfluidic channels, separating the upper and lower molds, and covering the lower and upper microfluidic channels.

First claim

What is claimed is:

1. A method of manufacturing a microfluidic chip comprising:
providing a metal mold assembly which includes an upper mold and a lower mold, the upper mold having an array of upper ribs extending toward the lower mold and an array of upper trenches, each of the upper trenches being defined by two adjacent ones of the upper ribs, the lower mold having an array of lower ribs extending toward the upper mold and an array of lower trenches, each of the lower trenches being defined by two adjacent ones of the lower ribs, the upper ribs being spaced apart along a first direction and extending along a second direction different from the first direction, the lower ribs being spaced apart along the second direction, extending along the first direction and intersecting the upper ribs at a plurality of intersections, a lower end of the upper ribs and an upper end of the lower ribs cooperatively defining a plurality of gaps that are respectively located at the intersections, the upper trenches, the lower trenches and the gaps being spatially interconnected and cooperatively defining a filling space;
forming a forming material in the filling space to provide a channeled plate having an array of upper microfluidic channels that is complementary in shape to the array of the upper ribs of the upper mold, an array of lower microfluidic channels that is complementary in shape to the array of the lower ribs of the lower mold, and an array of thin film valves, the thin film valves being complementary in shape to the gaps;
separating the upper and lower molds from the channeled plate; and
covering the array of the lower microfluidic channels and the array of the upper microfluidic channels.

2. The method as claimed in claim 1 , wherein each of the upper ribs of the upper mold has a width measured in the first direction, each of the lower ribs of the lower mold having a width measured in the second direction, each of the gaps having a height measured between the lower end of the upper ribs and the upper end of the lower ribs, the upper and lower molds satisfying the following relationships:
2≤ W 1/ T≤ 25; and

2≤ W 2/ T≤ 25.

3. The method as claimed in claim 1 , wherein providing the metal mold assembly includes:
forming on a first carrier plate a first patterned photoresist layer that is complementary in shape to the upper ribs and the upper trenches of the upper mold, and forming on a second carrier plate a second patterned photoresist layer that is complementary in shape to the lower ribs and the lower trenches of the lower mold;
depositing a first metal layer on the first photoresist layer, and a second metal layer on the second photoresist layer;
thickening the first metal layer and the second metal layer by electroforming to form the upper and lower molds; and
removing the first and second carrier plates and the first and second photoresist layers from the upper and lower molds.

4. The method as claimed in claim 1 , wherein forming the forming material in the filling space includes preheating the upper and lower molds, and placing the forming material on the lower ribs of the lower mold which is preheated, followed by closing the upper and lower molds to shape the forming material into the channeled plate.

5. The method as claimed in claim 1 , wherein, during the forming of the forming material in the filling space, at least one of the upper and lower molds is moved toward the other one of the upper and lower molds to provide a clamping force to press the forming material between the upper and lower molds.

6. The method as claimed in claim 1 , wherein forming the forming material in the filling space includes:
heating the metal mold assembly; and
injecting the forming material into the filling space to form the channeled plate.

7. The method as claimed in claim 1 , wherein the first direction is transverse to the second direction.

8. A method of manufacturing a microfluidic chip comprising:
providing a lower mold that includes at least one lower rib extending in a first direction;
providing an upper mold that includes at least two adjacent and spaced apart upper ribs extending in a second direction different from the first direction;
closing the upper and lower molds, the upper ribs intersecting the lower rib at at least one intersection, a gap being formed at the intersection;
forming a channeled plate between the upper and lower molds after the upper and lower molds are closed, the channeled plate having at least one upper microfluidic channel that is complementary in shape to the upper ribs, at least one lower microfluidic channel that is complementary in shape to the lower rib, and at least one thin film valve that is complementary in shape to the gap;
separating the upper and lower molds; and
covering the upper and lower microfluidic channels.

9. The method as claimed in claim 8 , wherein the first direction is transverse to the second direction.

10. The method as claimed in claim 8 , wherein each of the upper ribs of the upper mold has a width measured in the first direction, the lower rib of the lower mold having a width measured in the second direction, the gap having a height measured between a lower end of the upper ribs and an upper end of the lower rib, the upper and lower molds satisfying the following relationships:
2≤ W 1/ T≤ 25; and

2≤ W 2 /T≤ 25.

11. The method as claimed in claim 8 , wherein:
providing the upper mold includes
forming on a first carrier plate a first patterned photoresist layer that is complementary in shape to the upper ribs,
depositing a first metal layer on the first photoresist layer,
thickening the first metal layer by electroforming to form the upper mold, and
removing the first carrier plate and the first photoresist layer from the upper mold; and

providing the lower mold includes
forming on a second carrier plate a second patterned photoresist layer that is complementary in shape to the lower rib,
depositing a second metal layer on the second photoresist layer,
thickening the second metal layer by electroforming to form the lower mold, and
removing the second carrier plate and the second photoresist layer from the lower mold.

12. The method as claimed in claim 8 , wherein forming the channeled plate includes preheating the upper and lower molds, and placing a forming material on the lower rib of the lower mold which is preheated, followed by closing the upper and lower molds to shape the forming material into the channeled plate.

13. The method as claimed in claim 8 , wherein, during the forming of the channeled plate, at least one of the upper and lower molds is moved toward the other one of the upper and lower molds to provide a clamping force to press a forming material between the upper and lower molds.

14. The method as claimed in claim 8 , wherein forming the channeled plate includes:
heating the upper and lower molds; and
injecting a forming material into a filling space between the upper and lower molds to form the channeled plate.

Assignees

• Taiwan Green Point Entpr Co

Inventors

• Lin Yi-Cheng
• Yang Sung-Yi

Classifications

• F16K99/0026

  Valves using channel deformation · CPC title

• F16K2099/008

  Multi-layer fabrications · CPC title

• F16K2099/0074

  using photolithography, e.g. etching · CPC title

• B01L2300/0867

  Multiple inlets and one sample wells, e.g. mixing, dilution · CPC title

• B01L2400/0655

  pinch valves · CPC title