Method for making photodetector

Patent metadata

Field	Value
Publication number	US-10644252-B2
Application number	US-201916253112-A
Country	US
Kind code	B2
Filing date	Jan 21, 2019
Priority date	Apr 28, 2017
Publication date	May 5, 2020
Grant date	May 5, 2020

Abstract

A method of making a photodetector includes: providing a substrate and forming an interdigital electrode layer on a surface of the substrate; and forming a photoactive layer on a surface of the interdigital electrode layer.

First claim

What is claimed is:

1. A method of making a photodetector comprising:
providing a substrate and forming an interdigital electrode layer on a surface of the substrate; and
forming a photoactive layer on a surface of the interdigital electrode layer, the forming the photoactive layer on the surface of the interdigital electrode layer comprises:
obtaining an evaporating source, wherein the evaporating source comprises a carbon nanotube film structure and a photoactive material, and the photoactive material is located on a surface of the carbon nanotube film structure; and
spacing the evaporating source from the interdigital electrode layer; and
heating the carbon nanotube film structure to gasify the photoactive material to depositing the photoactive material on the surface of the interdigital electrode layer.

2. The method of claim 1 , wherein the forming the interdigital electrode layer on the surface of the substrate comprises:
cleaning the substrate;
depositing an interdigital electrode film on the surface of the substrate;
locating a mask on the interdigital electrode film; and
photoetching the interdigital electrode film.

3. The method of claim 1 , wherein a distance between the interdigital electrode layer and the carbon nanotube film structure is in a range from about 1 micrometer to about 10 millimeters.

4. The method of claim 1 , wherein the photoactive material is applied on the surface of the carbon nanotube film structure by a solution method, a vapor deposition method, a plating method or a chemical plating method.

5. The method of claim 4 , wherein the photoactive material is applied on the surface of the carbon nanotube film structure by the solution method, the solution method comprises:
dispersing the photoactive material in a solvent to form a mixture;
applying the mixture on the carbon nanotube film structure to form a composite; and
drying the composite.

6. The method of claim 5 , wherein the photoactive material comprises a plurality of materials, and the plurality of materials are dissolved in the solvent and mixed with each other.

7. The method of claim 1 , wherein the spacing the evaporating source from the interdigital electrode layer comprises placing the evaporating source and the interdigital electrode layer in a vacuum chamber.

8. The method of claim 1 , wherein the heating the carbon nanotube film structure comprises inputting an electromagnetic signal to heat the carbon nanotube film structure by an electromagnetic signal input device.

9. The method of claim 1 , wherein the heating the carbon nanotube film structure comprises inputting an electrical signal to heat the carbon nanotube film structure by a first electrical signal input electrode and a second electrical signal input electrode.

10. The method of claim 9 , wherein the carbon nanotube film structure comprises a plurality of carbon nanotubes, and the plurality of carbon nanotubes extend from the first electrical signal input electrode to the second electrical signal input electrode.

11. The method of claim 1 , wherein the photoactive material is a mixture of methylammonium iodide and lead iodide.

12. The method of claim 1 , wherein a heat capacity per unit area of the carbon nanotube film structure is less than 2×10 −4 J/cm 2 ·K, and a specific surface area of the carbon nanotube film structure is larger than 200 m 2 /g.

13. The method of claim 1 , wherein the carbon nanotube film structure comprises a carbon nanotube film, the carbon nanotube film comprises a plurality of nanotubes joined end to end by Van der Waals attractive force.

14. The method of claim 1 , wherein the carbon nanotube film structure and the interdigital electrode layer are parallel to and spaced from each other.

15. The method of claim 1 , wherein the carbon nanotube film structure is a free-standing structure.

Assignees

• Univ Tsinghua
• Hon Hai Prec Ind Co Ltd

Inventors

• Wei Hao-Ming
• Wei Yang
• Jiang Kai-Li
• Fan Shou-Shan

Classifications

• Y02E10/549

  Organic PV cells · CPC title

• C23C14/24

  Vacuum evaporation · CPC title

• B82Y30/00

  Nanotechnology for materials or surface science, e.g. nanocomposites · CPC title

• C23C14/243

  Crucibles for source material (C23C14/28, C23C14/30 take precedence) · CPC title

• H01L51/4253

  Electricity · mapped topic