Automated mask storage and retrieval system

Patent metadata

Field	Value
Publication number	US-10642165-B2
Application number	US-201816166993-A
Country	US
Kind code	B2
Filing date	Oct 22, 2018
Priority date	May 31, 2016
Publication date	May 5, 2020
Grant date	May 5, 2020

Abstract

An automated photomask storage and retrieval system includes a plurality of mobile storage units aligned in a first direction. Each mobile storage unit is movable in the first direction and includes a plurality of storage cells. A gantry is disposed over the plurality of mobile storage units. The gantry includes a supporting frame movable in the first direction. The plurality of mobile storage units interpose a pair of supporting members of the supporting frame. A beam connects the pair of supporting members and is movable along the pair of supporting members in a second direction perpendicular to the first direction. The beam includes a plurality of buffer cells. A robotic arm is disposed adjacent to the plurality of buffer cells and movable along the beam. The robotic arm is configured to transfer a container containing a photomask between a storage cell and a buffer cell.

First claim

What is claimed is:

1. A fabrication system, comprising:
a tool for operating with a mask;
a mask storage system including:
a plurality of mobile storage units aligned in a first direction, wherein each mobile storage unit is movable in the first direction and includes a plurality of storage cells;
a gantry disposed over the plurality of mobile storage units and movable in the first direction, wherein the gantry includes:
a buffer area including a plurality of buffer cells; and
a robotic arm for transferring a container between a storage cell and a buffer cell, wherein the container contains the mask;

a loading port for transferring the container between the mask storage system and a transportation system, wherein the transportation system is configured to transfer the container between the loading port and the tool.

2. The fabrication system of claim 1 , wherein the tool includes a mask repair tool or a lithography tool.

3. The fabrication system of claim 1 , wherein the transportation system is an overhead hoist transportation system.

4. The fabrication system of claim 1 , wherein each storage cell includes a sloped bottom surface, and
wherein the robotic arm includes a tilt compensation component adjusted based on an angle of the sloped bottom surface for reaching the storage cell.

5. The fabrication system of claim 1 , wherein the gantry includes:
a pair of supporting members movable in the first direction, wherein the plurality of mobile storage units interpose the pair of supporting members; and
a beam connecting the pair of supporting members and movable along the pair of supporting members in a second direction perpendicular to the first direction, wherein the robotic arm is movable along the beam.

6. The fabrication system of claim 5 , wherein the plurality of mobile storage units includes:
a first group of mobile storage units disposed a first distance from the loading port and configured to store containers containing masks with a first usage frequency;
a second group of mobile storage units disposed a second distance less than the first distance from the loading port and configured to store containers containing masks with a second usage frequency,
wherein a second usage frequency greater than the first usage frequency, and
wherein a space interposing the first group of mobile storage units and the second group of mobile storage units has a width greater than a width of the beam.

7. The fabrication system of claim 6 , wherein the first group of mobile storage units includes a first number of mobile storage units, and
wherein the second group of mobile storage units includes a second number of mobile storage units, wherein the second number is less than the first number.

8. A method, comprising:
providing a tool for operating with a mask;
providing a mask storage system including a plurality of mobile storage units movable in a first direction, a gantry movable in a first direction, and a loading port;
receiving a first mask transfer request for storing a first mask in the mask storage system and retrieving a second mask from the mask storage system;
transferring the first mask from the loading port to a buffer area in the gantry;
accessing a first storage cell for the first mask and a second storage cell for the second mask, wherein accessing each storage cell includes:
providing an aisle for accessing a storage cell by moving the mobile storage units;
moving the gantry to access the storage cell; and
transferring, using a robotic arm, a container between the storage cell and a buffer cell, wherein the container contains one of the first mask and second mask;
transferring the container between the buffer cell and the loading port; and
transferring, using a transportation system, the container between the loading port and the tool.

9. The method of claim 8 , wherein the moving the gantry to access the storage cell includes:
moving a pair of supporting members of the gantry in the first direction to the aisle;
moving a beam of the gantry along the pair of supporting members in a second direction perpendicular to the first direction to a height determined based on a height of the storage cell; and
moving a robotic arm along the beam so that the storage cell is reachable by the robotic arm.

10. The method of claim 9 , wherein the accessing storage cells includes:
accessing the storage cells according to a route determining based on a route distance, wherein the route distance includes one selected from a group consisting of a travel distance of the mobile storage units in the first direction, a travel distance of the pair of supporting members of the gantry in the first direction, a travel distance of the beam in the second direction, a travel distance of the robotic arm along the beam, and a combination thereof.

11. The method of claim 8 , further comprising:
repairing, using the tool, the second mask.

12. The method of claim 8 , further comprising:
performing, using the tool and the second mask, a lithography process.

13. The method of claim 8 , wherein the transportation system is an overhead hoist transportation system.

14. The method of claim 8 , wherein each storage cell includes a sloped bottom surface, further comprising:
adjusting a tilt compensation component of the robotic arm based on an angle of the sloped bottom surface for reaching the storage cell.

15. A method, comprising:
providing a tool for operating with a first mask;
providing a mask storage system including a plurality of mobile storage units movable in a first direction, a gantry movable in a first direction, and a loading port;
receiving a first mask transfer request for retrieving a first mask from the mask storage system;
accessing a first storage cell for the first mask, wherein accessing the first storage cell includes:
moving the gantry to access the storage cell; and
transferring, using a robotic arm, a container between the storage cell and a buffer cell, wherein the container contains one of the first mask and second mask;
transferring the container between the buffer cell and the loading port; and
transferring, using a transportation system, the container between the loading port and the tool.

16. The method of claim 15 , wherein the moving the gantry to access the storage cell includes:
moving a pair of supporting members of the gantry in the first direction to the aisle;
moving a beam of the gantry along the pair of supporting members in a second direction perpendicular to the first direction to a height determined based on a height of the storage cell; and
moving a robotic arm along the beam so that the storage cell is reachable by the robotic arm.

17. The method of claim 16 , wherein the accessing storage cells includes:
accessing the storage cells according to a route determining based on a route distance, wherein the route distance includes one selected from a group consisting of a travel distance of the mobile storage units in the first direction, a travel distance of the pair of supporting members of the gantry in the first direction, a travel distance of the beam in the second direction, a travel distance of the robotic arm along the beam, and a combination thereof.

18. The method of claim 15 , wherein the tool includes a mask repair tool or a lithography tool.

19. The method of claim 15 , wherein the gantry includes:
a pair of supporting members movable in the first direction, wherein the plurality of mobile storage units interpose the pair of supporting membe

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Huang Chun-Jung
• Lee Chien-Fa
• LIN Yiang-Luen
• Chin Sam

Classifications

• G06K7/1413

  1D bar codes · CPC title

• G03F7/70741 Primary

  Handling masks outside exposure position, e.g. reticle libraries · CPC title

• G06K7/10366

  the interrogation device being adapted for miscellaneous applications · CPC title