Sample preparation, processing and analysis systems
US-10525467-B2 · Jan 7, 2020 · US
Active mechanical-environmental-thermal MEMS device for nanoscale characterization
US10641733B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10641733-B2 |
| Application number | US-201815925118-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 19, 2018 |
| Priority date | Mar 20, 2017 |
| Publication date | May 5, 2020 |
| Grant date | May 5, 2020 |
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- Title
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Abstract
Official abstract text for this publication.
A microelectromechanical system (MEMS) device can be used for quantitative mechanical testing of materials within a controlled (chemical and temperature) environment, with the ability for electrochemical control to the specimen, that is coupled with a complimentary in-situ characterization technique.
First claim
Opening claim text (preview).
We claim: 1. A EMS device for micro-to-nanoscale characterization, comprising: a sealed environmental chamber comprising a sample holder for physical control of a material sample and a membrane window for transmitting radiation into the sealed environmental chamber for characterization of the material sample; and a moveable piston attached to the sample holder for applying a mechanical force to the material sample, herein the piston can be moved by an actuator external to the sealed environmental chamber. 2. The MEMS device of claim 1 , wherein the device is fabricated using surface and bulk silicon micromachining. 3. The MEMS device of claim 1 , further comprising a heater for heating the material sample. 4. The MEMS device of claim 1 , further corn comprising electrical contacts connected to the material sample for electrochemical measurement. 5. The MEMS device of claim 1 , further comprising a sensor connected to the actuator that provides quantitative measurement of the piston displacement. 6. The MEMS device of claim 1 , wherein the radiation comprises photons, electrons, or x-rays. 7. The EMS device of claim 1 , wherein the membrane window comprise silicon nitride. 8. The MEMS device of claim 1 , wherein the membrane window has a thickness of less than 100 nm. 9. The MEMS device of claim 1 , wherein the distance between the membrane window and the material sample is less than 1 μm. 10. The MEMS device of claim 1 , further comprising and a second membrane window for transmitting radiation from the material sample out of the sealed environmental chamber. 11. The MEMS device of claim 1 , wherein the radiation transmitted into the sealed environmental chamber comprises an electron beam of a transmission electron microscope and wherein the membrane is transparent to the electron beam. 12. The MEMS ice of claim 1 , wherein the mechanical force comprises a tensile force.
Assignees
Inventors
Classifications
- G01N27/44791Primary
Microapparatus (sample containers with integrated microfluidic structures B01L3/5027) · CPC title
Tensile · CPC title
Micromachined or nanomachined, e.g. micro- or nanosize · CPC title
Details · CPC title
Miniature specimen; Testing on microregions of a specimen · CPC title
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- What does patent US10641733B2 cover?
- A microelectromechanical system (MEMS) device can be used for quantitative mechanical testing of materials within a controlled (chemical and temperature) environment, with the ability for electrochemical control to the specimen, that is coupled with a complimentary in-situ characterization technique.
- Who is the assignee on this patent?
- Nat Tech & Eng Solutions Sandia Llc
- What technology area does this patent fall under?
- Primary CPC classification G01N27/44791. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue May 05 2020 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 4 related publications on this page (citations in our corpus or others sharing the same primary CPC).