Electrothermal actuators
US-2016025078-A1 · Jan 28, 2016 · US
US10641252B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10641252-B2 |
| Application number | US-201715713924-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 25, 2017 |
| Priority date | Oct 12, 2016 |
| Publication date | May 5, 2020 |
| Grant date | May 5, 2020 |
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The disclosure relates to an actuator based on carbon nanotubes and actuating system using the same. The actuator includes: a carbon nanotube layer and a vanadium dioxide layer stacked with each other. Because the drastic, reversible phase transition of VO2, the actuator has giant deformation amplitude and fast response. An actuating system using the actuator is also provided.
Opening claim text (preview).
What is claimed is: 1. An actuator comprising: a carbon nanotube layer; a vanadium dioxide layer on the carbon nanotube layer; and a flexible protection layer on at least one of the carbon nanotube layer and the vanadium dioxide layer. 2. The actuator of claim 1 , further comprising a carbon nanotube film located in the vanadium dioxide layer and spaced apart from the carbon nanotube layer, wherein a thickness of the carbon nanotube film is less than 30 nanometers. 3. The actuator of claim 2 , further comprising a plurality of carbon nanotube film located in the vanadium dioxide layer and spaced apart from each other, wherein a distance between every two adjacent carbon nanotube films is greater than 30 nanometers. 4. The actuator of claim 2 , wherein a portion of the carbon nanotube film extends out of the vanadium dioxide layer to form an outside portion. 5. The actuator of claim 4 , wherein the outside portion is in direct contact with the carbon nanotube layer. 6. The actuator of claim 1 , further comprising a carbon nanotube array located in the vanadium dioxide layer, wherein the carbon nanotube array comprises a plurality of carbon nanotubes substantially parallel to and spaced apart from each other, and the plurality of carbon nanotubes is perpendicular to the carbon nanotube layer. 7. The actuator of claim 6 , wherein each of the plurality of carbon nanotubes has one end in direct contact with the carbon nanotube layer. 8. The actuator of claim 1 , wherein the flexible protection layer entirely envelopes the carbon nanotube layer and the vanadium dioxide layer. 9. The actuator of claim 1 , wherein the vanadium dioxide layer is doped with an element selected from the group consisting of tungsten, molybdenum, aluminum, phosphorus, niobium, thallium, and fluorine. 10. An actuating system comprising an actuator and an activating device, wherein the actuator comprises a carbon nanotube layer; a vanadium dioxide layer on the carbon nanotube layer; and a carbon nanotube film in the vanadium dioxide layer and spaced apart from the carbon nanotube layer, and a thickness of the carbon nanotube film is less than 30 nanometers. 11. The actuating system of claim 10 , wherein a portion of the carbon nanotube film extends out of the vanadium dioxide layer to form an outside portion. 12. The actuating system of claim 11 , wherein the outside portion is in direct contact with the carbon nanotube layer. 13. The actuating system of claim 10 , wherein the actuator further comprises a flexible protection layer located on at least one of the carbon nanotube layer and the vanadium dioxide layer. 14. The actuating system of claim 13 , wherein the flexible protection layer entirely envelopes the carbon nanotube layer and the vanadium dioxide layer. 15. The actuating system of claim 10 , wherein the vanadium dioxide layer is doped with an element selected from the group consisting of tungsten, molybdenum, aluminum, phosphorus, niobium, thallium, and fluorine. 16. The actuating system of claim 10 , wherein the activating device is a laser device, a light source, or a power supply. 17. An actuating system comprising an actuator and an activating device, wherein the actuator comprises: a carbon nanotube layer; a vanadium dioxide layer on the carbon nanotube layer; and a carbon nanotube array in the vanadium dioxide layer, the carbon nanotube array comprising a plurality of carbon nanotubes substantially parallel to and spaced apart from each other, and the plurality of carbon nanotubes being perpendicular to the carbon nanotube layer. 18. The actuating system of claim 17 , wherein an end of each of the plurality of carbon is in direct contact with the carbon nanotube layer. 19. The actuating system of claim 17 , wherein the actuator further comprises a flexible protection layer on at least one of the carbon nanotube layer and the vanadium dioxide layer. 20. The actuating system of claim 19 , wherein the flexible protection layer entirely envelopes the carbon nanotube layer and the vanadium dioxide layer.
Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators · CPC title
Motors · CPC title
Carbonaceous material, e.g. graphite-intercalation compounds or CFx · CPC title
Vanadium · CPC title
Flexible or deformable structures not provided for in groups B81C1/00142 - B81C1/00182 · CPC title
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