Vacuum suction pad and substrate holder

Patent metadata

Field	Value
Publication number	US-10639727-B2
Application number	US-201815940399-A
Country	US
Kind code	B2
Filing date	Mar 29, 2018
Priority date	Mar 31, 2017
Publication date	May 5, 2020
Grant date	May 5, 2020

Abstract

A vacuum suction pad capable of making it more difficult to separate a substrate when the substrate is held by vacuum suction, the vacuum suction pad 8 including: a pad main body 37 having a lower surface adhered to a stage 5 of a substrate holder 2; and a plurality of circular arc-shaped substrate holding convexities 38, provided on a top surface of the pad main body 37, for holding a substrate W attracted by vacuum suction to the top surface of the pad main body 37, wherein the substrate holding convexities 38 are arranged concentrically with the circular pad main body 37, and width W1 in a radial direction of the substrate holding convexity 38 located on a radially outer side among the plurality of substrate holding convexities 38 is narrower than width W2 in the radial direction of the substrate holding convexity 38 on a radially inner side.

First claim

What is claimed is:

1. A vacuum suction pad comprising:
a pad main body having a lower surface adhered to a stage of a substrate holder; and
a plurality of circular arc-shaped substrate holding convexities, provided on a top surface of the pad main body, for holding a substrate which is attracted by vacuum suction to the top surface of the pad main body, wherein
the plurality of circular arc-shaped substrate holding convexities are arranged concentrically with the pad main body having a circular shape, and
a width, in a radial direction, of a substrate holding convexity located on a radially outer side among the plurality of circular arc-shaped substrate holding convexities is narrower than a width, in the radial direction, of a substrate holding convexity located on a radially inner side, wherein
an outermost substrate holding convexity among the plurality of circular arc-shaped substrate holding convexities has a narrowest width among the plurality of circular arc-shaped substrate holding convexities, and
a width E, in the radial direction, between the outermost substrate holding convexity and an outer convexity next to the outermost substrate holding convexity is greater than a width C, in the radial direction, between two inner substrate holding convexities among the plurality of circular arc-shaped substrate holding convexities.

2. The vacuum suction pad according to claim 1 , wherein a coating layer having substrate releasability is formed on the top surface of the pad main body.

3. The vacuum suction pad according to claim 1 , further comprising an area forming convexity, provided on the top surface of the pad main body, for dividing the top surface of the pad main body into a plurality of vacuum suction areas in the radial direction, wherein
the vacuum suction area on the radially outer side is provided with a first intake/exhaust port, and
the vacuum suction area on the radially inner side is provided with a second intake/exhaust port.

4. The vacuum suction pad according to claim 1 , wherein
the substrate holding convexities include a contact portion that comes into contact with the substrate, and a root portion that supports the contact portion, and
a width, in the radial direction, of the contact portion is set wider than a width, in the radial direction, of the root portion.

5. The vacuum suction pad according to claim 1 , wherein
the substrate holding convexities include a contact portion that comes into contact with the substrate, and a root portion that supports the contact portion, and
a width, in the radial direction, of the contact portion is set narrower than a width, in the radial direction, of the root portion.

6. The vacuum suction pad according to claim 1 , wherein the substrate holding convexity has a circular cross-sectional shape.

7. The vacuum suction pad according to claim 1 , wherein the width, in the radial direction, of each of the substrate holding convexities located on the radially inner side is approximately the same.

8. The vacuum suction pad according to claim 1 , wherein the width, in a radial direction, of the substrate holding convexity located on the radially most outer side is narrower than the width, in the radial direction, of the other substrate holding convexity.

9. The vacuum suction pad according to claim 1 , wherein the width E and a distance D between the outermost substrate holding convexity and a substrate holding convexity located inwardly next to the outermost substrate holding convexity are greater than the width C.

10. The vacuum suction pad according to claim 1 , wherein the width of the outermost substrate holding convexity is smaller than a width of a substrate holding convexities located further inward.

11. A vacuum suction pad comprising:
a pad main body having a lower surface adhered to a stage of a substrate holder;
a plurality of circular arc-shaped substrate holding convexities, provided on a top surface of the pad main body, for holding a substrate which is attracted by vacuum suction to the top surface of the pad main body; and
an area forming convexity, provided on the top surface of the pad main body, for dividing the top surface of the pad main body into a plurality of vacuum suction areas in the radial direction,
wherein the plurality of circular arc-shaped substrate holding convexities are arranged concentrically with the pad main body having a circular shape,
wherein the vacuum suction area on the radially outer side is provided with a first intake/exhaust port,
wherein the vacuum suction area on the radially inner side is provided with a second intake/exhaust port,
wherein a width, in a radial direction, of a substrate holding convexity located on a radially outer side among the plurality of circular arc-shaped substrate holding convexities is narrower than a width, in the radial direction, of a substrate holding convexity located on a radially inner side,
wherein an outermost substrate holding convexity among the plurality of circular arc-shaped substrate holding convexities has a narrowest width among the plurality of circular arc-shaped substrate holding convexities, and
wherein a width E, in the radial direction, between the outermost substrate holding convexity and an outer convexity next to the outermost substrate holding convexity is greater than a width C, in the radial direction, between two inner substrate holding convexities among the plurality of circular arc-shaped substrate holding convexities.

12. The vacuum suction pad according to claim 11 , wherein the area forming convexity is provided into the radially outer side of the pad main body.

13. The vacuum suction pad according to claim 11 , wherein the width, in the radial direction, of each of the circular arc-shaped substrate holding convexities is approximately the same.

14. A substrate holder comprising:
a stage for holding a substrate; and
a vacuum suction pad adhered to the stage, wherein
the vacuum suction pad includes:
a pad main body having a lower surface adhered to the stage; and
a plurality of circular arc-shaped substrate holding convexities, provided on a top surface of the pad main body, for holding a substrate which is attracted by vacuum suction to the top surface of the pad main body, wherein
the plurality of circular arc-shaped substrate holding convexities are arranged concentrically with the pad main body having a circular shape, and
a width, in a radial direction, of the substrate holding convexity located on a radially outer side among the plurality of circular arc-shaped substrate holding convexities is narrower than a width, in the radial direction, of the substrate holding convexity located on a radially inner side, wherein
an outermost substrate holding convexity among the plurality of circular arc-shaped substrate holding convexities has a narrowest width among the plurality of circular arc-shaped substrate holding convexities, and
a width E, in the radial direction, between the outermost substrate holding convexity and an outer convexity next to the outermost substrate holding convexity is greater than a width C, in the radial direction, between two inner substrate holding convexities among the plurality of circular arc-shaped substrate holding convexities.

15. The substrate holder according to claim 14 , further comprising a first intake/exhaust line and a second intake/exhaust line, and
wherein the vacuum suction pad further including: an area forming convexity, provided on the top surface of the pad main body, for dividing the top surface of the pad main body into a plurality of vacuum suction areas in the radial d

Assignees

• Ebara Corp

Inventors

• Yamamoto Satoru
• Nakanishi Masayuki
• Kodera Kenji

Classifications

• H10P72/78 Primary

  using vacuum or suction, e.g. Bernoulli chucks · CPC title

• Y10T279/11

  Vacuum · CPC title

• B23B31/307 Primary

  Vacuum chucks · CPC title

• B24B21/008 Primary

  Machines comprising two or more tools or having several working posts (B24B21/006 takes precedence) · CPC title

• B24B57/02

  for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents · CPC title