Method for Extreme Ultraviolet Lithography Mask Treatment
US-2019324364-A1 · Oct 24, 2019 · US
US10639680B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10639680-B2 |
| Application number | US-201916411320-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 14, 2019 |
| Priority date | Feb 4, 2015 |
| Publication date | May 5, 2020 |
| Grant date | May 5, 2020 |
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A system for the detection of foreign object debris material on a surface includes an ultraviolet light source configured to direct ultraviolet light across a surface. The surface is an outer surface of a composite part being formed by a composite layup machine. The system includes an ultraviolet light camera configured to scan the surface and output a first signal proportional to reflected ultraviolet light reflected by at least one of the surface and a first type of foreign object debris material. The reflected ultraviolet light is responsive to the ultraviolet light from the ultraviolet light source. The system also includes a controller coupled to the ultraviolet light source and to the ultraviolet light camera. The controller is configured to compare the first signal from the ultraviolet light camera with a first threshold to detect presence of the first type of foreign object debris material.
Opening claim text (preview).
What is claimed is: 1. A system for detection of foreign object debris material, the system comprising: an ultraviolet light source configured to direct ultraviolet light across a surface, wherein the surface is an outer surface of a composite part being formed by a composite layup machine; an ultraviolet light camera configured to scan the surface and output a first signal proportional to reflected ultraviolet light reflected by at least one of the surface and a first type of foreign object debris material, the reflected ultraviolet light responsive to the ultraviolet light from the ultraviolet light source; and a controller coupled to the ultraviolet light source and to the ultraviolet light camera, the controller configured to compare the first signal from the ultraviolet light camera with a first threshold to detect presence of the first type of foreign object debris material. 2. The system of claim 1 , further comprising a controllable nozzle coupled to a gas source and coupled to the controller, wherein, responsive to detection of the first type of foreign object debris material, the controller is configured to aim the controllable nozzle at the first type of foreign object debris material and direct gas through the controllable nozzle to remove the first type of foreign object debris material from the surface. 3. The system of claim 1 , further comprising a terminal coupled to the controller, the terminal including a display, and wherein the controller is further configured to provide an indication on the display upon detection that foreign object debris material is located on the surface. 4. The system of claim 1 , further comprising: a visible light source configured to direct visible light across the surface; a visible light camera configured to scan the surface to detect and output a second signal proportional to reflected visible light reflected by at least one of the surface and a second type of foreign object debris material; and wherein the controller is coupled to the visible light source and to the visible light camera, the controller configured to compare the second signal from the visible light camera with a second threshold to detect presence of the second type of foreign object debris material. 5. The system of claim 1 , further comprising a platform to support the ultraviolet light source and the ultraviolet light camera, the platform coupled to the composite layup machine. 6. The system of claim 1 , further comprising a platform to support the ultraviolet light source and the ultraviolet light camera, wherein a conveyor moves the composite part below the platform. 7. The system of claim 1 , further comprising a second nozzle configured to direct pressurized air at the surface ahead of a location where the ultraviolet light source directs the ultraviolet light across the surface. 8. The system of claim 1 , wherein the controller is configured to synchronize a speed of operation of the ultraviolet light camera to a speed of the composite layup machine. 9. The system of claim 1 , wherein the controller is configured to record a location of detected foreign object debris material. 10. A system for detection of foreign object debris material, the system comprising an ultraviolet light source configured to direct ultraviolet light across a surface of a composite part; an ultraviolet light camera configured to scan the surface and output a first signal proportional to reflected ultraviolet light reflected by at least one of the surface and a first type of foreign object debris material, the reflected ultraviolet light responsive to the ultraviolet light from the ultraviolet light source; a controller coupled to the ultraviolet light source and to the ultraviolet light camera, the controller configured to compare the first signal from the ultraviolet light camera with a first threshold to detect presence of the first type of foreign object debris material; and a controllable nozzle coupled to a high pressure gas source and coupled to the controller, wherein the controller, in response to detection of the first type of foreign object debris material on the surface, directs gas through the controllable nozzle at the first type of foreign object debris material. 11. The system of claim 10 , further comprising a composite layup machine to apply a layer of material to the surface of the composite part. 12. The system of claim 11 , further comprising a platform coupled to the composite layup machine, wherein the platform supports the ultraviolet light source, the ultraviolet light camera, and the controllable nozzle. 13. The system of claim 11 , wherein the controller is configured to synchronize a speed of operation of the ultraviolet light camera to a speed of the composite layup machine. 14. The system of claim 10 , further comprising a terminal coupled to the controller, the terminal including a display, and wherein the controller is further configured to provide an indication on the display upon the detection that foreign object debris material is located on the surface. 15. The system of claim 10 , further comprising: a visible light source configured to direct visible light across the surface; a visible light camera configured to scan the surface to detect and output a second signal proportional to reflected visible light reflected by at least one of the surface and a second type of foreign object debris material; and wherein the controller is coupled to the visible light source and to the visible light camera, the controller configured to compare the second signal from the visible light camera with a second threshold to detect presence of the second type of foreign object debris material. 16. The system of claim 15 , wherein the controller, in response to detection of the second type of foreign object debris material on the surface, directs gas through the controllable nozzle at the second type of foreign object debris material. 17. The system of claim 10 , further comprising a second nozzle configured to direct pressurized air at the surface ahead of a location where the ultraviolet light source directs the ultraviolet light across the surface. 18. The system of claim 10 , wherein the controller is configured to record a location of detected foreign object debris material. 19. A method for detection of foreign object debris material on a surface, the method comprising: receiving a signal at a controller from an ultraviolet camera, the signal proportional to ultraviolet light reflected from the surface, ultraviolet light reflected by a first type of foreign object debris material, or both, wherein the ultraviolet camera scans the surface responsive to ultraviolet light directed across the surface from an ultraviolet light source; comparing, at the controller, the signal to a threshold to detect presence of the first type of foreign object debris material; and in response to detection of the presence of the first type of foreign object debris material, sending a first command from the controller to a controllable nozzle, wherein the first command causes the controllable nozzle to direct high pressure gas at the first type of foreign object debris material. 20. The method of claim 19 , further comprising, in response to the controller detecting the presence of a second type of foreign object debris material based on reflected or emitted infrared light data received from an infrared camera, sending a second command from the controller to the controllable nozzle, wherein the second command causes
Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges (G01N21/8806 and G01N21/93 - G01N21/95692 take precedence; optical measurement of dimensions G01B11/00; optical scanning G02B26/10; image transformation G06T3/00; computerised image enhancement G06T5/00; image processing per se for flaw detection G06T7/0002) · CPC title
Cleaning by the force of jets, e.g. blowing-out cavities {(airguns or nozzles per se B05B1/005)} · CPC title
Investigating contamination, e.g. dust (G01N21/85 takes precedence) · CPC title
Scanning by mechanical motion of stage · CPC title
Investigation of composite materials · CPC title
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