Semiconductor package structure and method for forming the same

Patent metadata

Field	Value
Publication number	US-10636773-B2
Application number	US-201615203444-A
Country	US
Kind code	B2
Filing date	Jul 6, 2016
Priority date	Sep 23, 2015
Publication date	Apr 28, 2020
Grant date	Apr 28, 2020

Abstract

A semiconductor package structure is provided. The semiconductor package structure includes a first semiconductor die including a first active surface and a first non-active surface. The semiconductor package structure also includes a second semiconductor die including a second active surface and a second non-active surface. The second semiconductor die is stacked on the first semiconductor die. The first non-active surface faces the second non-active surface. The semiconductor package structure further includes a first redistribution layer (RDL) structure. The first active surface faces the first RDL structure. In addition, the semiconductor package structure includes a second RDL structure. The second active surface faces the second RDL structure.

First claim

What is claimed is:

1. A semiconductor package structure, comprising:
a first semiconductor die comprising a first active surface and a first non-active surface;
a second semiconductor die comprising a second active surface and a second non-active surface, wherein the second semiconductor die is stacked on the first semiconductor die, and the first non-active surface faces the second non-active surface;
a third semiconductor die comprising a third active surface and a third non-active surface, wherein the third semiconductor die is stacked on the first semiconductor die, and the first non-active surface faces the third non-active surface;
a first redistribution layer structure, wherein the first active surface faces the first redistribution layer structure;
a second redistribution layer structure, wherein the second active surface faces the second redistribution layer structure;
conductive vias extending between the first and second redistribution layer structures electrically connecting the first and second semiconductor dies through the first and second redistribution layer structures; and
a semiconductor package disposed over the second redistribution layer structure, the semiconductor package being electrically and physically in contact with the second redistribution layer structure,
wherein each of the first redistribution layer structure and the second redistribution layer structure comprises a conductive trace disposed in an IMD layer, and
wherein the semiconductor package structure further comprises a molding compound between the second and third semiconductor dies, and
wherein the semiconductor package structure further comprises a fourth semiconductor die comprising a fourth active surface and a fourth non-active surface, wherein the third semiconductor die is stacked on the fourth semiconductor die, and the fourth non-active surface faces the third non-active surface.

2. The semiconductor package structure as claimed in claim 1 , further comprising an adhesive layer in direct contact with the first non-active surface and the second non-active surface.

3. The semiconductor package structure as claimed in claim 1 , wherein the conductive vias are disposed around the first and second semiconductor dies.

4. The semiconductor package structure as claimed in claim 3 , further comprising a portion of the molding compound surrounding the conductive vias and the first and second semiconductor dies.

5. The semiconductor package structure as claimed in claim 4 , wherein the first redistribution layer structure and the second redistribution layer structure are located on two opposite sides of the portion of the molding compound.

6. The semiconductor package structure as claimed in claim 1 , wherein a sidewall of the first semiconductor die is substantially coplanar with a sidewall of the second semiconductor die.

7. A semiconductor package structure, comprising:
a first semiconductor die comprising a first conductive pad, the first semiconductor die comprising a first active surface and a first non-active surface;
a second semiconductor die comprising a second conductive pad, wherein the second semiconductor die vertically overlaps the first semiconductor die, and the first and second conductive pads face away from each other, the second semiconductor die comprising a second active surface and a second non-active surface;
a third semiconductor die stacked on the first semiconductor die, the third semiconductor die having a third non-active surface and a third active surface;
at least one molding compound surrounding the first semiconductor die and the second semiconductor die, and between the second and third semiconductor dies;
a first redistribution layer structure and a second redistribution layer structure positioned on two opposite sides of the at least one molding compound, wherein each of the first redistribution layer structure and the second redistribution layer structure comprises a conductive trace disposed in an IMD layer;
conductive vias extending between the first and second redistribution layer structures electrically connecting the first and second semiconductor dies through the first and second redistribution layer structures; and
a semiconductor package disposed over the second redistribution layer structure, the semiconductor package being electrically and physically in contact with the second redistribution layer structure,
wherein the semiconductor package structure further comprises a fourth semiconductor die comprising a fourth active surface and a fourth non-active surface, wherein the third semiconductor die is stacked on the fourth semiconductor die, and the fourth non-active surface faces the third non-active surface.

8. The semiconductor package structure as claimed in claim 7 , wherein the conductive vias penetrate the at least one molding compound, and wherein the first conductive pad is electrically connected to the second conductive pad through at least one conductive via.

9. The semiconductor package structure as claimed in claim 8 , wherein a portion of the at least one molding compound is sandwiched between the conductive vias and the first or second semiconductor die.

10. The semiconductor package structure as claimed in claim 8 , wherein the conductive vias are thicker than one or both of the first semiconductor die and the second semiconductor die.

11. The semiconductor package structure as claimed in claim 7 , further comprising an adhesive layer between the first semiconductor die and the second semiconductor die and surrounded by the at least one molding compound.

12. The semiconductor package structure as claimed in claim 7 ,
wherein the first conductive pad faces the first redistribution layer structure and the second conductive pad faces the second redistribution layer structure.

13. The semiconductor package structure as claimed in claim 12 , further comprising a conductive component connected to the first redistribution layer structure.

14. The semiconductor package structure as claimed in claim 13 , further comprising a solder mask layer on the second redistribution layer structure, wherein the solder mask layer comprises an opening exposing a portion of the second redistribution layer structure.

15. A method for forming a semiconductor package structure, comprising:
providing a first semiconductor die comprising a first active surface and a first non-active surface;
stacking a second semiconductor die and a third semiconductor die on the first semiconductor die, wherein the first non-active surface faces a second non-active surface of the second semiconductor die and a third non-active surface of the third semiconductor die, wherein the third semiconductor die is stacked on a fourth semiconductor die comprising a fourth active surface and a fourth non-active surface, and the fourth non-active surface faces the third non-active surface;
forming conductive vias;
forming at least one molding compound surrounding the first and second semiconductor dies, and between the second and third semiconductor dies, wherein the at least one molding compound is thicker than a vertical stack of the first semiconductor die and the second semiconductor die and the conductive vias extend completely through the at least one molding compound;
forming a first redistribution layer structure, wherein the first active surface faces the first redistribution layer structure; and
forming a second redistribution layer structure, wherein a second active area of the second semiconductor die faces the second redistribution layer structure, and the first and second redistribution laye

Assignees

• Mediatek Inc

Inventors

• Kuo Che-Hung
• Chou Che-Ya

Classifications

• H01L23/5389

  Electricity · mapped topic

• H01L2224/92244

  Electricity · mapped topic

• H01L2225/1035

  Electricity · mapped topic

• H01L2224/73265

  Electricity · mapped topic

• H01L25/105 Primary

  Electricity · mapped topic