Highly wrinkled metal thin films using lift-off layers
US-2017232725-A1 · Aug 17, 2017 · US
US10634482B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10634482-B2 |
| Application number | US-201816218297-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 12, 2018 |
| Priority date | May 19, 2014 |
| Publication date | Apr 28, 2020 |
| Grant date | Apr 28, 2020 |
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A method of making a sensor apparatus including placing a mask over a polymeric sheet, wherein the mask is configured to block regions of the polymeric sheet, depositing a conductive structure on the polymeric sheet at regions exposed through the mask, shrinking the polymeric sheet with conductive structure patterned on its surface by heating, and transferring the conductive structure to a flexible substrate.
Opening claim text (preview).
What is claimed is: 1. A method of making a sensor apparatus, comprising: placing a a mask over a polymeric sheet, wherein the mask is configured to block regions of the polymeric sheet, depositing a conductive structure on the polymeric sheet at regions exposed through the mask, shrinking the polymeric sheet with the conductive structure patterned on its surface by heating, wherein the conductive structure on the surface of the polymeric sheet becomes shrunken, and transferring the shrunken conductive structure to a flexible substrate. 2. The method of claim 1 , further comprising applying an adhesive layer to said conductive structure after shrinking the polymeric sheet and before transferring the shrunken conductive structure to the flexible substrate, wherein said conductive structure is bonded by the adhesive layer to the flexible substrate. 3. The method of claim 1 , wherein said shrunken conductive structure is covalently bonded by the adhesive layer to the flexible substrate. 4. The method of claim 1 , wherein the flexible substrate is an elastomeric polymer. 5. The method of claim 1 , further comprising casting the flexible substrate on the same surface of the polymeric sheet where the shrunken conductive structure is deposited. 6. The method of claim 1 , wherein the polymeric sheet comprises a shape-memory polyolefin (PO) film. 7. The method of claim 1 , wherein the polymeric sheet comprises polystyrene.
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