Recursive inject apparatus for improved distribution of gas

Patent metadata

Field	Value
Publication number	US-10633741-B2
Application number	US-201615192159-A
Country	US
Kind code	B2
Filing date	Jun 24, 2016
Priority date	Jun 26, 2015
Publication date	Apr 28, 2020
Grant date	Apr 28, 2020

Abstract

Apparatus and methods for processing a substrate including an injector unit insert with a plurality of flow paths leading to a first plenum, each of the flow paths providing one or more of substantially the same residence time, length and/or conductance. Injector units including the injector unit inserts have increased flow uniformity.

First claim

What is claimed is:

1. An injector unit insert, comprising:
a first insert component having a gas inlet line;
a second insert component including a channel sized to hold the first insert component in an upper portion of the channel and maintain a flow path in a lower portion of the channel, the channel forming a flow path in a first arm in fluid communication with the gas inlet line, the first arm splitting a gas flow into two flow paths in two first legs, each first leg splitting at a second arm into two flow paths, each end of the second arms having a hole extending through the second insert component; and
a third insert component having a top surface and a bottom surface, the top surface including a plurality of recesses so that when a bottom surface of the second insert component is against the top surface of the third insert component, the plurality of recesses form a plurality of channels, each of the plurality of channels aligned to form fluid communication with a gas flowing through the holes in the second insert component.

2. The injector unit insert of claim 1 , wherein each channel in the third insert component comprises a third arm in fluid communication with the hole in the second insert component, each third arm splitting a flow path into two third legs on either end of the third arm.

3. The injector unit insert of claim 2 , wherein each third leg connects to and is in fluid communication with a fourth arm, and each fourth arm splits a flow path into two fourth legs.

4. The injector unit insert of claim 3 , wherein each fourth leg extends through a thickness of the third insert component and forms an opening in the bottom surface of the third insert component.

5. The injector unit insert of claim 4 , wherein each opening in the third insert component is in fluid communication with the gas line inlet and forms a flow path, each flow path has substantially the same residence time.

6. The injector unit insert of claim 4 , wherein each opening in the third insert component is in fluid communication with the gas line inlet and forms a flow path, each flow path has substantially the same length.

7. The injector unit insert of claim 4 , wherein each opening in the third insert component is in fluid communication with the gas line inlet and forms a flow path, each flow path has substantially the same conductance.

8. The injector unit insert of claim 1 , wherein each junction between a leg and arm occurs at a substantially right angle.

9. The injector unit insert of claim 1 , wherein the gas inlet line forms 16 outlets in the bottom surface of the third insert component.

10. The injector unit insert of claim 1 , wherein each first leg connects to a center of each second arm.

11. The injector unit insert of claim 1 , wherein openings in the bottom surface of the third insert component are substantially equidistant.

12. The injector unit insert of claim 1 , wherein openings in the bottom surface of the third insert component are aligned along a center line of the bottom surface.

13. An injector unit comprising:
an injector body having a back face and front surface;
an injector unit insert according to claim 1 positioned in the injector body;
a first plenum adjacent a bottom face of the injector unit insert; and
a plurality of plenum channels extending from the first plenum toward the front surface of the injector body, the plurality of channels in fluid communication with the first plenum; and
a gas port in the front surface of the injector body, the gas port in fluid communication with the plurality of channels.

14. The injector unit of claim 13 , further comprising a showerhead positioned within the gas port and in fluid communication with the plurality of plenum channels.

15. The injector unit of claim 14 , further comprising a second plenum between the plurality of plenum channels and the showerhead.

16. The injector unit of claim 14 , wherein the injector unit is wedge shaped.

Assignees

• Applied Materials Inc

Inventors

• Miller Aaron
• Bera Kallol

Classifications

• H10P72/0402

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• C23C16/45565

  Shower nozzles · CPC title

• H01J37/3244

  Gas supply means · CPC title

• C23C16/45551 Primary

  for relative movement of the substrate and the gas injectors or half-reaction reactor compartments · CPC title

• C23C16/45578 Primary

  Elongated nozzles, tubes with holes · CPC title