Anisotropic magneto-resistive (AMR) angle sensor die comprising a plurality of AMR angle sensors

Patent metadata

Field	Value
Publication number	US-10627459-B2
Application number	US-201715651206-A
Country	US
Kind code	B2
Filing date	Jul 17, 2017
Priority date	Jul 17, 2017
Publication date	Apr 21, 2020
Grant date	Apr 21, 2020

Abstract

Some embodiments are directed to an anisotropic magneto-resistive (AMR) angle sensor die. The die comprises a plurality of AMR angle sensors, each of the plurality of AMR angle sensors comprising a first Wheatstone bridge and a second Wheatstone bridge, wherein an angle position output of the sensor die includes a combination of angle position outputs of each of the plurality of AMR angle sensors.

First claim

What is claimed is:

1. An anisotropic magneto-resistive (AMR) angle sensor die, comprising:
a plurality of AMR angle sensors coupled to each other in series, each of the plurality of AMR angle sensors comprising a first Wheatstone bridge and a second Wheatstone bridge, wherein an angle position output of the sensor die includes a combination of angle position outputs of each of the plurality of AMR angle sensors.

2. The AMR angle sensor die of claim 1 , further comprising:
a first AMR angle sensor that comprises a first Wheatstone bridge comprising a first serpentine resistor, a second serpentine resistor, a third serpentine resistor, and a fourth serpentine resistor and a second Wheatstone bridge that comprises a fifth serpentine resistor, a sixth serpentine resistor, a seventh serpentine resistor, and an eighth serpentine resistor, and
a second AMR angle sensor that comprises a third Wheatstone bridge comprising a ninth serpentine resistor, a tenth serpentine resistor, an eleventh serpentine resistor, and a twelfth serpentine resistor and a fourth Wheatstone bridge comprising a thirteenth serpentine resistor, a fourteenth serpentine resistor, a fifteenth serpentine resistor, and a sixteenth serpentine resistor.

3. The AMR angle sensor die of claim 2 , wherein:
each of the serpentine resistors defines a substantially trapezoidal polygon disposed in substantially a same plane as the other serpentine resistors,
the first through eighth serpentine resistors are disposed to define a substantially regular first octagonal polygon, where the fifth serpentine resistor is located between the first serpentine resistor and the second serpentine resistor, the sixth serpentine resistor is located between the second serpentine resistor and the third serpentine resistor, the seventh serpentine resistor is located between the third and the fourth serpentine resistor, and the eighth serpentine resistor is located between the fourth serpentine resistor and the first serpentine resistor, and
the ninth through sixteenth serpentine resistors are disposed to define a substantially regular second octagonal polygon, where the thirteenth serpentine resistor is located between the ninth serpentine resistor and the tenth serpentine resistor, the fourteenth serpentine resistor is located between the tenth serpentine resistor and the eleventh serpentine resistor, the fifteenth serpentine resistor is located between the eleventh and the twelfth serpentine resistor, and the sixteenth serpentine resistor is located between the twelfth serpentine resistor and the ninth serpentine resistor.

4. The AMR angle sensor die of claim 2 , further comprising:
a third AMR angle sensor that comprises a fifth Wheatstone bridge comprising a seventeenth serpentine resistor, an eighteenth serpentine resistor, a nineteenth serpentine resistor, and a twentieth serpentine resistor and a sixth Wheatstone bridge that comprises a twenty-first serpentine resistor, a twenty-second serpentine resistor, a twenty-third serpentine resistor, and a twenty-fourth serpentine resistor, and
a fourth AMR angle sensor that comprises a seventh Wheatstone bridge comprising a twenty-fifth serpentine resistor, a twenty-sixth serpentine resistor, a twenty-seventh serpentine resistor, and a twenty-eighth serpentine resistor and an eighth Wheatstone bridge comprising a twenty-ninth serpentine resistor, a thirtieth serpentine resistor, a thirty-first serpentine resistor, and a thirty-second serpentine resistor.

5. The AMR angle sensor die of claim 1 , wherein the first Wheatstone bridge of each of the plurality of AMR angle sensors comprises four serpentine resistors and the second Wheatstone bridge of each of the AMR angle sensors comprises four other serpentine resistors, where the serpentine resistors of the first and second Wheatstone bridge comprise anisotropic magneto-resistive material.

6. The AMR angle sensor die of claim 5 , wherein the anisotropic magneto-resistive material comprises nickel and iron.

7. The AMR angle sensor die of claim 1 , wherein the die has a planar area of less than 1.2 mm×1.2 mm.

8. An anisotropic magneto-resistive (AMR) angle sensor package, comprising:
a sensor die comprising a plurality of AMR angle sensors coupled to each other in series, each of the plurality of AMR angle sensors comprising a first Wheatstone bridge and a second Wheatstone bridge disposed in a same plane and disposed in an octagonal pattern, wherein an angle position output of the sensor die includes a combination of angle position outputs of each of the AMR angle sensors.

9. The AMR angle sensor package of claim 8 , further comprising an analog front end (AFE) electrically coupled to the sensor die that is configured to provide electrical power and ground to each of the plurality of AMR angle sensors and provides signal conditioning to the angle position output of the sensor die.

10. The AMR sensor package of claim 9 , wherein the sensor die comprises:
a first AMR angle sensor that comprises a first Wheatstone bridge comprising a first serpentine resistor, a second serpentine resistor, a third serpentine resistor, and a fourth serpentine resistor and a second Wheatstone bridge that comprises a fifth serpentine resistor, a sixth serpentine resistor, a seventh serpentine resistor, and an eighth serpentine resistor, and
a second AMR angle sensor that comprises a third Wheatstone bridge comprising a ninth serpentine resistor, a tenth serpentine resistor, an eleventh serpentine resistor, and a twelfth serpentine resistor and a fourth Wheatstone bridge comprising a thirteenth serpentine resistor, a fourteenth serpentine resistor, a fifteenth serpentine resistor, and a sixteenth serpentine resistor.

11. The AMR angle sensor package of claim 10 , wherein a first angle position output of the sensor die is the sum of a voltage across the first Wheatstone bridge and a voltage across the third Wheatstone bridge and a second angle position output of the sensor die is the sum of a voltage across the second Wheatstone bridge and a voltage across the fourth Wheatstone bridge.

12. The AMR angle sensor package of claim 11 , wherein an angular position α indicated by the AMR angle sensor package is determined based on

α
=

tan

-
1

⁡

(

V
A

V
B

)

+
θ

where V A is proportional to the sum of the voltages across the first and third Wheatstone bridges, V B is proportional to the sum of the voltages across the second and fourth Wheatstone bridges, and θ is a constant angle.

13. The AMR sensor package of claim 10 wherein the sensor die further comprises:
a third AMR angle sensor that comprises a fifth Wheatstone bridge comprising a seventeenth serpentine resistor, an eighteenth serpentine resistor, a nineteenth serpentine resistor, and a twentieth serpentine resistor and a sixth Wheatstone bridge that comprises a twenty-first serpentine resistor, a twenty-second serpentine resistor, a twenty-third serpentine resistor, and a twenty-four

Assignees

• Texas Instruments Inc

Inventors

• Lee Dok Won

Classifications

• G01R33/0052

  Manufacturing aspects; Manufacturing of single devices, i.e. of semiconductor magnetic sensor chips (devices based on galvano-magnetic effect or the like H10N50/85) · CPC title

• G01D5/145

  influenced by the relative movement between the Hall device and magnetic fields (see G01R33/06) · CPC title

• G01D5/16

  by varying resistance · CPC title

• G01B7/003

  for measuring position, not involving coordinate determination (coordinate measuring G01B7/004) · CPC title

• G01B7/30

  for measuring angles or tapers; for testing the alignment of axes · CPC title