Modular photoacoustic detection device

Patent metadata

Field	Value
Publication number	US-10627339-B2
Application number	US-201916357915-A
Country	US
Kind code	B2
Filing date	Mar 19, 2019
Priority date	Jun 8, 2015
Publication date	Apr 21, 2020
Grant date	Apr 21, 2020

Abstract

Modular photoacoustic detection device comprising:
a photoacoustic cell including at least two chambers connected by at least two capillaries and forming a Helmholtz type differential acoustic resonator; acoustic detectors coupled to the chambers; a light source capable of emitting a light beam having at least one wavelength capable of exciting a gas intended to be detected and which can be modulated to a resonance frequency of the photoacoustic cell; a first photonic circuit optically coupling the light source to an input face of a first of the chambers; wherein the first photonic circuit is arranged in a detachable manner in a first housing formed in the acoustic cell and emerging on the input face of the first chamber.

First claim

The invention claimed is:

1. A modular photoacoustic detection device comprising:
a photoacoustic cell including at least two chambers connected by at least two capillaries and forming a Helmholtz type differential acoustic resonator;
acoustic detectors coupled to the chambers;
a light source configured to emit a light beam having at least one wavelength for exciting a gas to be detected and which can be modulated to a resonance frequency of the photoacoustic cell;
a first photonic circuit configured to optically couple the light source to an input face of a first of the chambers, wherein
the first photonic circuit is arranged in a detachable manner in a first housing formed in the photoacoustic cell and emerging on the input face of the first chamber, and
the photoacoustic detection device further comprising at least one first cooling system configured to thermally adjust the light source and, when the light source is not arranged against the first photonic circuit, a second cooling system configured to thermally adjust the photoacoustic cell independently of the light source.

2. The device according to claim 1 , wherein the acoustic detectors are coupled in a detachable manner to the photoacoustic cell.

3. The device according to claim 1 , wherein the photoacoustic cell comprises at least one stack of a first layer and of a second layer of material in which are formed the chambers, the capillaries, the first housing, at least two openings each emerging in one of the capillaries and at least two locations each communicating with one of the chambers and in which the acoustic detectors are arranged.

4. The device according to claim 3 , wherein:
the locations are formed in a part of a thickness of the first layer and cross through an upper face of the first layer;
the openings cross through the entire thickness of the first layer;
a first part of each of the chambers is formed in a part of the thickness of the first layer and crosses through a lower face of the first layer opposite to the upper face of the first layer;
the capillaries are formed in a part of the thickness of the first layer and cross through the lower face of the first layer;
a second part of each of the chambers is formed in a part of a thickness of the second layer and crosses through an upper face of the second layer which is arranged against the lower face of the first layer, the first and second parts of each of the chambers being arranged facing each other;
the first housing is formed in a part of the thickness of the second layer and crosses through the upper face of the second layer.

5. The device according to claim 1 , wherein the photoacoustic cell comprises at least one stack of a first layer, second layer, third layer, and fourth layer of material in which are formed the chambers, the capillaries, the first housing, at least two openings each emerging in one of the capillaries and at least two locations each communicating with one of the chambers and in which the acoustic detectors are arranged.

6. The device according to claim 5 , wherein:
the capillaries cross through an entire thickness of the second layer, the first and third layers between which the second layer is located forming upper and lower walls of the two capillaries;
the chambers and the first housing cross through the entire thickness of the third layer, the second and fourth layers between which is located the third layer forming upper and lower walls of the chambers and of the first housing;
the locations cross through the entire thickness of the fourth layer;
the openings cross through the entire thickness of the third and fourth layers.

7. The device according to claim 1 , wherein the photoacoustic cell is formed of a monolithic part of sintered powders.

8. The device according to claim 1 , wherein the light source is optically coupled to an input face of the first photonic circuit by at least one collimation system comprising at least one lens, and wherein the first photonic circuit forms at least one waveguide.

9. The device according to claim 1 , wherein the light source is configured to emit a light beam having several wavelengths and is arranged against the first photonic circuit which forms an arrayed waveguide grating multiplexer-demultiplexer circuit.

10. The device according to claim 1 , wherein the light source is optically coupled to an input face of the first photonic circuit by at least one optic fiber, and wherein the first photonic circuit forms at least one waveguide or an arrayed waveguide grating multiplexer-demultiplexer circuit.

11. The device according to claim 1 , wherein the photoacoustic cell further comprises at least one second housing emerging on an output face of the first chamber, and further comprising at least one second photonic circuit optically coupling the output face of the first chamber to an optical detector and arranged in a detachable manner in the second housing.

12. The device according to claim 1 , wherein the photoacoustic cell comprises one or more metals.

13. The device according to claim 1 , wherein a distance between the at least two capillaries is equal to half of a length of at least one of the chambers.

14. A gas detection device, comprising the device according to claim 1 and gas input and output channels communicating with the chambers of the photoacoustic detection device, and wherein said at least one wavelength of the light beam emitted by the light source corresponds to at least one absorption wavelength of at least one gas to be detected.

15. A method for producing a modular photoacoustic detection device, comprising:
producing at least one photoacoustic cell including at least two chambers connected by at least two capillaries and forming a Helmholtz type differential acoustic resonator;
coupling acoustic detectors to the chambers;
producing at least one light source configured to emit a light beam having at least one wavelength for making the photoacoustic cell resonate;
producing at least one first photonic circuit arranged in a detachable manner in a first housing formed in the photoacoustic cell and emerging on an input face of a first of the chambers, and optically coupling the at least one light source to the input face of the first chamber, and
producing at least one first cooling system configured to thermally adjust the at least one light source and, when the at least one light source is not arranged against the first photonic circuit, a second cooling system configured to thermally adjust the photoacoustic cell independently of the light source.

16. The method according to claim 15 , wherein:
the production of the at least one photoacoustic cell comprises production of at least one stack of a first layer and of a second layer of material in which are formed, by chemical etching implemented in a part of a thickness of each of the first layer and the second layer, the chambers, the capillaries, the first housing, at least two openings each emerging in one of the capillaries and at least two locations each communicating with one of the chambers and in which the acoustic detectors are arranged, or
the production of the at least one photoacoustic cell comprises production of at least one stack of a first layer, a second layer, a third layer, and a fourth layer of material in which are formed, by chemical etching or laser implemented in an entire thickness of each of the second lay the third layer, and the fourth layer, the chambers, the capillaries, the first housing, at least two openings each emerging in one of the capillaries and at least two locations each communica

Assignees

• Commissariat Energie Atomique

Inventors

• Rouxel Justin
• Brun Mickael
• Gliere Alain
• Nicoletti Sergio

Classifications

• G01N2021/1704

  in gases · CPC title

• G01N2201/0245

  with insertable-removable part · CPC title

• G01N2291/02872

  Pressure · CPC title

• G01N29/2425

  optoacoustic fluid cells therefor · CPC title

• G01N21/1702 Primary

  with opto-acoustic detection, e.g. for gases or analysing solids · CPC title