Chemically amplified positive resist composition and resist pattern forming process
US-12164231-B2 · Dec 10, 2024 · US
Method for producing copolymer
US10626205B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10626205-B2 |
| Application number | US-201716081535-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 3, 2017 |
| Priority date | Mar 25, 2016 |
| Publication date | Apr 21, 2020 |
| Grant date | Apr 21, 2020 |
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- Title
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- Abstract
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Abstract
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The present disclosure provides a method for efficiently producing an α-alkylstyrene α-chloroacrylate copolymer having a high monomer conversion rate. According to the present disclosure, the method for producing a copolymer containing 30 mol % to 70 mol % of an α-alkylstyrene unit and 30 mol % to 70 mol % of an α-chloroacrylate unit includes a step of performing solution polymerization of a monomer composition containing α-alkylstyrene and α-chloroacrylate, and uses ketone as a polymerization solvent for the solution polymerization.
First claim
Opening claim text (preview).
The invention claimed is: 1. A method for producing a copolymer containing 30 mol % to 70 mol % of an α-alkylstyrene unit and 30 mol % to 70 mol % of an α-chloroacrylate unit, the method for producing a copolymer includes: a step of performing solution polymerization of a monomer composition containing α-alkylstyrene and α-chloroacrylate, wherein ketone is used as a polymerization solvent for the solution polymerization. 2. The method for producing a copolymer according to claim 1 , wherein cycloketone is used as the polymerization solvent. 3. The method for producing a copolymer according to claim 1 , wherein cyclopentanone or cyclohexanone is used as the polymerization solvent. 4. The method for producing a copolymer according to claim 1 , wherein α-methylstyrene is used as α-alkylstyrene, and methyl α-chloroacrylate is used as α-chloroacrylate. 5. The method for producing a copolymer according to claim 1 , wherein a total content of the α-alkylstyrene unit and the α-chloroacrylate unit in the copolymer accounts for 100 mol %. 6. The method for producing a copolymer according to claim 1 , wherein a weight-average molecular weight of the copolymer is 30000 to 100000. 7. The method for producing a copolymer according to claim 1 , wherein a weight-average molecular weight of the copolymer is 50000 to 70000. 8. The method for producing a copolymer according to claim 1 , wherein a molecular weight distribution of the copolymer obtained by dividing weight-average molecular weight by number-average molecular weight is 1.3 to 2.5. 9. The method for producing a copolymer according to claim 1 , wherein the solution polymerization is performed by using azobisisobutyronitrile as a polymerization initiator.
Assignees
Inventors
Classifications
- C08F220/22Primary
Esters containing halogen · CPC title
Macromolecular compounds which are photodegradable, e.g. positive electron resists (G03F7/075 takes precedence; macromolecular quinonediazides G03F7/023) · CPC title
- C08F2/06Primary
Organic solvent · CPC title
Hydrocarbons · CPC title
as molar percentages · CPC title
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- What does patent US10626205B2 cover?
- The present disclosure provides a method for efficiently producing an α-alkylstyrene α-chloroacrylate copolymer having a high monomer conversion rate. According to the present disclosure, the method for producing a copolymer containing 30 mol % to 70 mol % of an α-alkylstyrene unit and 30 mol % to 70 mol % of an α-chloroacrylate unit includes a step of performing solution polymerization of a mo…
- Who is the assignee on this patent?
- Zeon Corp
- What technology area does this patent fall under?
- Primary CPC classification C08F220/22. Mapped technology areas include Chemistry & Metallurgy.
- When was this patent published?
- Publication date Tue Apr 21 2020 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).