Multicathode deposition system and methods
US-12051576-B2 · Jul 30, 2024 · US
US10625289B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10625289-B2 |
| Application number | US-201715651034-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 17, 2017 |
| Priority date | Sep 12, 2016 |
| Publication date | Apr 21, 2020 |
| Grant date | Apr 21, 2020 |
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Official abstract text for this publication.
A mask and a method of manufacturing a mask assembly, the mask including a body, and the body including one end and another end facing each other in a length direction and having a first surface and a second surface facing each other in a thickness direction; and a pattern region between the one end and the other end, the pattern region including a plurality of pattern holes and a plurality of ribs between the plurality of pattern holes, wherein a curl value of the mask, which is defined as a shortest distance from a plane tangent to a center of the body to the one end or the other end of the body, is 1,000 μm to 4,000 μm.
Opening claim text (preview).
What is claimed is: 1. A mask comprising a body, the body including: one end and another end facing each other in a length direction and having a first surface and a second surface facing each other in a thickness direction; and a pattern region between the one end and the another end, the pattern region including a plurality of pattern holes and a plurality of ribs between the plurality of pattern holes, wherein: a curl value of the mask, which is defined as a shortest distance from a plane tangent to a center of the body to the one end or the another end of the body when the mask is in an unattached state, is 1,000 μm to 4,000 μm, and each of the plurality of ribs includes an upper surface having a first length, a lower surface having a second length, and a side surface connecting the upper surface and the lower surface, the second length being longer than the first length, and the side surface is inclined, wherein the body includes nickel and iron, wherein a content of nickel is 35 wt % to 40 wt %, based on a total weight of nickel and iron, wherein a thickness of at least one of the plurality of ribs is 6 μm to 10 μm. 2. The mask as claimed in claim 1 , wherein the body includes a first welding region at the one end and a second welding region at the another end. 3. The mask as claimed in claim 2 , wherein a thickness of at least one of the first welding region and the second welding region is greater than a thickness of at least one of the plurality of ribs. 4. The mask as claimed in claim 2 , wherein a thickness of at least one of the first welding region and the second welding region is 6 μm to 40 μm. 5. The mask as claimed in claim 1 , wherein each rib of the plurality of ribs includes an upper surface having a first length and a lower surface having a second length, the second length being longer than the first length. 6. The mask as claimed in claim 1 , wherein: the plurality of pattern holes includes a virtual upper surface and a virtual bottom surface; and a length of the virtual upper surface of the pattern holes is longer than a length of the virtual bottom surface of the pattern holes.
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