Plasma Generator and Method for Setting an ION Ratio
US-2018249569-A1 · Aug 30, 2018 · US
Plasma generator and method for setting an ION ratio
US10624197B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10624197-B2 |
| Application number | US-201615753530-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 28, 2016 |
| Priority date | Aug 18, 2015 |
| Publication date | Apr 14, 2020 |
| Grant date | Apr 14, 2020 |
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- Title
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Abstract
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A plasma generator and a method for setting an ion ratio. In an embodiment a plasma generator includes a piezoelectric transformer suitable for ionizing a process gas, an ion separation electrode and a drive circuit suitable for applying a potential to the ion separation electrode.
First claim
Opening claim text (preview).
The invention claimed is: 1. A plasma generator comprising: a piezoelectric transformer comprising an end face and configured to directly ionize a process gas by a high voltage generated at the end face; an ion separation electrode; and a drive circuit configured to apply a potential to the ion separation electrode, wherein the process gas is ionized at the end face itself, wherein the drive circuit comprises at least one diode, and wherein the drive circuit is configured to reverse a polarity of a potential applied to the diode, thereby inverting a ratio of positive ions generated and negative ions generated, and wherein the drive circuit has two high-voltage reed relays to switch between a positive potential and a negative potential. 2. The plasma generator according to claim 1 , wherein the plasma generator is suitable for the process gas to flow through it, and wherein the process gas is ionized by the piezoelectric transformer and is subsequently guided through the ion separation electrode. 3. The plasma generator according to claim 1 , wherein the potential at the ion separation electrode defines the ratio of the positive and negative ions in a plasma generated by the plasma generator. 4. The plasma generator according to claim 1 , further comprising a tube connecting a process gas inlet and a process gas outlet, wherein the piezoelectric transformer and the ion separation electrode are arranged in the tube, and wherein the ion separation electrode is arranged between the piezoelectric transformer and the process gas outlet. 5. The plasma generator according to claim 1 , wherein the drive circuit is adjustable such that the potential at the ion separation electrode is variable. 6. The plasma generator according to claim 1 , wherein the drive circuit comprises a drive circuit transformer configured to generate an AC output voltage and a circuit configured to rectify and smooth the AC output voltage, and wherein the circuit configured to rectify and smooth the AC output voltage is connected to the ion separation electrode. 7. The plasma generator according to claim 1 , wherein the ion separation electrode is grid-shaped. 8. The plasma generator according to claim 1 , wherein the ion separation electrode comprises a metal tube. 9. The plasma generator according to claim 1 , wherein the piezoelectric transformer is configured to generate an atmospheric, non-thermal plasma.
Assignees
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Classifications
by irradiation · CPC title
- H05H1/2475Primary
using acoustic pressure discharges · CPC title
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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- What does patent US10624197B2 cover?
- A plasma generator and a method for setting an ion ratio. In an embodiment a plasma generator includes a piezoelectric transformer suitable for ionizing a process gas, an ion separation electrode and a drive circuit suitable for applying a potential to the ion separation electrode.
- Who is the assignee on this patent?
- Epcos Ag
- What technology area does this patent fall under?
- Primary CPC classification H05H1/2475. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Apr 14 2020 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 5 related publications on this page (citations in our corpus or others sharing the same primary CPC).