Variable capacitor bank

Patent metadata

Field	Value
Publication number	US-10622972-B2
Application number	US-201816126955-A
Country	US
Kind code	B2
Filing date	Sep 10, 2018
Priority date	Sep 10, 2018
Publication date	Apr 14, 2020
Grant date	Apr 14, 2020

Abstract

A variable capacitor bank includes a conductive housing and a port extending through the housing. An electrical bus is disposed within the conductive housing and coupled to the port. The variable capacitor bank further includes capacitor modules disposed within the housing. Each capacitor module includes a module input electrically coupled to the electrical bus and a switched capacitor branch electrically coupled to the module input, the switched capacitor branch including a capacitor and a switch element in series with the capacitor. In certain implementations, one or more of the capacitor modules may include at least one second switched capacitor branch. The capacitor modules may further include an unswitched, or “floor”, capacitor that provides a minimum or otherwise known capacitance of the capacitor module. Each capacitor module may further be grounded by being electrically coupled to the conductive housing.

First claim

What is claimed is:

1. A variable capacitor bank comprising:
a conductive housing defining an interior volume;
an electrical bus comprising a first portion disposed within the conductive housing and a second portion extending through the conductive housing such that the second portion of the electrical bus and the conductive housing form a port; and
a switched capacitor coupled to a substrate to form a capacitor module of a plurality of capacitor modules disposed within the conductive housing, the switch capacitor electrically coupled to the first portion of the electrical bus and the conductive housing.

2. The variable capacitor bank of claim 1 , wherein the conductive housing provides an electromagnetic barrier between the interior volume and an exterior of the conductive housing.

3. A variable capacitor bank comprising:
a conductive housing defining an interior volume;
an electrical bus comprising a first portion disposed within the conductive housing and a second portion extending through the conductive housing such that the second portion of the electrical bus and the conductive housing form a port; and
a switched capacitor disposed within the conductive housing and electrically coupled to the first portion of the electrical bus, wherein the switched capacitor comprises a PIN diode.

4. The variable capacitor bank of claim 1 , further comprising a capacitor in parallel with the switched capacitor.

5. The variable capacitor bank of claim 4 , further comprising a capacitor input, wherein each of the switched capacitor and the capacitor in parallel with the switched capacitor are coupled to the capacitor input.

6. The variable capacitor bank of claim 5 , wherein the switched capacitor is a first switched capacitor and the capacitor in parallel with the switched capacitor is a second switched capacitor.

7. A variable capacitor bank comprising:
a conductive housing defining an interior volume;
an electrical bus comprising a first portion disposed within the conductive housing and a second portion extending through the conductive housing such that the second portion of the electrical bus and the conductive housing form a port; and
a switched capacitor disposed within the conductive housing and electrically coupled to the first portion of the electrical bus, wherein the switched capacitor comprises a switch element coupled to a driver circuit adapted to induce each of a forward bias and a reverse bias on the switch element.

8. The variable capacitor bank of claim 7 , wherein the driver circuit is disposed outside the conductive housing and is coupled to the switched capacitor by a conductor extending through the conductive housing.

9. The variable capacitor bank of claim 1 , wherein the plurality of capacitor modules are disposed in a rectangular array.

10. The variable capacitor bank of claim 1 , wherein each of the plurality of capacitor modules is coupled to the electrical bus by a respective conductive path, each conductive path being substantially equal in length such that each conductive path provides a common amount of inductance.

11. The variable capacitor bank of claim 10 , wherein the port is disposed along a common axis of the electrical bus and the conductive housing, and the plurality of capacitor modules are disposed in a circular array about the port.

12. The variable capacitor bank of claim 1 , wherein the electrical bus further comprises a third portion extending through the conductive housing, such that the electrical bus and the third portion of the electrical bus define a second port.

13. A variable capacitor bank comprising:
a conductive housing;
a port extending through the conductive housing; and
a plurality of switched capacitors disposed in a circular array about the port within the conductive housing and electrically coupled to the conductive housing and the port, wherein each switched capacitor is coupled to the port by a respective conductive path, each conductive path being substantially equal in length such that each conductive path provides a common amount of inductance.

14. An impedance matching module comprising:
a variable capacitor bank disposed in a shunt between an input and an output, the variable capacitor bank comprising:
a conductive housing;
an electrical bus comprising a first portion disposed within the conductive housing and a second portion extending through the conductive housing such that the second portion of the electrical bus and the conductive housing form a port; and
a plurality of switched capacitors disposed within the conductive housing and coupled to each of the electrical bus and the conductive housing.

15. The impedance matching module of claim 14 , wherein each of the switched capacitors is in parallel with a respective capacitor, each respective capacitor being one of a switched capacitor or an unswitched capacitor.

16. The impedance matching module of claim 14 further comprising an input and an output, the variable capacitor bank disposed in series with the input and the output.

Assignees

• Advanced Energy Ind Inc

Inventors

• Crandell Courtney L

Classifications

• H03H7/38

  Impedance-matching networks · CPC title

• H01J37/32183 Primary

  Matching circuits · CPC title

• H01J37/32174

  Circuits specially adapted for controlling the RF discharge · CPC title

• H01G4/40

  Structural combinations of fixed capacitors with other electric elements, the structure mainly consisting of a capacitor, e.g. RC combinations · CPC title

• H01G4/38 Primary

  Multiple capacitors, i.e. structural combinations of fixed capacitors · CPC title