Optical inspection apparatus

Patent metadata

Field	Value
Publication number	US-10620389-B1
Application number	US-201916556303-A
Country	US
Kind code	B1
Filing date	Aug 30, 2019
Priority date	Jan 30, 2019
Publication date	Apr 14, 2020
Grant date	Apr 14, 2020

Abstract

An optical inspection apparatus includes an imaging optical system facing an inspection target, a light guide, a plurality of light sources, and a plurality of mirror surfaces. The light guide has a plurality of corner portions and extending along an optical axis of the imaging optical system. The plurality of light sources face a first end face of the light guide at positions corresponding to the plurality of corner portions. The plurality of mirror surfaces are respectively provided on second end faces of the light guide. Each of the mirror surfaces is oblique relative to the optical axis. The mirror surfaces are configured to reflect light entered into the light guide from the light sources toward the inspection target.

First claim

What is claimed is:

1. An optical inspection apparatus comprising:
an imaging optical system facing an inspection target;
a light guide having a polygonal cylindrical shape with a plurality of corner portions extending along an optical axis of the imaging optical system and including a first end face and a plurality of second end faces, each of the second end faces facing the first end face;
a plurality of light sources facing the first end face of the light guide at positions corresponding to the plurality of corner portions; and
mirror surfaces respectively provided on the second end faces of the light guide, each of the mirror surfaces being oblique relative to the optical axis and configured to reflect light entered into the light guide from the light sources toward the inspection target.

2. The apparatus of claim 1 , wherein:
the light guide includes inner surfaces, and
each of the mirror surfaces is inclined so as to approach the adjacent inner surface of the light guide to the optical axis with an increase in distance with respect to the first end face.

3. The apparatus of claim 1 , wherein:
the light guide includes inner surfaces and transmission surfaces provided on the inner surfaces of the light guide at a position facing the mirror surfaces; and
the apparatus further comprises light-shielding plates covering the inner surfaces of the light guide at a position out of the transmission surfaces.

4. The apparatus of claim 1 , wherein:
each of the second end faces of the light guide includes a chamfer formed by chamfering so as to remove an imaginary ridge line located at an intersection position between a first end portion of the light guide which is located alongside the inspection target and an outer surface of the light guide, and
each of the mirror surfaces is formed on the chamfer.

5. The apparatus of claim 1 , wherein an angle formed by each of the mirror surfaces and the optical axis is 30° to 70°.

6. The apparatus of claim 1 , wherein an incident angle of light emitted from the light guide to the inspection target on a surface of the inspection target is 60° to 80° with respect to the optical axis of the imaging optical system.

7. The apparatus of claim 1 , further comprising a cover covering an outside of the light guide.

8. The apparatus of claim 1 , wherein the optical axis of the imaging optical system extends through a hollow region inside the light guide.

9. The apparatus of claim 1 , wherein the light guide has a polygonal cylinder that is square, pentagonal, hexagonal, heptagonal or octagonal.

10. The apparatus of claim 1 , wherein the plurality of light sources are provided around the imaging optical system.

11. The apparatus of claim 1 , further comprising a heat sink thermally connected to the plurality of light sources.

Assignees

• Toshiba Kk

Inventors

• Kamikawa Takahiro
• Ohno Hiroshi
• Hato Takehiro

Classifications

• G02B6/4201 Primary

  Packages, e.g. shape, construction, internal or external details · CPC title

• G02B5/09

  Multifaceted or polygonal mirrors {, e.g. polygonal scanning mirrors; Fresnel mirrors} · CPC title

• G02B6/0096

  the lights guides being of the hollow type · CPC title

• G01N2021/8822

  Dark field detection · CPC title

• G01N21/8806

  Specially adapted optical and illumination features · CPC title