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US-2018138352-A1 · May 17, 2018 · US
Magnetic field sensor and method for making same
US10620277B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10620277-B2 |
| Application number | US-201515524003-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 3, 2015 |
| Priority date | Nov 3, 2014 |
| Publication date | Apr 14, 2020 |
| Grant date | Apr 14, 2020 |
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- Title
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- Abstract
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- Assignees and inventors
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- CPC / IPC classifications
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Abstract
Official abstract text for this publication.
A semiconductor chip for measuring a magnetic field. The semiconductor chip comprises a magnetic sensing element, and an electronic circuit. The magnetic sensing element is mounted on the electronic circuit. The magnetic sensing element is electrically connected with the electronic circuit. The electronic circuit is produced in a first technology and/or first material and the magnetic sensing element is produced in a second technology and/or second material different from the first technology/material.
First claim
Opening claim text (preview).
The invention claimed is: 1. A semiconductor chip for measuring a magnetic field, the semiconductor chip comprising a magnetic sensing element, an electronic circuit, and a conductive distribution layer, wherein: the magnetic sensing element is mounted on the electronic circuit, the magnetic sensing element is electrically connected with the electronic circuit, and wherein the electronic circuit comprises a first material and the magnetic sensing element comprises a second material different from the first material and wherein the second material has a higher carrier mobility than the first material, wherein an adhesive layer is present between the magnetic sensing element and the electronic circuit, and wherein the magnetic sensing element is provided with a pad smaller than 10 μm, and wherein the conductive distribution layer makes an electrical connection between the magnetic sensing element and the electronic circuit. 2. A semiconductor chip according to claim 1 , whereby the second material is chosen such that the carrier mobility at room temperature is higher in the second material than in the first material. 3. A semiconductor chip according to claim 1 , wherein the magnetic sensing element comprises at least one Hall sensor. 4. A semiconductor chip according to claim 3 , wherein the magnetic sensing element has a thickness of less than 5 μm. 5. A semiconductor chip according to claim 3 , wherein the magnetic sensing element is a quantum well Hall sensor. 6. A semiconductor chip according to claim 1 , wherein the second material comprises gallium-arsenide. 7. A semiconductor chip according to claim 1 , wherein the first material is made of silicon. 8. A semiconductor chip according to claim 1 , further comprising a ferromagnetic layer on top of the conductive distribution layer.
Assignees
Inventors
Classifications
Vertical Hall-effect devices · CPC title
- G01R33/07Primary
Hall effect devices · CPC title
Manufacturing aspects; Manufacturing of single devices, i.e. of semiconductor magnetic sensor chips (devices based on galvano-magnetic effect or the like H10N50/85) · CPC title
Electricity · mapped topic
Electricity · mapped topic
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Frequently asked questions
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- What does patent US10620277B2 cover?
- A semiconductor chip for measuring a magnetic field. The semiconductor chip comprises a magnetic sensing element, and an electronic circuit. The magnetic sensing element is mounted on the electronic circuit. The magnetic sensing element is electrically connected with the electronic circuit. The electronic circuit is produced in a first technology and/or first material and the magnetic sensing e…
- Who is the assignee on this patent?
- Melexis Technologies Nv, X Celeprint Ltd
- What technology area does this patent fall under?
- Primary CPC classification G01R33/07. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue Apr 14 2020 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 2 related publications on this page (citations in our corpus or others sharing the same primary CPC).