Pressure sensor

Patent metadata

Field	Value
Publication number	US-10620064-B2
Application number	US-201716331465-A
Country	US
Kind code	B2
Filing date	Aug 24, 2017
Priority date	Sep 16, 2016
Publication date	Apr 14, 2020
Grant date	Apr 14, 2020

Abstract

A pressure sensor is disclosed. The pressure sensor includes a common electrode, a plurality of individual electrodes, a plurality of thin-film transistors and a common pressure-sensitive layer. The common electrode is formed as a layer. The plurality of individual electrodes are arranged in a matrix opposing the common electrode. The plurality of thin-film transistors are respectively located corresponding to the individual electrodes on sides of the individual electrodes opposite to the common electrode, where one or two or more adjacent thin-film transistors are connected to one individual electrode. The common pressure-sensitive layer is disposed on a surface of the common electrode on a side facing the plurality of individual electrodes. The plurality of individual electrodes include a first electrode, and a second electrode that is thicker than the first electrode and therefore creates a smaller gap from the common pressure-sensitive layer than the first electrode.

First claim

The invention claimed is:

1. A pressure sensor comprising:
a common electrode formed as a layer;
a plurality of individual electrodes arranged in a matrix opposing the common electrode;
a plurality of thin-film transistors respectively located corresponding to the plurality of individual electrodes on sides of the plurality of individual electrodes opposite to the common electrode, where one or two or more adjacent thin-film transistors are connected to one individual electrode; and
a common pressure-sensitive layer disposed on a surface of the common electrode on a side facing the plurality of individual electrodes,
the plurality of individual electrodes including a first electrode, and a second electrode that is thicker than the first electrode and therefore creates a smaller gap from the common pressure-sensitive layer than the first electrode.

2. The pressure sensor according to claim 1 , further including
a region subject to pressing where the first electrode and the second electrode are arranged in a row so as to be within a minimum pressing force area, regardless of which position of the region is pressed.

3. The pressure sensor according to claim 1 , further comprising
a spacer formed on a surface of the common electrode on a side that faces the plurality of the individual electrodes to oppose the plurality of individual electrodes.

4. The pressure sensor according to claim 1 , further comprising
spacers formed on surfaces of the plurality of individual electrodes on sides that face the common electrode to oppose the common electrode.

5. A pressure sensor comprising:
a common electrode formed as a layer;
a plurality of individual electrodes arranged in a matrix opposing the common electrode;
a plurality of thin-film transistors respectively located corresponding to the individual electrodes on sides of the individual electrodes opposite to the common electrode, where one or two or more adjacent thin-film transistors are connected to one individual electrode;
a first individual pressure-sensitive layer disposed on a surface of a first electrode among the plurality of individual electrodes on a side facing the common electrode; and
a second individual pressure-sensitive layer disposed on a surface of a second electrode among the plurality of individual electrodes on a side facing the common electrode,
with a gap between the second individual pressure-sensitive layer and the common electrode shorter than a gap between the first individual pressure-sensitive layer and the common electrode.

6. The pressure sensor according to claim 5 , wherein
the second electrode is thicker than the first electrode.

7. The pressure sensor according to claim 5 , wherein
the second individual pressure-sensitive layer is thicker than the first individual pressure-sensitive layer.

8. The pressure sensor according to claim 5 , further including
a region subject to pressing where the first individual pressure-sensitive layer and the second individual pressure-sensitive layer are arranged in a row so as to be within a minimum pressing force area, regardless of which position of the region is pressed.

9. The pressure sensor according to claim 5 , further comprising
a spacer formed on a surface of the common electrode on a side that faces the plurality of the individual electrodes to oppose the plurality of the individual electrodes.

10. The pressure sensor according to claim 5 , further comprising
spacers formed on surfaces of the first individual pressure-sensitive layer and the second individual pressure-sensitive layer on sides that face the common electrode to oppose the common electrode.

11. A pressure sensor comprising:
a common electrode formed as a layer;
a plurality of individual electrodes arranged in a matrix opposing the common electrode;
a plurality of thin-film transistors respectively located corresponding to the individual electrodes on sides of the individual electrodes opposite to the common electrode, where one or two or more adjacent thin-film transistors are connected to one individual electrode;
a common pressure-sensitive layer disposed on a surface of the common electrode on a side facing the plurality of individual electrodes;
a first individual pressure-sensitive layer disposed on a surface of a first electrode among the plurality of individual electrodes on a side facing the common electrode; and
a second individual pressure-sensitive layer disposed on a surface of a second electrode among the plurality of individual electrodes on a side facing the common electrode,
with a gap between the second individual pressure-sensitive layer and the common electrode shorter than a gap between the first individual pressure-sensitive layer and the common electrode.

12. The pressure sensor according to claim 11 , wherein
the second electrode is thicker than the first electrode.

13. The pressure sensor according to claim 11 , wherein
the second individual pressure-sensitive layer is thicker than the first individual pressure-sensitive layer.

14. The pressure sensor according to claim 11 , further including
a region subject to pressing where the first individual pressure-sensitive layer and the second individual pressure-sensitive layer are arranged in a row so as to be within a minimum pressing force area, regardless of which position of the region is pressed.

15. The pressure sensor according to claim 11 , further comprising
a spacer formed on a surface of the common pressure-sensitive layer on a side that faces the first individual pressure-sensitive layer and the second individual pressure-sensitive layer to oppose the first individual pressure-sensitive layer and the second individual pressure-sensitive layer.

16. The pressure sensor according to claim 11 , further comprising
spacers formed on surfaces of the first individual pressure-sensitive layer and the second individual pressure-sensitive layer on sides that face the common pressure-sensitive layer to oppose the common pressure-sensitive layer.

Assignees

• Nissha Co Ltd

Inventors

• Nada Hideaki
• Morita Jumpei

Classifications

• G01L1/205 Primary

  using distributed sensing elements · CPC title

• G01L5/00 Primary

  Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes · CPC title

• H01L27/00

  Electricity · mapped topic

• H01L27/3246

  Electricity · mapped topic

• H01L27/3241

  Electricity · mapped topic