Resistance random access memory device and preparing method thereof

Patent metadata

Field	Value
Publication number	US-10615340-B2
Application number	US-201916240861-A
Country	US
Kind code	B2
Filing date	Jan 7, 2019
Priority date	Jan 23, 2018
Publication date	Apr 7, 2020
Grant date	Apr 7, 2020

Abstract

The present disclosure relates to a resistive random access memory device and a preparing method of the resistive random access memory device, including: a first resistance change layer formed on a first electrode and comprising an organic metal halide having a three-dimensional perovskite crystal structure; a second resistance change layer formed on the first resistance change layer and comprising an organic metal halide having a two-dimensional perovskite crystal structure; and a second electrode formed on the second resistance change layer.

First claim

We claim:

1. A resistive random access memory device, comprising:
a first resistance change layer formed on a first electrode and comprising an organic metal halide having a three-dimensional perovskite crystal structure;
a second resistance change layer formed on the first resistance change layer and comprising an organic metal halide having a two-dimensional perovskite crystal structure; and
a second electrode formed on the second resistance change layer.

2. The resistive random access memory device of claim 1 , further comprising:
a polymer protective layer formed on the second resistance change layer.

3. The resistive random access memory device of claim 1 ,
wherein the second resistance change layer includes perovskite particles having a bulk structure.

4. The resistive random access memory device of claim 1 ,
wherein a filament size of the first resistance change layer is controlled by the second resistance change layer to improve durability of the resistive random access memory device.

5. The resistive random access memory device of claim 1 ,
wherein a heterojunction structure of the three-dimensional perovskite crystal structure and the two-dimensional perovskite crystal structure provides stability to moisture and light.

6. The resistive random access memory device of claim 1 ,
wherein the organic metal halide having the three-dimensional perovskite crystal structure is represented by the following Chemical Formula 1:
RMX 3   [Chemical Formula 1]

(R is a substituted or unsubstituted C 1-24 alkyl group, and when R is substituted, its substituent is an amino group, a hydroxyl group, a cyano group, a halogen group, a nitro group, or a methoxy group,
M includes a metal cation selected from the group consisting of Pb, Sn, Ge, Cu, Ni, Co, Fe, Mn, Cr, Pd, Cd, Yb, and combinations thereof, and
X includes a halide anion or a chalcogenide anion).

7. The resistive random access memory device of claim 1 ,
wherein the organic metal halide having the two-dimensional perovskite crystal structure is represented by the following Chemical Formula 2:
R 2 MX 4   [Chemical Formula 2]

(R is a substituted or unsubstituted C 1-24 alkyl group, and when R is substituted, its substituent is an amino group, a hydroxyl group, a cyano group, a halogen group, a nitro group, or a methoxy group,
M includes a metal cation selected from the group consisting of Pb, Sn, Ge, Cu, Ni, Co, Fe, Mn, Cr, Pd, Cd, Yb, and combinations thereof, and
X includes a halide anion or a chalcogenide anion).

8. The resistive random access memory device of claim 2 ,
wherein the polymer protective layer includes an ionic conductive polymer selected from the group consisting of polymethyl methacrylate, polyethylene oxide, polypropylene oxide, polydimethylsiloxane, polyacrylonitrile, polyvinyl chloride, polyvinylidene fluoride, polyvinylidene fluoride-hexafluoropropylene, polyethyleneimine, polyphenylene terephthalamide, poly(methoxy polyethylene glycol methacrylate), poly(2-methoxy ethyl glycidyl ether), and combinations thereof.

9. The resistive random access memory device of claim 1 ,
wherein the first electrode and the second electrode each independently include a material selected from the group consisting of a metal, a conductive polymer, a carbonaceous material, and combinations thereof.

10. A preparing method of a resistive random access memory device, comprising:
forming a first electrode on a substrate;
forming a first resistance change layer, on the first electrode, comprising an organic metal halide having a three-dimensional perovskite crystal structure;
forming a second resistance change layer, on the first resistance change layer, comprising an organic metal halide having a two-dimensional perovskite crystal structure; and
forming a second electrode on the second resistance change layer.

11. The preparing method of a resistive random access memory device of claim 10 ,
wherein the forming of the first resistance change layer is performed by coating, on the first electrode, a solution in which the organic metal halide having the three-dimensional perovskite crystal structure is dissolved in a first solvent.

12. The preparing method of a resistive random access memory device of claim 11 ,
wherein the first solvent is selected from the group consisting of dimethylformamide, dimethylsulfoxide, dimethylacetamide, N-methylpyrrolidone, N-methyl-2-pyridine, pyridine, aniline, and combinations thereof.

13. The preparing method of a resistive random access memory device of claim 10 ,
wherein the second resistance change layer is formed to have the two-dimensional perovskite crystal structure by coating, on the first resistance change layer, a solution in which an organic halide is dissolved in a second solvent and partially melting some of the three-dimensional perovskite crystals with the second solvent.

14. The preparing method of a resistive random access memory device of claim 13 ,
wherein the second solvent is a protic solvent including branched alcohols having 3 to 6 carbon atoms.

15. The preparing method of a resistive random access memory device of claim 10 , further comprising:
forming a polymer protective layer on the second resistance change layer.

16. The preparing method of a resistive random access memory device of claim 10 ,
wherein the organic metal halide having the three-dimensional perovskite crystal structure is represented by the following Chemical Formula 3:
RMX 3   [Chemical Formula 3]

(R is a substituted or unsubstituted C 1-24 alkyl group, and when R is substituted, its substituent is an amino group, a hydroxyl group, a cyano group, a halogen group, a nitro group, or a methoxy group,
M includes a metal cation selected from the group consisting of Pb, Sn, Ge, Cu, Ni, Co, Fe, Mn, Cr, Pd, Cd, Yb, and combinations thereof, and
X includes a halide anion or a chalcogenide anion).

17. The preparing method of a resistive random access memory device of claim 10 ,
wherein the organic metal halide having the two-dimensional perovskite crystal structure is represented by the following Chemical Formula 4:
R 2 MX 4   [Chemical Formula 4]

(R is a substituted or unsubstituted C 1-24 alkyl group, and when R is substituted, its substituent is an amino group, a hydroxyl group, a cyano group, a halogen group, a nitro group, or a methoxy group,
M includes a metal cation selected from the group consisting of Pb, Sn, Ge, Cu, Ni, Co, Fe, Mn, Cr, Pd, Cd, Yb, and combinations thereof, and
X includes a halide anion or a chalcogenide anion).

Assignees

• Research & Business Found Sungkyunkwan Univ
• Global Frontier Ct Multiscale Energy Systems

Inventors

• Jung Hyun Suk
• Lee Sang Myeong
• Kim Byeong Jo
• Lee Dong Geon
• Baek Ji Hyun
• Lee Jae Myeong
• Kim Min Hee
• Kim Won Bin
• Park So Yeon
• Baek Miyeon

Classifications

• H01L45/1233

  Electricity · mapped topic

• H01L45/14

  Electricity · mapped topic

• H01L45/1608

  Electricity · mapped topic

• H01L45/08

  Electricity · mapped topic

• H01L45/147 Primary

  Electricity · mapped topic