Metasurface

Patent metadata

Field	Value
Publication number	US-10613253-B2
Application number	US-201715701918-A
Country	US
Kind code	B2
Filing date	Sep 12, 2017
Priority date	Sep 14, 2016
Publication date	Apr 7, 2020
Grant date	Apr 7, 2020

Abstract

A metasurface is capable of modulating input light including a wavelength in a range of 880 nm to 40 μm. The metasurface includes: a GaAs substrate including a light input surface into which input light is input and a light output surface facing the light input surface; an interlayer having a lower refractive index than GaAs and disposed on the light output surface side of the GaAs substrate; and a plurality of V-shaped antenna elements disposed on a side of the interlayer which is opposite to the GaAs substrate side and including a first arm and a second arm continuous with one end of the first arm.

First claim

What is claimed is:

1. A metasurface capable of modulating an input light including a wavelength in a range of 880 nm to 40 μm, the metasurface comprising:
a GaAs substrate including a light input surface into which input light is input and a light output surface facing the light input surface;
an interlayer having a lower refractive index than GaAs and disposed on the light output surface side of the GaAs substrate; and
a plurality of V-shaped antenna elements disposed on a side of the interlayer which is opposite to the GaAs substrate side and including a first arm and a second arm continuous with one end of the first arm.

2. The metasurface according to claim 1 , wherein the interlayer has a thickness in a range of 60 nm to 5 μm.

3. The metasurface according to claim 2 , wherein the interlayer is a SiN layer, a TiO 2 layer, or a HfO 2 layer.

4. The metasurface according to claim 3 , wherein the each of the V-shaped antenna elements has a thickness in a range of 30 nm to 500 nm.

5. The metasurface according to claim 4 , wherein the each of plurality of V-shaped antenna elements has an angle formed by the first and second arms in a range of 70 degrees to 180 degrees.

6. The metasurface according to claim 3 , wherein the each of plurality of V-shaped antenna elements has an angle formed by the first and second arms in a range of 70 degrees to 180 degrees.

7. The metasurface according to claim 2 , wherein the each of the V-shaped antenna elements has a thickness in a range of 30 nm to 500 nm.

8. The metasurface according to claim 7 , wherein the each of plurality of V-shaped antenna elements has an angle formed by the first and second arms in a range of 70 degrees to 180 degrees.

9. The metasurface according to claim 2 , wherein the each of plurality of V-shaped antenna elements has an angle formed by the first and second arms in a range of 70 degrees to 180 degrees.

10. The metasurface according to claim 1 , wherein the interlayer is a SiN layer, a TiO 2 layer, or a HfO 2 layer.

11. The metasurface according to claim 10 , wherein the each of the V-shaped antenna elements has a thickness in a range of 30 nm to 500 nm.

12. The metasurface according to claim 11 , wherein the each of plurality of V-shaped antenna elements has an angle formed by the first and second arms in a range of 70 degrees to 180 degrees.

13. The metasurface according to claim 10 , wherein the each of plurality of V-shaped antenna elements has an angle formed by the first and second arms in a range of 70 degrees to 180 degrees.

14. The metasurface according to claim 1 , wherein the each of the V-shaped antenna elements has a thickness in a range of 30 nm to 500 nm.

15. The metasurface according to claim 14 , wherein the each of plurality of V-shaped antenna elements has an angle formed by the first and second arms in a range of 70 degrees to 180 degrees.

16. The metasurface according to claim 1 , wherein the each of plurality of V-shaped antenna elements has an angle formed by the first and second arms in a range of 70 degrees to 180 degrees.

17. The metasurface according to claim 1 , wherein the each of the plurality of V-shaped antenna elements is convex disposed on the interlayer.

18. The metasurface according to claim 1 , wherein the each of the plurality of V-shaped antenna elements is concave formed in metal layers disposed on the interlayer.

Assignees

• Hamamatsu Photonics Kk

Inventors

• Nomoto Yoshiro
• Kurosaka Yoshitaka
• Hirose Kazuyoshi
• Sugiyama Takahiro
• UENOYAMA Soh

Classifications

• G02F2202/30

  Metamaterials · CPC title

• G02B1/002 Primary

  made of materials engineered to provide properties not available in nature, e.g. metamaterials · CPC title

• G02F2202/101

  Ga×As and alloy · CPC title

• G02B5/008

  Surface plasmon devices (diffractive gratings with a pitch less than or comparable to the wavelength G02B5/1809; surface plasmons in integrated optics G02B6/1226; optical analysis of materials by means of surface plasmons G01N21/553) · CPC title

• G02F1/19

  based on variable-reflection or variable-refraction elements not provided for in groups G02F1/015 - G02F1/169 · CPC title