Coaxial lithography
US-2016013340-A1 · Jan 14, 2016 · US
US10608238B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10608238-B2 |
| Application number | US-201615741845-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 29, 2016 |
| Priority date | Jul 20, 2015 |
| Publication date | Mar 31, 2020 |
| Grant date | Mar 31, 2020 |
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A miniaturized electrochemical cell and a method for making it are provided. The method includes preparing at least one inner electrode of an electron conducting or semi-conducting material M 1 ; providing a hollow support made of an electrically insulating material M 6 and having at least one internal hollow channel; depositing on the external surface of the support a layer of an electrically conducting material M 2 ; forming a template of colloidal particles of an electrically insulating material M 3 , on the M 2 layer; depositing a layer of an electrically conducting material M 4 on the M 2 layer; depositing a layer L 1 of an electron conducting or semi-conducting material M 5 on the M 4 layer, introducing the at least one inner electrode into the at least one internal hollow channel of the obtained structure; stabilizing the structure at its two open ends with an electrically insulating material M 7 ; and removing M 2 , M 3 , M 4 and M 6 materials.
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The invention claimed is: 1. A method for manufacturing a miniaturized electrode cell of coaxial electrodes comprising at least one inner electrode and an outer electrode, the method comprising: a) preparing the at least one inner electrode made of an electron conducting or semi-conducting material M 1 , b) providing a hollow support made of an electrically, insulating material M 6 , the support having at least one internal hollow channel, the dimensions of the at least one internal hollow channel being higher than external dimensions of the inner electrode, and thickness of walls of the support being at least equal to width of a gap which is desired between the coaxial electrodes, c) depositing on an external surface of the support a layer of an electrically conducting material M 2 by an electrodes deposition method, d) forming a template of colloidal particles made of an electrically insulating material M 3 on the layer of the electrically conducting material M 2 , e) depositing a layer of an electrically conducting material M 4 on the layer of the electrically conducting material M 2 through the template by an electro-deposition method, f) depositing a layer L 1 of an electron conducting or semi-conducting material M 5 on the layer of the electrically conducting material M 4 by an electro-deposition method, through the template to obtain a first structure, the layer L 1 having a thickness equal to a thickness of the outer electrode to be obtained, g) introducing the at least one inner electrode into the at least one internal hollow channel of the first structure obtained in f) to obtain a second structure, h) stabilizing the second structure obtained in g) at its two open ends with an electrically insulating material M 7 which is not soluble in a solvent in which the materials M 2 , M 3 , M 4 , and M 6 are soluble, i) removing the materials M 2 , M 3 , M 4 and M 6 , and optionally repeating b) to g) at least one time, the structure obtained after each g) constituting the at least one inner electrode to be introduced into the at least one internal hollow channel of each structure obtained in f). 2. The method according to claim 1 , wherein the at least one inner electrode is made of a macroporous electron conducting or semi-conducting material M 1 and a) comprises: a1) providing a substrate S 1 having a shape for the inner electrode and made of an electron conducting or semi-conducting material M 8 , a2) forming a template T 1 of colloidal particles made of an electrically insulating material M 9 , a3) depositing a layer L 1 of an electron conducting or semi-conducting material M 1 on a surface of the substrate S 1 by an electro-deposition method, through the colloidal particles of the template T 1 , the substrate S 1 coated with the layer L 1 having, the shape and the external dimensions for the inner electrode, and a4) removing the material M 9 with a solvent in which the material M 1 is not soluble. 3. The method according to claim 1 , wherein the materials M 1 , M 5 and M 8 are independently selected from the group consisting of Pd, Ag, Cr, Au, Pt, Cu, Ni, Zn, polypyrrole (PPy), polyaniline (PAni), polyacetylene, and poly(3,4-ethylenedioxythiophene:sodium poly(styrene sulfonate) (PEDOT:PSS). 4. The method according to claim 2 , Therein the materials M 6 , M 3 and M 9 are independently selected from the group consisting of SiO 2 , a glass, and a plastic. 5. The method according to claim 1 , wherein the materials M 2 and M 4 are independently selected from the group consisting of Ag, Ni, and Cr. 6. The method according to claim 1 , wherein the material M 2 is Ag and the material M 4 is Ni. 7. The method according to claim 1 , wherein a) is carried out after f). 8. The method according to claim 1 , wherein h) stabilizes the two open ends of the second structure obtained in g) an epoxy resin or a silicon based adhesive which is then hardened or reticulated. 9. The method according to claim 2 , wherein the materials M 3 and M 9 are SiO 2 , the material M 6 is a glass, the material M 2 is Ag, and the material M 4 is Ni, and wherein i) comprises: i1) dissolving the materials M 3 , M 6 and M 9 with a solution of hydrofluoric acid, and i2) dissolving the materials M 2 and M 4 with a solution of nitric acid or sulfuric acid. 10. The method according to claim 2 , Therein the support and the substrate S 1 are cylinders. 11. The method according to claim 2 , wherein the support and the substrate S 1 are parallelepipeds with a square or rectangular section. 12. The method according to claim 1 , wherein the support is a single channel support. 13. The method according to claim 1 , wherein the support is a multi-channel support.
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