System for and method of monitoring flow through mass flow controllers in real time

Patent metadata

Field	Value
Publication number	US-10606285-B2
Application number	US-201715419047-A
Country	US
Kind code	B2
Filing date	Jan 30, 2017
Priority date	Jan 20, 2012
Publication date	Mar 31, 2020
Grant date	Mar 31, 2020

Abstract

A mass flow controller comprises: a first flow meter constructed and arranged to measured flow rate of mass through the mass flow controller; a second flow meter constructed and arranged to measure flow rate of mass through the mass flow controller; a control valve constructed and arranged so as to control the flow rate of mass through the mass flow controller in response to a control signal generated as a function of the flow rate as measured by one of the flow meters; and a system controller constructed and arranged to generate the control signal, and to provide an indication when a difference between the flow rate of mass as measured by the first flow meter and the flow rate of mass as measured by the second flow meter exceeds a threshold.

First claim

What is claimed is:

1. A mass flow controller comprising:
a first, thermal mass flow meter operative to measure flow rate of mass of gas through the mass flow controller in real time during the running of a process, and to produce a first flow measurement signal representing a measured flow rate through the mass flow controller;
a differential pressure flow meter including (i) a flow restrictor disposed in a flow path of the mass flow controller, (ii) a pressure sensor operative to sense pressure in the flow path of the mass flow controller upstream of the flow restrictor, and (iii) a temperature sensor operative to sense temperature of the flow path upstream of the flow restrictor;
wherein the differential pressure flow meter is operative to measure flow rate of mass of gas through the mass flow controller, and to produce as an output a second flow measurement signal based on data from the pressure sensor and the temperature sensor;
a control valve disposed between the first, thermal mass flow meter and the differential pressure flow meter, with the first, thermal mass flow meter upstream of the control valve and the differential pressure flow meter downstream of the control valve, the control valve operative to control the flow rate of mass of gas through the mass flow controller in response to a control signal generated as a function of the flow rate as measured by one of the flow meters during the running of the process; and
a system controller operative to receive the first and second flow measurement signals produced by the first and differential pressure flow meters, respectively, and to generate the control signal, and to provide an alarm signal indicating when a difference between the first and second flow measurement signals exceeds a predetermined threshold.

2. The mass flow controller of claim 1 , where the differential pressure flow meter is configured to have a second pressure sensor operative to sense pressure in the flow path downstream of the flow restrictor, and to measure flow rate of mass of gas through the mass flow controller under both choked and unchoked flow conditions during the running of the process.

3. The mass flow controller of claim 1 , wherein the control signal is generated as a function of the flow rate as measured by the first flow meter.

4. The mass flow controller of claim 1 , wherein the control signal is generated as a function of the flow rate as measured by the differential pressure flow meter.

5. The mass flow controller of claim 1 , wherein the threshold is user set.

6. The mass flow controller of claim 1 , wherein the threshold is factory set.

7. The mass flow controller of claim 1 , wherein the threshold is set as a function of permissible tolerance in mass flow for the process with which the controller is used to deliver gas.

8. The mass flow controller of claim 1 , wherein the flow restrictor comprises a critical flow nozzle.

9. The mass flow controller of claim 1 , wherein the flow restrictor comprises an orifice.

Assignees

• Mks Instr Inc

Inventors

• Ding Junhua

Classifications

• Y10T137/776

  Control by pressures across flow line valve · CPC title

• G01F1/88

  with differential-pressure measurement to determine the volume flow · CPC title

• G05D7/0635 Primary

  by action on throttling means (G05D7/0688, G05D7/0694 take precedence) · CPC title

• G01F15/002

  for gases · CPC title

• G01F15/005

  Valves (valves in general F16K) · CPC title