Pressure sensor

Patent metadata

Field	Value
Publication number	US-10605679-B2
Application number	US-201716336379-A
Country	US
Kind code	B2
Filing date	Aug 29, 2017
Priority date	Oct 13, 2016
Publication date	Mar 31, 2020
Grant date	Mar 31, 2020

Abstract

A pressure sensor is disclosed. The pressure sensor includes a common electrode, sensitized electrodes, mountain-shaped pressure-sensitive layers, and thin-film transistors. The common electrode is formed as a layer. The sensitized electrodes are arranged in a matrix opposing the common electrode. The mountain-shaped pressure-sensitive layers are respectively formed over the sensitized electrodes on a side close to the common electrode. The thin-film transistors are disposed to correspond to the sensitized electrodes on sides of the sensitized electrodes opposite to the common electrode. A distance between the sensitized electrodes and an outer edge of a contact surface at which the common electrode and the mountain-shaped pressure-sensitive layers contact gradually becomes narrower when, due to pressing force applied to the common electrode toward the mountain-shaped pressure-sensitive layers and the sensitized electrodes, the contact surface expands outward from central portions of the mountain-shaped pressure-sensitive layers when viewed in plan.

First claim

The invention claimed is:

1. A pressure sensor comprising:
a common electrode formed as a layer;
a plurality of sensitized electrodes arranged in a matrix opposing the common electrode;
a plurality of mountain-shaped pressure-sensitive layers respectively formed over the plurality of sensitized electrodes on a side close to the common electrode; and
a plurality of thin-film transistors disposed to correspond to the plurality of sensitized electrodes on sides of the sensitized electrodes opposite to the common electrode, where one or two or more adjacent thin-film transistors are connected to one sensitized electrode,
wherein a distance between the sensitized electrodes and an outer edge of a contact surface at which the common electrode and the mountain-shaped pressure-sensitive layers contact gradually becomes narrower when, due to pressing force applied to the common electrode toward the mountain-shaped pressure-sensitive layers and the sensitized electrodes, the contact surface expands outward from central portions of the mountain-shaped pressure-sensitive layers when viewed in plan.

2. The pressure sensor according to claim 1 , wherein
the sensitized electrode has a diameter that is 30% or more with respect to the diameter of the mountain-shaped pressure-sensitive layer.

3. The pressure sensor according to claim 2 , wherein
the sensitized electrode has a diameter that is 50% or more with respect to the diameter of the mountain-shaped pressure-sensitive layer.

4. The pressure sensor according to claim 3 , wherein
the sensitized electrode has a diameter that extends to a vicinity of an outer edge of a contact surface at which the common electrode and the mountain-shaped pressure-sensitive layer are configured to contact each other with a largest area.

5. The pressure sensor according to claim 1 , wherein
the sensitized electrode is completely covered by the mountain-shaped pressure-sensitive layer.

6. The pressure sensor according to claim 1 , further comprising:
an insulating substrate disposed on the common electrode on a side opposite to the plurality of sensitized electrodes,
wherein the insulating substrate and the common electrode are elastic.

Assignees

• Nissha Co Ltd

Inventors

• Nada Hideaki

Classifications

• G01L1/205 Primary

  using distributed sensing elements · CPC title

• G01L5/0028

  Force sensors associated with force applying means (G01L5/0052, G01L5/0057, G01L5/0061 take precedence) · CPC title

• G01L1/2293

  of the semi-conductor type · CPC title

• G01L1/20 Primary

  by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids (of piezo-resistive materials G01L1/18); by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress · CPC title

• G01L5/00

  Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes · CPC title