Top notch slit profile for mems device
US-2024381034-A1 · Nov 14, 2024 · US
US10602289B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10602289-B2 |
| Application number | US-201113039895-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 3, 2011 |
| Priority date | Mar 9, 2010 |
| Publication date | Mar 24, 2020 |
| Grant date | Mar 24, 2020 |
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In one aspect, the disclosure provides an apparatus that includes an acoustic transducer, and a backing coupled to the transducer, wherein the backing includes solid grains with fluid between the grains.
Opening claim text (preview).
The invention claimed is: 1. An acoustic apparatus, comprising: an acoustic transducer having a front side and a back side; a backing in contact with the back side of the transducer, the backing includes at least two layers of solid grains with a liquid in pores between the solid grains, the at least two layers of the backing including different grain sizes such that a layer next to the transducer has a greatest pore size, the backing being configured to attenuate acoustic signals that enter the backing from the back side of the transducer; and a pressure balancing device configured to provide pressure balance to liquid in the backing, the pressure balancing device including a chamber containing a piston and the liquid in communication with the backing. 2. The apparatus of claim 1 , wherein an acoustic impedance of the backing substantially matches an acoustic impedance of a surface of the transducer. 3. The apparatus of claim 1 , wherein the different grain sizes are configured to reduce acoustic reflection caused by a sudden change in acoustic attenuation at an interface between the transducer and the backing. 4. The apparatus of claim 1 , wherein size of the grains and viscosity of the liquid are chosen to provide a selected attenuation of the acoustic signals. 5. The apparatus of claim 1 , wherein the grains are chosen from a group of materials consisting of: (i) bronze; (ii) steel; (iii) a solid polymer; (iv) a ceramic material; and (v) a combination of two or more metallic materials and a non-metallic material. 6. The apparatus of claim 1 , wherein the solid grains are packed in a container. 7. The apparatus of claim 1 , wherein the grains are sintered. 8. A method of providing an apparatus, comprising: providing a tool body; providing an acoustic transducer in the tool body; providing a backing that includes solid grains with a liquid in pores between the solid grains; placing the backing in contact with a back surface of the acoustic transducer to attenuate acoustic signals waves from the acoustic transducer at the back surface of the acoustic transducer, the backing including at least two layers of solid grains with a liquid in pores between the solid grains, at least two layers of the backing including different grain sizes such that a layer next to the transducer has a greatest pore size; and pressure balancing the transducer using a pressure balancing device including a chamber containing the liquid and a piston, with the liquid in communication with the backing. 9. The method of claim 8 further comprising substantially matching acoustic impedance of the backing with acoustic impedance of the surface of the transducer. 10. The method of claim 8 , wherein the solid grains of different sizes are configured to reduce acoustic reflection caused by a sudden change in acoustic attenuation at the surface of the transducer. 11. The method of claim 8 , wherein providing the backing includes selecting size of the solid grains and viscosity of the liquid to provide a selected attenuation of acoustic signals at the surface of the transducer. 12. The method of claim 8 , wherein the solid grains include a material chosen from a group consisting of: bronze; steel; a solid polymer; a ceramic material; a combination of two or more metallic materials and a non-metallic material. 13. The method of claim 8 , wherein the solid grains are packed in a container. 14. The method of claim 8 further comprising placing the transducer and the backing in an acoustic tool for use in a wellbore for determining a property of interest. 15. An acoustic tool for determining a property of interest, comprising: an acoustic transmitter having a backing in contact with a side of the acoustic transmitter at an interface, wherein the backing includes at least two layers of solid grains with a liquid in pores between the solid grains, the at least two layers of the backing including different grain sizes such that a layer next to the transducer has a greatest pore size, and wherein the acoustic transmitter is configured to transmit acoustic signals into a formation surrounding a wellbore and the backing is configured to attenuate signals from the transmitter at the interface; a pressure balancing device configured to provide pressure balance to the liquid in the backing, the pressure balancing device including a chamber containing a piston and the liquid in communication with the backing; a receiver configured to receive signals responsive to the signals transmitted by the transmitter; and a processor configured to process signals received by the receiver to estimate the property of interest. 16. The acoustic tool of claim 15 , wherein the acoustic tool is configured for acoustic logging as one of: a tool for logging the wellbore after it has been drilled; and a tool for logging the wellbore during drilling of the wellbore. 17. A method of determining a property of interest, comprising: transmitting acoustic signals into a formation from a transmitter deployed in a tool in a wellbore, wherein the transmitter includes a housing and backing in contact with the housing and wherein the backing includes at least two layers of solid grains with a liquid in pores between the solid grains, the at least two layers of the backing including different grain sizes such that a layer next to the transducer has a greatest pore size, the backing being configured to attenuate acoustic signals at an interface between the housing and the backing; receiving acoustic waves by a receiver from the formation responsive to the transmitted acoustic waves; providing pressure balance to liquid in the backing using a pressure balancing device in contact with the backing, the pressure balancing device including a chamber containing a piston and the liquid in communication with the backing; and processing signals from the receiver to estimate the property of interest.
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