Piezoelectric resonator device

Patent metadata

Field	Value
Publication number	US-10600953-B2
Application number	US-201615765498-A
Country	US
Kind code	B2
Filing date	Oct 31, 2016
Priority date	Nov 6, 2015
Publication date	Mar 24, 2020
Grant date	Mar 24, 2020

Abstract

A crystal resonator (101) includes: a crystal resonator plate (2); a first sealing member (3); a second sealing member (4); and an internal space (13) hermetically sealing a vibrating part (22) of the crystal resonator plate (2). The crystal resonator plate (2) includes: the vibrating part (22); an external frame part (23) surrounding an outer periphery of the vibrating part (22); and a connecting part (24) connecting the vibrating part (22) to the external frame part (23). A first extraction electrode (223) drawn from a first excitation electrode (221) is formed on a first main surface of the connecting part (24) while a second extraction electrode (224) drawn from a second excitation electrode (222) is formed on a second main surface thereof. A wiring pattern (33) connected to the first extraction electrode (223) is formed on a second main surface (312) of the first sealing member (3). At least part of the wiring pattern (33) is disposed to be superimposed to a space between the vibrating part (22) and the external frame part (23) in plan view.

First claim

The invention claimed is:

1. A piezoelectric resonator device, comprising:
a piezoelectric resonator plate including a first excitation electrode formed on a first main surface of a substrate, and a second excitation electrode formed on a second main surface of the substrate, the second excitation electrode making a pair with the first excitation electrode;
a first sealing member covering the first excitation electrode of the piezoelectric resonator plate;
a second sealing member covering the second excitation electrode of the piezoelectric resonator plate; and
an internal space formed by bonding the first sealing member to the piezoelectric resonator plate and by bonding the second sealing member to the piezoelectric resonator plate, the internal space hermetically sealing a vibrating part including the first excitation electrode and the second excitation electrode of the piezoelectric resonator plate, wherein the piezoelectric resonator plate further includes:
the vibrating part formed so as to have a substantially rectangular shape;
an external frame part surrounding an outer periphery of the vibrating part; and
a connecting part connecting the vibrating part to the external frame part, wherein the vibrating part, the connecting part and the external frame part are formed integrally with one another, wherein a first extraction electrode, which is drawn from the first excitation electrode, is formed on a first main surface of the connecting part while a second extraction electrode, which is drawn from the second excitation electrode, is formed on a second main surface of the connecting part, wherein a wiring that is connected to the first extraction electrode is formed on a surface of the first sealing member facing the piezoelectric resonator plate,
wherein at least part of the wiring is disposed so as to be superimposed to a space between the vibrating part and the external frame part in plan view and
wherein the wiring is disposed so as to not be superimposed to the first excitation electrode and the second excitation electrode in plan view.

2. The piezoelectric resonator device according to claim 1 , wherein
the wiring is disposed so as to completely cover the space along one side of the vibrating part in plan view.

3. The piezoelectric resonator device according to claim 1 , wherein
the wiring has a film thickness of not less than 0.05 um.

4. The piezoelectric resonator device according to claim 1 , wherein
the wiring is disposed outside a region irradiated with ion beams for adjusting the frequency of the first excitation electrode and the second excitation electrode in plan view.

5. The piezoelectric resonator device according to claim 1 , wherein
the surface of the first sealing member facing the piezoelectric resonator plate is formed as a flat surface.

6. The piezoelectric resonator device according to claim 1 , wherein
the connecting part extends from only one corner part of the vibrating part to the external frame part.

Assignees

• Daishinku Corp

Inventors

• Kojo Takuya

Classifications

• H03H9/13

  for networks consisting of piezoelectric or electrostrictive materials (for networks using surface acoustic waves H03H9/145) · CPC title

• H03B5/32

  being a piezoelectric resonator (selection of piezoelectric material H10N30/00) · CPC title

• H03H9/1035

  the enclosure being defined by two sealing substrates sandwiching the piezoelectric layer of the BAW device · CPC title

• H01L41/053

  Electricity · mapped topic

• H01L41/18 Primary

  Electricity · mapped topic