Adsorption device, conveyance device, and EL device manufacturing device

Patent metadata

Field	Value
Publication number	US-10600668-B2
Application number	US-201716069178-A
Country	US
Kind code	B2
Filing date	Mar 30, 2017
Priority date	Mar 30, 2017
Publication date	Mar 24, 2020
Grant date	Mar 24, 2020

Abstract

An adsorption device including one or more adsorption pads, wherein the adsorption device is configured to adsorb a lower surface film via the one or more adsorption pads, and the one or more adsorption pads are formed of a porous material having an average pore diameter of 1.0 μm or less.

First claim

The invention claimed is:

1. An adsorption device comprising:
one or more adsorption pads,
wherein the adsorption device is configured to adsorb a target object via the one or more adsorption pads,
the one or more adsorption pads are formed of a porous material having an average pore diameter of 1.0 μm or less,
the adsorption device comprises a plurality of adsorption pads,
wherein the plurality of adsorption pads adsorb a plurality of locations of the target object, and
the adsorption device is configured to allow an adsorption force for adsorbing the target object to be individually set for each of the plurality of adsorption pads.

2. The adsorption device according to claim 1 ,
wherein the plurality of adsorption pads are arranged at regular intervals.

3. The adsorption device according to claim 1 , further comprising:
three or more arm units on which the plurality of adsorption pads are provided,
wherein the three or more arm units includes both end arm units positioned at both ends and one or more inner arm units positioned inside the both end arm units, the one or more inner arm units are provided with a larger number of adsorption units than a number of adsorption units provided on the both end arm units.

4. The adsorption device according to claim 1 ,
wherein an adsorption surface on which the adsorption pads adsorb the target object faces upward in a vertical direction.

5. The adsorption device according to claim 1 ,
wherein the average pore diameter is from 0.1 μm to 0.5 μm.

6. The adsorption device according to claim 1 ,
wherein the porous material includes polyimide as a material.

7. The adsorption device according to claim 1 ,
wherein a porosity of the porous material is from 30% to 50%.

Assignees

• Sharp Kk

Inventors

• Mashiro Fumihiko

Classifications

• H10P72/70

  for supporting or gripping · CPC title

• H10P72/30

  for conveying, e.g. between different workstations · CPC title

• H10P72/78 Primary

  using vacuum or suction, e.g. Bernoulli chucks · CPC title

• B23Q3/08

  other than mechanically-actuated {(B23Q3/061, B23Q3/066, and B23Q3/067 take precedence)} · CPC title

• H01L21/677

  Electricity · mapped topic