Permeability evaluation method

Patent metadata

Field	Value
Publication number	US-10598622-B2
Application number	US-201415304430-A
Country	US
Kind code	B2
Filing date	Apr 15, 2014
Priority date	Apr 15, 2014
Publication date	Mar 24, 2020
Grant date	Mar 24, 2020

Abstract

A permeability evaluation method for evaluating permeability of heavy metal ions through a specimen, comprising a step of, in a state in which a first liquid containing heavy metal ions and a second liquid containing water and an organic solvent are separated by a specimen, applying a voltage between a positive electrode provided on the side of the first liquid and a negative electrode provided on the side of the second liquid and measuring the value of the current flowing between the positive electrode and the negative electrode, wherein the specimen contains an insulating material used in semiconductor production, and the heavy metal ion concentration of the first liquid is 0.5 mg/kg or more.

First claim

The invention claimed is:

1. A permeability evaluation method for evaluating permeability of heavy metal ions through a specimen, comprising:
a step of, in a state in which a first liquid containing heavy metal ions provided in a first cell and a second liquid containing water and an organic solvent provided in a second cell are separated by a specimen, applying a voltage between a positive electrode provided in contact with the first liquid and a negative electrode provided in contact with the second liquid and measuring a value of a current flowing between the positive electrode and the negative electrode,
wherein the specimen contains an insulating material used in semiconductor production,
a heavy metal ion concentration of the first liquid is 0.5 mg/kg or more, and
evaluating the permeability of heavy metal ions based on the value of the current flowing between the positive electrode and the negative electrode.

2. The evaluation method according to claim 1 , wherein the second liquid contains N-methyl-2-pyrrolidone as the organic solvent.

3. The evaluation method according to claim 2 , wherein a content of N-methyl-2-pyrrolidone of the second liquid is 20% by mass or more and 80% by mass or less.

4. The evaluation method according to claim 1 , wherein an electrical conductivity of the second liquid is 1 μS or more at 23° C.

5. The evaluation method according to claim 1 , wherein the first liquid contains copper ions as the heavy metal ions.

6. The evaluation method according to claim 5 , wherein a copper ion concentration of the first liquid is 0.5 to 50000 mg/kg.

7. The evaluation method according to claim 1 , wherein the insulating material used in semiconductor production is adhesive tape for a semiconductor.

8. A permeability evaluation method for evaluating permeability of heavy metal ions through a specimen, comprising:
a step of, in a state in which a first liquid containing heavy metal ions provided in a first cell and a second liquid containing water and an organic solvent provided in a second cell are separated by a specimen, and, after applying a voltage between a positive electrode provided in contact with the first liquid and a negative electrode provided in contact with the second liquid, measuring a heavy metal ion concentration of the second liquid,
wherein the specimen contains an insulating material used in semiconductor production, and
a heavy metal ion concentration of the first liquid is 0.5 mg/kg or more, and
evaluating the permeability of heavy metal ions based on the value of the heavy metal ion concentration of the second liquid.

9. The evaluation method according to claim 8 , wherein the second liquid contains N-methyl-2-pyrrolidone as the organic solvent.

10. The evaluation method according to claim 9 , wherein a content of N-methyl-2-pyrrolidone of the second liquid is 20% by mass or more and 80% by mass or less.

11. The evaluation method according to claim 8 , wherein an electrical conductivity of the second liquid is 1 μS or more at 23° C.

12. The evaluation method according to claim 8 , wherein the first liquid contains copper ions as the heavy metal ions.

13. The evaluation method according to claim 12 , wherein a copper ion concentration of the first liquid is 0.5 mg/kg to 50000 mg/kg.

14. The evaluation method according to claim 8 , wherein the insulating material used in semiconductor production is adhesive tape for a semiconductor.

15. A permeability evaluation method for evaluating permeability of heavy metal ions through a specimen, comprising:
a step of, in a state in which a first liquid containing heavy metal ions and a second liquid containing water and an organic solvent are provided in a cell and separated by a specimen, applying a voltage between a positive electrode provided in contact with the first liquid and a negative electrode provided in contact with the second liquid and measuring a value of a current flowing between the positive electrode and the negative electrode,
wherein the specimen contains an insulating material used in semiconductor production,
a heavy metal ion concentration of the first liquid is 0.5 mg/kg or more, and
evaluating the permeability of heavy metal ions based on the value of the current flowing between the positive electrode and the negative electrode.

16. The evaluation method according to claim 15 , wherein the second liquid contains N-methyl-2-pyrrolidone as the organic solvent.

17. The evaluation method according to claim 16 , wherein a content of N-methyl-2-pyrrolidone of the second liquid is 20% by mass or more and 80% by mass or less.

18. The evaluation method according to claim 15 , wherein an electrical conductivity of the second liquid is 1 μS or more at 23° C.

19. The evaluation method according to claim 15 , wherein the first liquid contains copper ions as the heavy metal ions.

20. The evaluation method according to claim 19 , wherein a copper ion concentration of the first liquid is 0.5 to 50000 mg/kg.

21. The evaluation method according to claim 15 , wherein the insulating material used in semiconductor production is adhesive tape for a semiconductor.

22. A permeability evaluation method for evaluating permeability of heavy metal ions through a specimen, comprising:
a step of, in a state in which a first liquid containing heavy metal ions and a second liquid containing water and an organic solvent are provided in a cell and separated by a specimen, and, after applying a voltage between a positive electrode provided in contact with the first liquid and a negative electrode provided in contact with the second liquid, measuring a heavy metal ion concentration of the second liquid,
wherein the specimen contains an insulating material used in semiconductor production, and
a heavy metal ion concentration of the first liquid is 0.5 mg/kg or more, and
evaluating the permeability of heavy metal ions based on the value of the heavy metal ion concentration of the second liquid.

23. The evaluation method according to claim 22 , wherein the second liquid contains N-methyl-2-pyrrolidone as the organic solvent.

24. The evaluation method according to claim 23 , wherein a content of N-methyl-2-pyrrolidone of the second liquid is 20% by mass or more and 80% by mass or less.

25. The evaluation method according to claim 22 , wherein an electrical conductivity of the second liquid is 1 μS or more at 23° C.

26. The evaluation method according to claim 22 , wherein the first liquid contains copper ions as the heavy metal ions.

27. The evaluation method according to claim 26 , wherein a copper ion concentration of the first liquid is 0.5 to 50000 mg/kg.

28. The evaluation method according to claim 22 , wherein the insulating material used in semiconductor production is adhesive tape for a semiconductor.

Assignees

• Hitachi Chemical Co Ltd

Inventors

• Suzumura Koji
• Yamamoto Kazuhiro
• Murahashi Tomoko

Classifications

• G01N15/08

  Investigating permeability, pore-volume, or surface area of porous materials · CPC title

• G01N27/06 Primary

  of a liquid (involving electrolysis G01N27/26) · CPC title

• G01N2013/003

  Diffusion; diffusivity between liquids · CPC title

• C09J133/068

  containing glycidyl groups · CPC title

• G01N13/00 Primary

  Investigating surface or boundary effects, e.g. wetting power; Investigating diffusion effects; Analysing materials by determining surface, boundary, or diffusion effects (scanning-probe techniques or apparatus G01Q) · CPC title