Process for manufacturing a pyroelectric and/or piezoelectric drive

Patent metadata

Field	Value
Publication number	US-10593857-B2
Application number	US-201415033892-A
Country	US
Kind code	B2
Filing date	Oct 27, 2014
Priority date	Nov 15, 2013
Publication date	Mar 17, 2020
Grant date	Mar 17, 2020

Abstract

A process for manufacturing a piezoelectric and/or pyroelectric device comprising a polyvinylidene fluoride film, the process comprising a step of forming at least one portion of a layer of a solution comprising a solvent and a compound comprising polyvinylidene fluoride and a step of irradiating the portion with pulses of at least one ultraviolet radiation. The irradiating step enables the formation of at least two β crystalline phases having different orientations.

First claim

The invention claimed is:

1. A method of manufacturing a piezoelectric and/or pyroelectric device comprising a film comprising poly-vinylidene fluoride and/or at least one copolymer of poly-vinylidene fluoride, the method comprising the steps of:
forming at least one portion of a layer of a solution comprising a solvent and a compound comprising poly-vinylidene fluoride and/or at least the copolymer of poly-vinylidene fluoride;
and irradiating at least the portion with pulses of at least one ultraviolet radiation to provide the film having piezoelectric and/or pyroelectric properties.

2. The method of claim 1 , wherein the compound comprises poly-vinylidene fluoride, poly(vinylidene fluoride-trifluoro ethylene), poly(vinylidene fluoride-tetrafluoroethylene) or a mixture of at least two of these polymers.

3. The method of claim 1 , wherein the compound further comprises ceramic particles.

4. The method of claim 1 , wherein a duration of each pulse is in the range from 500 μs to 2 ms.

5. The method of claim 1 , wherein a fluence of the ultraviolet radiation is in the range from 10 J/cm 2 to 25 J/cm 2 .

6. The method of claim 1 , wherein the solvent has a boiling temperature in the range from 110° C. to 140° C.

7. The method of claim 1 , wherein the solution comprises from 80% to 95% wt. of the solvent and from 5% to 20% wt. of the compound.

8. The method of claim 1 , further comprising the steps of:
providing a substrate;
depositing on the substrate a coating reflecting the ultraviolet radiation; and
forming the film at least partially on the coating.

9. The method claim 1 , wherein the solvent is capable of at least partially absorbing the ultraviolet radiation.

Assignees

• Commissariat Energie Atomique

Inventors

• Aliane Abdelkader

Classifications

• H01L41/45

  Electricity · mapped topic

• H01L41/317

  Electricity · mapped topic

• H01L37/025 Primary

  Electricity · mapped topic

• H10N30/098

  Forming organic materials · CPC title

• H10N15/15 Primary

  Thermoelectric active materials · CPC title