Substrate holding module, substrate processing apparatus, and substrate processing method

Patent metadata

Field	Value
Publication number	US-10593570-B2
Application number	US-201715421905-A
Country	US
Kind code	B2
Filing date	Feb 1, 2017
Priority date	Feb 12, 2016
Publication date	Mar 17, 2020
Grant date	Mar 17, 2020

Abstract

According to the present disclosure, there is provided a substrate holding module that is capable of accommodating a substrate transferred by a transfer robot. The substrate holding module includes a pedestal including a holding mechanism configured to hold the substrate, a cover configured to cover the pedestal, and a moving mechanism configured to move the cover away from the pedestal.

First claim

What is claimed is:

1. A substrate processing apparatus comprising: a substrate holding module comprising a bottom member including a bottom surface and a side wall, the side wall extending upwardly from an outer periphery of the bottom surface and surrounding the outer periphery of the bottom surface, a pedestal disposed above the bottom surface and including a holder configured to hold a substrate, a cover configured to cover the pedestal, a moving mechanism configured to move the cover relative to the bottom surface, and a control unit that controls various operations of the substrate holding module, wherein the control unit is configured to control the moving mechanism to move the cover towards the bottom member to a first position,
stop movement of the cover, and move the cover to a second position after stopping the movement of the cover, and wherein a bottom edge of the cover extends below the pedestal and above the bottom surface in the first position and the bottom edge of the cover contacts the bottom surface of the bottom member inside the side wall of the bottom member in the second position; and
a plurality of robots transfers the substrate to the substrate holding module.

2. A substrate holding module comprising:
a bottom member including a bottom surface and a side wall, the side wall extending upwardly from an outer periphery of the bottom surface and surrounding the outer periphery of the bottom surface;
a pedestal disposed above the bottom surface and including a holder configured to hold a substrate;
a cover configured to cover the pedestal;
a moving mechanism configured to move the cover relative to the bottom surface; and
a control unit that controls various operations of the substrate holding module,
wherein the control unit is configured to control the moving mechanism to move the cover towards the bottom member to a first position at a first speed, stop movement of the cover, and move the cover to a second position at a second speed slower than the first speed after stopping the movement of the cover, and
wherein a bottom edge of the cover extends below the pedestal and above the bottom surface in the first position and the bottom edge of the cover contacts the bottom surface of the bottom member inside the side wall of the bottom member in the second position.

3. The substrate holding module of claim 2 , further comprising:
a detector for detecting a presence or absence of the substrate on the substrate holder,
wherein the control unit is configured to control the moving mechanism to move the cover to the first position when the detector detects the presence of the substrate on the substrate holder.

4. The substrate holding module of claim 2 , wherein a distance between the bottom edge of the cover and the bottom surface in the first position is 1 to 3 cm.

5. A substrate holding module comprising:
a bottom member including a bottom surface and a side wall, the side wall extending upwardly from an outer periphery of the bottom surface and surrounding the outer periphery of the bottom surface;
a pedestal disposed above the bottom surface and including a holder configured to hold a substrate;
a cover configured to cover the pedestal;
a moving mechanism configured to move the cover relative to the bottom surface; and
control unit that controls various operations of the substrate holding module,
wherein the control unit is configured to control the moving mechanism to move the cover towards the bottom member to a first position, stop movement of the cover, and move the cover to a second position after stopping the movement of the cover, and
wherein a bottom edge of the cover extends below the pedestal and above the bottom surface in the first position and the bottom edge of the cover contacts the bottom surface of the bottom member inside the side wall of the bottom member in the second position.

6. The substrate holding module of claim 5 , wherein the holder includes at least one substrate holding pin.

7. The substrate holding module of claim 5 , wherein a distance between the bottom edge of the cover and the bottom surface in the first position is 1 to 3 cm.

8. The substrate holding module of claim 5 , further comprising:
a motor configured to rotate the pedestal.

9. The substrate holding module of claim 8 , wherein the bottom member is stationary when the pedestal is rotated by the motor.

10. The substrate holding module of claim 5 , further comprising:
a detector for detecting a presence or absence of the substrate on the substrate holder.

11. The substrate holding module of claim 10 , wherein the control unit is configured to control the moving mechanism to move the cover to the first position when the detector detects the presence of the substrate on the substrate holder.

12. The substrate holding module of claim 5 , further comprising:
at least one nozzle configured to supply a liquid to one surface or both surfaces of the substrate in a state where the substrate is held by the holder.

13. The substrate holding module of claim 12 , further comprising:
a drain configured to discharge the liquid.

14. The substrate holding module of claim 12 , wherein when the cover is moved by the moving mechanism to the second position, the cover together with the liquid supplied by the at least one nozzle and subsequently stored in the bottom member, functions as a trap.

Assignees

• Ebara Corp

Inventors

• Yazawa Akihiro
• Kobayashi Kenichi
• Akazawa Kenichi

Classifications

• H10P72/7608

  characterised by a plurality of separate clamping members, e.g. clamping fingers · CPC title

• H10P72/0606

  Position monitoring, e.g. misposition detection or presence detection · CPC title

• H10P72/0472

  comprising at least one polishing chamber · CPC title

• H10P72/0414 Primary

  using mainly spraying means, e.g. nozzles · CPC title

• B24B37/32 Primary

  Retaining rings · CPC title