On chip bias temperature instability characterization of a semiconductor device
US-2015091601-A1 · Apr 2, 2015 · US
US10591522B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10591522-B2 |
| Application number | US-201615299947-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 21, 2016 |
| Priority date | Dec 4, 2015 |
| Publication date | Mar 17, 2020 |
| Grant date | Mar 17, 2020 |
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A measurement apparatus ( 1 ) comprising a high frequency measurement unit ( 2 ) adapted to measure high frequency parameters (HFP) of a device under test (DUT) connected to ports of said measurement apparatus ( 1 ) and a multimeter unit ( 3 ) adapted to measure DC characteristics parameters (DCP) of said device under test (DUT) connected via control signal lines (CL) to a control bus interface ( 6 ) of said measurement apparatus ( 1 ).
Opening claim text (preview).
The invention claimed is: 1. A measurement apparatus comprising: a high frequency measurement unit adapted to measure high frequency parameters of a device under test; a test interface connected to the high frequency measurement unit and comprising test ports being connectable to the device under test to connect the high frequency measurement unit to the device under test; a multimeter unit adapted to measure DC characteristics of said device under test; a control bus interface comprising a radio frequency front end interface, said control bus interface being connected between the multimeter unit and the device under test, and being connectable via control signal lines to the device under test to connect the multimeter unit with the device under test; and a signal generator adapted to supply a stimulus signal to the device under test via the test interface, wherein the signal generator is adapted to sweep the power level of the stimulus signal over a predetermined range, wherein the test interface is adapted to receive the stimulus signal and to route it to the device under test; and wherein the high frequency measurement unit is adapted to determine the frequency response of the device under test. 2. The measurement apparatus according to claim 1 wherein a measurement of said DC characteristics by said multimeter unit and a measurement of said high frequency parameters by said high frequency measurement unit is performed simultaneously. 3. The measurement apparatus according to claim 1 , wherein the multimeter unit is adapted to measure a DC current and/or a DC supply voltage at each of said control signal lines connected to said control bus interface. 4. The measurement apparatus according to claim 1 comprising a display unit adapted to display at least one high frequency parameter measured by said high frequency measurement unit simultaneously with at least one DC characteristic parameter measured by said multimeter unit. 5. The measurement apparatus according to claim 1 , wherein said high frequency measurement unit is adapted to measure scattering parameters of said device under test comprising a forward reflection coefficient, a reverse reflection coefficient, a forward transmission coefficient and a reverse transmission coefficient and/or adapted to measure a bode diagram. 6. The measurement apparatus according to claim 4 , wherein the display unit is adapted to display a frequency-dependent high frequency parameter and a frequency-dependent DC characteristic parameter simultaneously for a selectable frequency range. 7. The measurement apparatus according to claim 1 , wherein the measurement apparatus comprises an integrated power supply unit adapted to provide a power supply to the device under test. 8. The measurement apparatus according to claim 1 , wherein the multimeter unit comprises a digital multimeter unit adapted to measure DC characteristic parameters of each control signal line connected to said control bus interface. 9. The measurement apparatus according to claim 1 , wherein the multimeter unit is implemented on a plug-in card of said measurement apparatus or connected via a data interface to said measurement apparatus. 10. The measurement apparatus according to claim 1 , wherein the processing evaluation unit of said measurement apparatus is adapted to evaluate the high frequency parameters measured by said high frequency measurement unit and the DC characteristic parameters measured by said multimeter unit to analyze the device under test and to identify a dependency between a high frequency behaviour and a low frequency behaviour of said device under test. 11. The measurement apparatus according to claim 1 , wherein the measurement apparatus comprises a vector network analyser or a spectrum analyser. 12. A method for recognizing automatically a dependency between a high frequency behaviour and a low frequency behaviour of a device under test comprising the steps of: measuring at least one high frequency parameter of the device under test by a high frequency measurement unit of a measurement apparatus, wherein said measurement unit is connected to the device under test via a test interface comprising test ports connected to the device under test; measuring at least one DC characteristic parameter of the device under test simultaneously by a multimeter unit of said measurement apparatus, wherein a control bus interface is connected between said multimeter unit and the device under test, wherein said control bus interface comprises a radio frequency front end interface and is connected via control signal lines to the device under test; and calculating correlation parameters on the basis of the measured high frequency parameters and the measured DC characteristic parameters to identify a dependency between a high frequency behaviour and a low frequency behaviour of said device under test, wherein a stimulus signal is supplied to the device under test, wherein the power level of the stimulus signal is swept over a predetermined range, and wherein the frequency response of the device under test is determined by the high frequency measurement unit. 13. The measurement apparatus according to claim 1 , further comprising a synchronization unit adapted to synchronize the high frequency measurements performed by the high frequency measurement unit and the low frequency measurements performed by the multimeter unit.
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Circuits for multi-testers {, i.e. multimeters}, e.g. for measuring voltage, current, or impedance at will · CPC title
Apparatus or methods therefor (G01R31/2607, G01R31/2642 take precedence) · CPC title
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