Unidirectional liquid transport systems and methods of manufacture thereof

Patent metadata

Field	Value
Publication number	US-10590967-B2
Application number	US-201815935401-A
Country	US
Kind code	B2
Filing date	Mar 26, 2018
Priority date	Mar 26, 2018
Publication date	Mar 17, 2020
Grant date	Mar 17, 2020

Abstract

There is disclosed a unidirectional liquid transport system. The system, or a liquid diode, has an array of elongate units. Each unit is defined by a surrounding fencing, and includes a region generally resembling a U-shaped micro-scale island with a proximal end on one side having an opening and a distal end on the opposite side thereof. A channel is defined between a lateral side of the island and an adjacent fencing thereof, and the channel is divergent from the proximal end towards the distal location on the opposite side thereof. The island includes a reentrant member configured to, upon contact with droplets of a liquid to be transported, initially arrest flow of the liquid and produce a pinning acting to allow building up of excess surface energy, and subsequently cause coalescence of the liquid thus converting the surface energy to kinetic energy for movement of the liquid; and surfaces of the units are fabricated on silicon wafer.

First claim

The invention claimed is:

1. A unidirectional liquid transport system comprising an array of elongate units, wherein:
each said unit is defined by a surrounding fencing;
each said unit includes a region generally resembling a U-shaped micro-scale island with a proximal end on one side having an opening and a distal end on the opposite side thereof;
a channel is defined between a lateral side of the island and an adjacent fencing thereof, and the channel is divergent from the proximal end towards the distal end, with a divergence angle α of the channel of 0°<α<10°;
said island is provided with a reentrant member defining an outer rim with a width “D” at the proximal end and with a length “L”;
said island provided with the reentrant member defines an inner rim with a width “d” at the proximal end and with a length “l”;
the width of the channel at the proximal end is 0>s>30 μm;
“D” is substantially 0 to 1 mm;
“L” is 0 to 1 mm;
0<“d”<“D”; and
0<“l”<L.

2. A system as claimed in claim 1 , wherein each said unit has a rectangular profile.

3. A system as claimed in claim 1 , wherein said island is arranged between a pair of said channels on opposite lateral sides thereof.

4. A system as claimed in claim 1 , wherein said island is provided with a trough surrounded by the reentrant member and the proximal end of said island resembles the opening of the trough, and wherein, in use, liquid migration moves in a direction from the opening to the distal end of said island.

5. A system as claimed in claim 1 , wherein said reentrant member generally resembles a lip inwardly extending and defining the outer and inner rims of said island.

6. A system as claimed in claim 5 , wherein said lip at the inner rim has a curved or concave configuration.

7. A system as claimed in claim 5 , wherein said trough has a substantially flat floor.

8. A system as claimed in claim 7 , wherein said lip is arranged substantially in parallel to said floor.

9. A system as claimed in claim 5 , wherein the length of said lip, δ, is 1 μm<δ<10 μm.

10. A system as claimed in claim 1 , wherein the array is formed from photolithography.

11. A unidirectional liquid transport system comprising an array of elongate units, wherein:
each said unit is defined by a surrounding fencing;
each said unit includes a region generally resembling a U-shaped micro-scale island with a proximal end on one side having an opening and a distal end on the opposite side thereof;
a channel is defined between a lateral side of the island and an adjacent fencing thereof, and the channel is divergent from the proximal end towards the distal location on the opposite side thereof;
said island includes a reentrant member configured to, upon contact with droplets of a liquid to be transported, initially arrest flow of the liquid and produce a pinning acting to allow building up of excess surface energy, and subsequently cause coalescence of the liquid thus converting the surface energy to kinetic energy for movement of the liquid; and
surfaces of the units are fabricated on silicon wafer.

12. A system as claimed in claim 11 , wherein:
said reentrant member has an outer rim with a width “D” at the proximal end and with a length “L”;
said island has the reentrant member with an inner rim with a width “d” at the proximal end and with a length “l”;
the width of the channel at the proximal end is 0>s>30 μm;
“D” is substantially 0 to 1 mm;
“L” is 0 to 1 mm;
0<“d”<“D”; and
0<“l”<L.

13. A method of manufacture of a unidirectional liquid transport system of claim 11 , comprising the sequential steps of:
depositing a layer of photoresist as a protective mask by photolithography;
effecting an anisotropic etching via reactive ion etching;
removing the photoresist by plasma stripping and wet cleaning;
fabricating a mask layer to deposit a layer of silicon oxide;
photolithographic patterning to selectively remove the silicon oxide layer on positions of cavity structures desired to be formed; and
isotropically etching silicon for exposing the cavity structures.

14. A method as claimed in claim 13 , wherein the anisotropic etching is deep reactive ion etching (DRIE).

15. A method as claimed in claim 13 , wherein the mask layer is formed by thermal oxidation.

16. A method as claimed in claim 13 , wherein the mask layer has a thickness of substantially 1 μm.

17. A method as claimed in claim 13 , wherein the photolithographic patterning is reactive ion etching.

18. A method as claimed in claim 13 , wherein the isotropically etching is deep reactive ion etching (DRIE) or XeF 2 .

Assignees

• Univ City Hong Kong

Inventors

• Wang Zuankai
• Li Jiaqian
• Zhou Xiaofeng

Classifications

• B01L2400/086

  using baffles or other fixed flow obstructions · CPC title

• F15D1/0025 Primary

  using passive means, i.e. without external energy supply · CPC title

• F15D1/0085

  Methods of making characteristic surfaces for influencing the boundary layer · CPC title

• B01L2300/161

  Control and use of surface tension forces, e.g. hydrophobic, hydrophilic · CPC title

• B81B1/00

  Devices without movable or flexible elements, e.g. microcapillary devices · CPC title