Nano-electro-mechanical labels and encoder

Patent metadata

Field	Value
Publication number	US-10586135-B2
Application number	US-201816011509-A
Country	US
Kind code	B2
Filing date	Jun 18, 2018
Priority date	Jun 16, 2017
Publication date	Mar 10, 2020
Grant date	Mar 10, 2020

Abstract

Data is encoded for identification and labeling using a multitude of nano-electro-mechanical structures formed on a substrate. The number of such structures, their shapes, choice of materials, the spacing therebetween and the overall distribution of the structures result in a vibrational pattern or an acoustic signature that uniquely corresponds to the encoded data. A first group of the structures is formed in conformity with the design rules of a fabrication process used to manufacture the device that includes the structures. A second group of the structures is formed so as not to conform to the design rules and thereby to undergo variability as a result of the statistical variations that is inherent in the fabrication process.

First claim

What is claimed is:

1. A device comprising:
a substrate;
a plurality of structures patterned on the substrate;
a piezoelectric layer disposed on the plurality of structures; and
an interdigital transducer layer formed above the piezoelectric layer;
wherein a first subset of the plurality of structures is formed in conformity with patterning rules of a fabrication process used to manufacture the device, and wherein a second subset of the plurality of structures is formed in violation of the patterning rules such that the second subset of the plurality of structures exhibits a larger variation in patterning than a variation of the first subset of the plurality of structures.

2. The device of claim 1 wherein each of the plurality of structures has a cylindrical shape.

3. The device of claim 1 wherein each of the plurality of structures has a rectangular shape.

4. The device of claim 1 wherein said first and second subsets have overlapping regions.

5. The device of claim 1 wherein said first and second subsets do not have overlapping regions.

6. The device of claim 1 wherein a first group of the first subset has a different height than a second group of the first subset.

7. The device of claim 1 wherein a first group of the first subset has a different shape than a second group of the first subset.

8. The device of claim 1 ,
wherein the piezoelectric layer is adapted to cause the plurality of structures to vibrate in response to an electrical signal.

9. The device of claim 8 ,
wherein the interdigital transducer layer is adapted to generate acoustic waves.

10. The device of claim 1 wherein said plurality of structures are formed from metal.

11. The device of claim 1 wherein said plurality of structures are from a same material as the substrate.

12. The device of claim 1 wherein said substrate is a semiconductor substrate.

13. The device of claim 11 wherein said substrate is a silicon dioxide substrate.

14. The device of claim 13 further comprising a piezoelectric layer formed from Aluminum Nitride.

15. The device of claim 1 wherein each of said plurality of structures has a dimension in the range of 1 nm to 1 μm.

16. A method of encoding data comprising:
forming a first plurality of structures on a substrate, wherein the first plurality of structures is fabricated in conformity with patterning rules of a fabrication process; and
forming a second plurality of structures in violation of the patterning rules such that the second plurality of structures exhibits a larger variation in patterning than a variation of the first plurality of structures;
wherein an acoustic signature of the first plurality of structures represents a first portion of encoded data, and wherein an acoustic signature of the second plurality of structures represents a second portion of the encoded data.

17. The method of claim 16 wherein at least a subset of the first plurality of structures has a cylindrical shape.

18. The method of claim 16 wherein at least a subset of the first plurality of structures has a rectangular shape.

19. The method of claim 16 wherein said first and second plurality of structures are formed in non-overlapping regions.

20. The method of claim 16 wherein a first group of the first plurality of structures has a different height than a second group of the first plurality of structures.

21. The method of claim 16 wherein a first group of the first plurality of structures has a different shape than a second group of the first plurality of structures.

22. The method of claim 16 further comprising:
forming a piezoelectric layer above the first and second plurality of structures.

23. The method of claim 22 further comprising:
forming an interdigital transducer layer above the piezoelectric layer.

24. The method of claim 16 wherein said first and second plurality of structures are formed from metal.

25. The method of claim 16 wherein said first and second plurality of structures are from a same material as the substrate.

26. The method of claim 16 wherein said substrate is a semiconductor substrate.

27. The method of claim 25 wherein said substrate is a silicon dioxide substrate.

28. The method of claim 27 further comprising:
forming a piezoelectric layer made from Aluminum nitride.

29. The method of claim 16 wherein each of said first and second plurality of structures has a dimension in the range of 1 nm to 1 μm.

Assignees

• Univ Florida

Inventors

• Tabrizian Roozbeh
• Bhunia Swarup

Classifications

• G06K2019/06234

  miniature-code · CPC title

• G06K19/041 Primary

  Constructional details (G06K19/06 takes precedence) · CPC title

• G06K19/0675 Primary

  the resonating marks being of the surface acoustic wave [SAW] kind (SAW devices per se H03H9/64) · CPC title

• G06K1/121

  by printing code marks (applying code marks to labels B65C9/46; marking or coding completed packages B65B61/26) · CPC title

• H01L41/09

  Electricity · mapped topic