30 nm in-line LPC testing and cleaning of semiconductor processing equipment

Patent metadata

Field	Value
Publication number	US-10583465-B2
Application number	US-201715487213-A
Country	US
Kind code	B2
Filing date	Apr 13, 2017
Priority date	Apr 14, 2016
Publication date	Mar 10, 2020
Grant date	Mar 10, 2020

Abstract

The implementations described herein generally relate to 30 nm in-line liquid particle count testing equipment which analyses and cleans semiconductor processing equipment. More specifically, the implementations described relate to a system for diluting, analyzing, and modifying fluids to enable the observation of the contents of the fluids. A dilution sampling tool is coupled with a liquid particle detector for reading the contents of an extraction solution containing particles from semiconductor processing equipment, such as a liner, a shield, a faceplate, or a showerhead, in a cleaning tank. As such, accurate liquid particle readings may be had which reduce oversaturation of the particle detector.

First claim

What is claimed is:

1. A liquid particle counting system, comprising:
a holding tank, comprising:
a first holding area;
a second holding area; and
a sonicator disposed in the second holding area, wherein the second holding area is separated from the first holding area by a first wall;

a first pump coupled downstream to the first holding area by a first tube;
a dilution system coupled downstream to the first pump by a second tube;
a dilution source coupled to the dilution system by a third tube;
a liquid particle counter coupled downstream to the dilution system by a fourth tube;
a flow meter operatively connected downstream to the liquid particle counter by a fifth tube; and
a sixth tube that connects an outlet of the flow meter to an inlet of the holding tank.

2. The liquid particle counting system of claim 1 , wherein the first wall comprises a polypropylene material, a quartz material, a polyethylene material, or combinations thereof.

3. The liquid particle counting system of claim 1 , wherein the holding tank comprises a polypropylene material, a quartz material, a polyethylene material, a polytetrafluoroethylene material, or combinations thereof.

4. The liquid particle counting system of claim 1 , wherein the first pump is a peristaltic pump.

5. The liquid particle counting system of claim 1 , wherein the first tube, the second tube, the third tube, and the fourth tube comprise a vinyl material, a polymeric material, a perfluoroalkoxy material, a nylon material, or combinations and mixtures thereof.

6. The liquid particle counting system of claim 1 , further comprising:
a second pump operatively coupled to the first holding area; and
at least one particle filter operatively coupled at a first end to the second pump by a seventh tube, wherein the at least one particle filter is operatively coupled at a second end to an inlet of an eighth tube, and wherein the eighth tube has an outlet disposed at an inlet of the holding tank.

7. The liquid particle counting system of claim 6 , wherein the second pump is a gravity fed pump.

8. The liquid particle counting system of claim 6 , wherein the at least one particle filter is a plurality of particle filters connected in series or in parallel.

9. A method for counting liquid particles of a semiconductor component, comprising:
immersing the semiconductor component inside a holding tank, wherein the holding tank comprises an extraction solution;
passing various levels of ultrasonication energy to the holding tank to form a particle solution, wherein the particle solution comprises the extraction solution and a plurality of particles from the semiconductor component;
pumping the particle solution to a dilution system;
diluting the particle solution with de-ionized water to form a diluted solution;
transferring the diluted solution to a liquid particle counter, wherein the liquid particle counter determines the numbers of liquid particles in the diluted solution in real-time;
transferring the diluted solution through a flow meter; and
combining the diluted solution flowing from the flow meter with the extraction solution in the holding tank.

Assignees

• Applied Materials Inc

Inventors

• Wang Jianqi
• Lu William Ming-Ye
• Lin Yixing
• Papke Kevin A

Classifications

• B08B3/12 Primary

  by sonic or ultrasonic vibrations · CPC title

• G01N2001/383

  collecting and diluting in a flow of liquid · CPC title

• G01N2015/1486

  Counting the particles · CPC title

• G01N1/38

  Diluting, dispersing or mixing samples · CPC title

• G01N2001/028

  Sampling from a surface, swabbing, vaporising · CPC title