Middle of line structures

Patent metadata

Field	Value
Publication number	US-10580875-B2
Application number	US-201815873565-A
Country	US
Kind code	B2
Filing date	Jan 17, 2018
Priority date	Jan 17, 2018
Publication date	Mar 3, 2020
Grant date	Mar 3, 2020

Abstract

The present disclosure generally relates to semiconductor structures and, more particularly, to middle of line structures and methods of manufacture. The structure includes: a plurality of gate structures comprising source and/or drain metallization features; spacers on sidewalls of the gate structures and composed of a first material and a second material; and contacts in electrical contact with the source and/or drain metallization features, and separated from the gate structures by the spacers.

First claim

What is claimed:

1. A structure, comprising:
a plurality of gate structures each comprising a gate material, source and/or drain metallization features and a tapered capping layer directly on a top surface of the gate material;
spacers on sidewalls of the gate structures and composed of a first material and a second material, the first material directly contacting an entire bottom surface of the source and/or drain metallization features;
contacts in electrical contact with the source and/or drain metallization features, and separated from the gate structures by the spacers; and
a plurality of sidewall spacers in direct contact with both sidewalls of the gate material,
wherein the first material directly contacts a sidewall of at least one sidewall spacer of the sidewall spacers and directly contacts both sidewalls of a conductive fill material of the source and/or drain metallization features.

2. The structure of claim 1 , wherein the second material protects the tapered capping layer from erosion during an etching process.

3. The structure of claim 2 , wherein the second material is a high-k dielectric material or a low-k dielectric material.

4. The structure of claim 3 , wherein the second material is one of SiN, Al 2 O 3 and HfO 2 .

5. The structure of claim 4 , wherein the first material is Ti, TiN, TaN, Ru or Co.

6. The structure of claim 5 , wherein the conductive fill material is in electrical contact with source and drain regions of the gate structures.

7. The structure of claim 5 , wherein the spacers are in direct contact with a sidewall structure and the tapered capping layer on the gate structures and the source and/or drain metallization features.

8. The structure of claim 1 , further comprising air gaps between the first material and the second material.

9. The structure of claim 8 , wherein the air gaps are below a surface of the gate material of the gate structures.

10. The structure of claim 9 , wherein the air gaps are adjacent to sidewall spacers on the gate structures and below the tapered capping layer over the gate material.

11. A structure, comprising:
a plurality of gate structures comprising source/drain regions, gate material, sidewall spacers and a capping material on the gate material and the sidewall spacers;
a plurality of source/drain contacts in electrical contact with the source/drain regions;
a lining comprised of a top material and a bottom material along the sidewall spacers, the lining extending below the source/drain contacts such that the bottom material directly contacts an entire bottom of the source/drain contacts; and
contacts extending to the source/drain contacts and separated from the gate metal by the lining,
wherein the sidewall spacers are in direct contact with both sidewalls of the gate material, and
the bottom material directly contacts a sidewall of at least one sidewall spacer of the sidewall spacers and directly contacts both sidewalls of a conductive fill material of the source and/or drain contacts.

12. The structure of claim 11 , wherein the bottom material is Ti, TiN, TaN, Ru or Co.

13. The structure of claim 12 , wherein the top material is one of SiN, Al 2 O3 and HfO 2 .

14. The structure of claim 13 , further comprising an air gap between the top material and the bottom material of the lining.

15. The structure of claim 14 , wherein the airgap is below a surface of the gate material and is separated therefrom by the sidewall spacers.

16. The structure of claim 11 , wherein the top material is comprised of a high-k dielectric.

17. A method, comprising:
forming a plurality of gate structures comprising sidewall spacers, gate material, and source and/or drain metallization features;
forming a tapered capping layer over the gate structures;
forming spacers on sidewalls of the gate structures comprising a first material and a second material, the spacers extending below the source and/or drain metallization features and the first material directly contacting and extending across a bottom surface of the source and/or drain metallization features; and
forming contacts in electrical contact with the source and/or drain metallization features, and separated from the recessed gate structures by the spacers,
wherein the sidewall spacers are in direct contact with both sidewalls of the gate material, and
the first material directly contacts a sidewall of at least one sidewall spacer of the sidewall spacers and directly contacts both sidewalls of a conductive fill material of the source and/or drain metallization features.

18. The method of claim 17 , further comprising forming air gaps between the first material and the second material.

19. The method of claim 17 , wherein the first material is Ti, TiN, TaN, Ru or Co and the second material is one of SiN, Al 2 O3 and HfO 2 .

20. The structure of claim 1 , further comprising an airgap between a top surface of the first material and a bottom surface of the second material, wherein the top surface of the first material is below a top surface of the gate material, and the contacts are in direct contact with sidewalls of the second material and a bottom surface of the contacts are in direct contact with a top surface of the conductive fill material within the source and/or drain metallization features.

Assignees

• Globalfoundries Inc

Inventors

• Zang Hui
• Xu Guowei
• Tabakman Keith
• Sardesai Viraj

Classifications

• H01L29/66545

  Electricity · mapped topic

• H01L21/823468

  Electricity · mapped topic

• H01L21/31144

  Electricity · mapped topic

• H01L21/76816

  Electricity · mapped topic

• H01L29/66575

  Electricity · mapped topic