Electron emission source and method for fabricating the same

Patent metadata

Field	Value
Publication number	US-10580609-B2
Application number	US-201916430249-A
Country	US
Kind code	B2
Filing date	Jun 3, 2019
Priority date	Jan 25, 2017
Publication date	Mar 3, 2020
Grant date	Mar 3, 2020

Abstract

Provided is an electron emission source including a substrate, a fixed structure provided on the substrate, and an electron emission yarn provided between the substrate and the fixed structure. The fixed structure includes a first portion having a first width and a second portion having a second width greater than the first width, and the electron emission yarn extends on a first sidewall of the first portion of the fixed structure from between the fixed structure and the substrate.

First claim

What is claimed is:

1. An electron emission source manufacturing method comprising:
preparing a fixed structure that extends in a first direction and includes first and second sidewalls and a first surface, the first and second sidewalls facing each other in a second direction crossing the first direction, the first and second direction parallel to the first surface;
forming an electron emission yarn to wind the fixed structure, the electron emission yarn including a first part, a second part, and a third part, the first part extending in a third direction along the first sidewall, the second part extending in the second direction along the first surface, and the third part extending in the third direction along the second sidewall, the first and third parts extending from the second part, the third direction being perpendicular to the first surface of the fixed structure; and
fixing the fixed structure wound by the electron emission yarn on a substrate so that the second part of the electron emission yarn is provided between the first surface of the fixed structure and a top surface of the substrate,
wherein the electron emission yarn is fixed between the fixed structure and the substrate.

2. The method of claim 1 , wherein the forming of the electron emission yarn comprises:
winding the fixed structure with a preliminary electron emission yarn; and
cutting the preliminary electron emission yarn on a second surface of the fixed structure, the second surface facing the first surface in the third direction.

3. The method of claim 2 , wherein the cutting of the preliminary electron emission yarn comprises performing cutting in the first direction parallel to the top surface of the substrate along a center of the second surface of the fixed structure.

4. The method of claim 2 , wherein the cutting of the preliminary electron emission yarn comprises performing cutting in the first direction parallel to the top surface of the substrate along a plurality of cutting lines on the second surface of the fixed structure.

5. The method of claim 4 , further comprising removing the cut preliminary electron emission yarn on the second surface of the fixed structure.

Assignees

• Electronics & Telecommunications Res Inst
• Electronics And Telelcommunications Res Institute

Inventors

• Jeong Jin-Woo
• Song Yoon-Ho

Classifications

• H01J9/025

  of field emission cathodes · CPC title

• H01J19/24

  Cold cathodes, e.g. field-emissive cathode · CPC title

• H01J1/304 Primary

  Field-emissive cathodes · CPC title

• H01J63/02

  Details, e.g. electrode, gas filling, shape of vessel · CPC title

• H01J1/3048 Primary

  Distributed particle emitters · CPC title