Substrate polishing apparatus

Patent metadata

Field	Value
Publication number	US-10576604-B2
Application number	US-201514699075-A
Country	US
Kind code	B2
Filing date	Apr 29, 2015
Priority date	Apr 30, 2014
Publication date	Mar 3, 2020
Grant date	Mar 3, 2020

Abstract

A substrate polishing apparatus includes a polishing table 30 having a polishing surface 10 in the upper surface, a substrate holding portion 31 that holds a substrate W having a surface to be polished in the lower surface, and a holding portion cover 36 that covers the outer side of the substrate holding portion 31. Between the lower portion of the holding portion cover 36 and the upper surface of the polishing table 30, a gap portion for intake 37 is provided, and in the upper portion of the holding portion cover 36, a pipe for exhaust 39 connected to an exhaust mechanism 38 is provided. By operating the exhaust mechanism 38, a rising air current from the gap portion 37 toward the pipe 39 is formed between the outer surface of the substrate holding portion 31 and the inner surface of the holding portion cover 36.

First claim

What is claimed is:

1. A substrate polishing apparatus, comprising:
a polishing table having a polishing surface in an upper surface;
a substrate holding portion comprising a first outer peripheral surface, the substrate holding portion holding a substrate having a surface to be polished in a lower surface and presses the surface to be polished of the substrate against the polishing surface of the polishing table to polish the surface to be polished of the substrate; and
a holding portion cover that covers an entire outer side of the substrate holding portion, a lowermost portion of the holding portion cover having a peripheral edge defining an open end of the holding portion cover, the peripheral edge facing the upper surface of the polishing table, and
a table cover that covers an entire outer side of the polishing table, wherein
between the peripheral edge of the lowermost portion of the holding portion cover and the upper surface of the polishing table, a gap portion is provided,
wherein a fin adapted for moving air is disposed on at least one of the substrate holding portion and the polishing table, and
a height of a top end of the table cover is above the upper surface of the polishing table and an upper edge of the top end of the table cover substantially aligns with the peripheral edge of the lowermost portion of the holding portion cover, and
wherein the fin is a thread groove provided on the first outer peripheral surface of the substrate holding portion and generates a rising air current between the first outer peripheral surface of the substrate holding portion and an inner surface of the holding portion cover due to rotation of the substrate holding portion.

2. The substrate polishing apparatus according to claim 1 , wherein
the holding portion cover is movable between a covering position at which the holding portion cover comes close to the substrate holding portion to cover the outer side of the substrate holding portion and a non-covering position at which the holding portion is separated from the substrate holding portion and does not cover the outer side of the substrate holding portion, and
when the surface to be polished of the substrate is polished, the holding portion cover is placed at the covering position and when the surface to be polished of the substrate is not polished, the holding portion cover is placed at the non-covering position.

3. The substrate polishing apparatus according to claim 1 , comprising:
a second gap portion for intake provided between the polishing table and the table cover; and
a second pipe for exhaust provided in the lower portion of the table cover and connected to an exhaust mechanism, wherein
the polishing table comprises a second outer peripheral surface; and
wherein a second fin is a thread groove provided on the second outer peripheral surface of the polishing table and generates a descending air current between the outer surface of the polishing table and the inner surface of the table cover due to rotation of the polishing table.

4. The substrate polishing apparatus according to claim 1 , comprising:
a shielding mechanism that covers the outer side of the holding portion cover that covers the outer side of the substrate holding portion, and the outer side of the polishing table.

5. The substrate polishing apparatus according to claim 1 , wherein
the pipe comprises a gas-liquid separating mechanism.

Assignees

• Ebara Corp

Inventors

• Shinozaki Hiroyuki
• Aono Hiroshi
• Sone Tadakazu
• Shinkai Kenji
• Aizawa Hideo

Classifications

• B24B55/06

  Dust extraction equipment on grinding or polishing machines (B24B31/12 takes precedence) · CPC title

• B24B37/34 Primary

  Accessories · CPC title

• B24B55/12

  Devices for exhausting mist of oil or coolant; Devices for collecting or recovering materials resulting from grinding or polishing, e.g. of precious metals, precious stones, diamonds or the like · CPC title

• H01L21/32115

  Electricity · mapped topic

• H01L21/31051

  Electricity · mapped topic