Substrate processing apparatus
US-2015197853-A1 · Jul 16, 2015 · US
US10576406B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10576406-B2 |
| Application number | US-201815939611-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 29, 2018 |
| Priority date | Apr 4, 2017 |
| Publication date | Mar 3, 2020 |
| Grant date | Mar 3, 2020 |
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There is provided an exhaust purification device including a particulate filter configured to collect particulates contained in an exhaust gas, an oxidation catalyst disposed in a front stage of the particulate filter and configured to have a carrier partially or entirely made of a material which absorbs a microwave, a housing in which the particulate filter and the oxidation catalyst are arranged, and a microwave generator configured to generate a microwave to be irradiated onto the oxidation catalyst in a direction to which the exhaust gas flows.
Opening claim text (preview).
What is claimed is: 1. An exhaust purification device comprising: a particulate filter configured to collect particulates contained in an exhaust gas; an oxidation catalyst disposed in a front stage of the particulate filter and configured to have a carrier partially or entirely made of a material which absorbs a microwave; a housing in which the particulate filter and the oxidation catalyst are arranged; and a microwave generator configured to generate a microwave to be irradiated onto the oxidation catalyst in a direction to which the exhaust gas flows. 2. The exhaust purification device according to claim 1 , wherein the material that absorbs the microwave contains silicon carbide (SiC) or foamed metal. 3. The exhaust purification device according to claim 1 , wherein the microwave generator is arranged linearly with the oxidation catalyst and the particulate filter assembled in the housing. 4. The exhaust purification device according to claim 1 , wherein the housing includes a housing body covering the particulate filter and the oxidation catalyst, and an inlet port and an outlet port of the exhaust gas connected to the housing body, wherein a connection pipe is interposed between the inlet port and the microwave generator, and wherein a suction pipe into which the exhaust gas is sucked is connected to the connection pipe. 5. The exhaust purification device according to claim 4 , wherein a microwave transmission plate is interposed between a connecting portion of the connection pipe and the suction pipe and the microwave generator. 6. The exhaust purification device according to claim 4 , wherein a rectifier having a hole for rectifying a flow of the exhaust gas sucked from the suction pipe is interposed between the connection pipe and the oxidation catalyst, in the housing. 7. The exhaust purification device according to claim 6 , wherein the rectifier is thicker in a central portion than a peripheral portion. 8. The exhaust purification device according to claim 1 , wherein the microwave generator includes a monopole antenna or a planar antenna. 9. The exhaust purification device according to claim 1 , further comprising: a controller configured to control the microwave generator to irradiate the microwave toward the oxidation catalyst when the particulates deposited in the particulate filter exceeds a predetermined amount. 10. The exhaust purification device according to claim 1 , further comprising: a thermometer configured to measure a temperature of the oxidation catalyst; and a controller configured to control the microwave generator to irradiate the microwave toward the oxidation catalyst when the temperature measured by the thermometer is lower than a predetermined temperature. 11. An internal combustion device comprising: an engine; and an exhaust purification device coupled to the engine, the exhaust purification device including: a particulate filter configured to collect particulates contained in an exhaust gas, an oxidation catalyst disposed in a front stage of the particulate filter and configured to have a carrier partially or entirely made of a material which absorbs a microwave, a housing in which the particulate filter and the oxidation catalyst are arranged, and a microwave generator configured to generate a microwave to be irradiated onto the oxidation catalyst in a direction to which the exhaust gas flows. 12. A power generation device comprising: an engine; a power generator coupled to the engine; and an exhaust purification device coupled to the engine, the exhaust purification device including: a particulate filter configured to collect particulates contained in an exhaust gas, an oxidation catalyst disposed in a front stage of the particulate filter and configured to have a carrier partially or entirely made of a material which absorbs a microwave, a housing in which the particulate filter and the oxidation catalyst are arranged, and a microwave generator configured to generate a microwave to be irradiated onto the oxidation catalyst in a direction to which the exhaust gas flows. 13. The power generation device according to claim 12 , wherein the power generation device is used by an automobile.
the purifying devices are arranged in a single housing · CPC title
for treatment of exhaust gases from IC Engines · CPC title
Making use of microwaves, e.g. for measurements · CPC title
Controlling the catalytic process · CPC title
Oxidation catalysts for HC and CO only · CPC title
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