Magnetic circuits for MEMS devices

Patent metadata

Field	Value
Publication number	US-10574100-B2
Application number	US-201615086578-A
Country	US
Kind code	B2
Filing date	Mar 31, 2016
Priority date	Mar 31, 2016
Publication date	Feb 25, 2020
Grant date	Feb 25, 2020

Abstract

An example apparatus for produce magnetic fields includes a base plate comprising a plurality of grooves. The apparatus includes an MEMS device disposed on the base plate. The apparatus further includes a number of magnets to produce one or more magnetic fields disposed on the plurality of grooves and adjacent to the MEMS device.

First claim

What is claimed is:

1. An apparatus for producing magnetic fields, comprising:
a base plate comprising a plurality of grooves;
a micro-electromechanical system (MEMS) device disposed on the base plate; and
a plurality of magnets to produce one or more magnetic fields disposed on the plurality of grooves and adjacent to the MEMS device.

2. The apparatus of claim 1 , wherein the plurality of magnets are to be retained to the base plate at the plurality of grooves via an adhesive.

3. The apparatus of claim 1 , wherein a length of each of the plurality of grooves is to be longer than a width of an associated magnet of the plurality of magnets to be retained.

4. The apparatus of claim 1 , wherein the plurality of magnets are disposed flush with the base plate and one or more sides of the MEMS device.

5. The apparatus of claim 1 , wherein the plurality of grooves are disposed perpendicular to edges of the MEMS device.

6. The apparatus of claim 1 , wherein a form of the plurality of grooves is based on an adhesive used to couple the plurality of magnets to the base plate.

7. The apparatus of claim 1 , wherein a depth of the plurality of grooves is based on an adhesive used to couple the plurality of magnets to the base plate.

8. The apparatus of claim 1 , wherein the base plate comprises a yoke.

9. The apparatus of claim 1 , wherein the plurality of grooves comprise low depth grooves.

10. The apparatus of claim 1 , wherein the base plate comprises a flat surface.

11. A method for manufacturing a magnetic circuit for a micro-electromechanical system (MEMS) device, comprising:
fabricating a base plate with a plurality of grooves to surround the MEMS device;
disposing an adhesive onto the plurality of grooves to retain one or more magnets of the magnetic circuit; and
disposing the one or more magnets onto the plurality of grooves.

12. The method of claim 11 , wherein the adhesive comprises a UV adhesive.

13. The method of claim 11 , wherein a form and a depth of the plurality of grooves is based at least in part on the adhesive.

14. The method of claim 11 , wherein disposing the adhesive comprises forcing the adhesive into the plurality of grooves under each of the one or more magnets via a capillary force after disposing the one or more magnets onto the plurality of grooves.

15. The method of claim 11 , wherein disposing the adhesive further comprises preheating the adhesive to a predetermined temperature.

16. The method of claim 11 , wherein disposing the one or more magnets is performed before disposing the adhesive onto the plurality of grooves.

17. The method of claim 11 , comprising curing the adhesive to set a placement of the one or more magnets onto the base plate via a dual curing comprising light, heat, chemical reaction, or any combination thereof.

18. The method of claim 11 , wherein fabricating the base plate comprises etching the grooves via laser etching, chemical etching, electro-erosion etching, or any combination thereof.

19. A system for producing magnetic fields, comprising:
a processor;
a base plate comprising a plurality of grooves;
a micro-electromechanical system (MEMS) device electrically coupled to the processor and disposed on the base plate; and
a plurality of magnets to produce one or more magnetic fields disposed on the plurality of grooves and adjacent to the MEMS device.

20. The system of claim 19 , wherein a length of each of the plurality of grooves is to be longer than a width of an associated magnet of the plurality of magnets and wherein the plurality of grooves are disposed perpendicular to edges of the MEMS device.

Assignees

• Intel Corp

Inventors

• Matyuch Konstantin
• Freedman Barak
• Malamud Vladimir
• Hirshberg Arnon
• Petronius Israel

Classifications

• B81B3/0091

  Magnetic properties, e.g. guiding magnetic flux · CPC title

• H02K15/03

  having permanent magnets · CPC title

• H02K1/17 Primary

  Stator cores with permanent magnets · CPC title

• B81B2201/042

  Micromirrors, not used as optical switches · CPC title

• G02B26/085

  the reflecting means being moved or deformed by electromagnetic means · CPC title