Gas concentration sensors and systems

Patent metadata

Field	Value
Publication number	US-10571430-B2
Application number	US-201715455678-A
Country	US
Kind code	B2
Filing date	Mar 10, 2017
Priority date	Mar 14, 2016
Publication date	Feb 25, 2020
Grant date	Feb 25, 2020

Abstract

A chemical vapor deposition or atomic layer deposition system includes a gas concentration sensor for determining the quantity of precursor gases admitted thereto. The gas concentration sensor can include a transmitter and a receiver for transmitting an acoustic signal across a chamber. In embodiments, the transmitter and receiver are designed to increase transmitted signal while reducing transmitted noise, facilitating use of the gas concentration sensor at low pressure and high temperature.

First claim

What is claimed is:

1. An apparatus for determining gas concentration comprising:
an acoustic cell defining a chamber;
a transmitter comprising:
a first transducer configured to transmit an acoustic signal;
a first dampener arranged between the acoustic cell and the first transducer; and
a first transformer arranged between the chamber and the first transducer, the first transformer coupled to the first transducer with a metallic material, wherein the metallic material is configured to inhibit separation of the first transducer from the first transformer when subjected to temperatures greater than 150° C. the metallic material having a coefficient of thermal expansion between a coefficient of thermal expansion of the first transformer and a coefficient of thermal expansion of the first transducer; and

a receiver comprising:
a second transducer configured to receive the acoustic signal;
a second dampener arranged between the acoustic cell and the second transducer; and
a second transformer arranged between the chamber and the second transducer, the second transformer coupled to the second transducer with the metallic material, wherein the metallic material is configured to inhibit separation of the second transducer from the second transformer when subjected to temperatures greater than 100° C., the metallic material having a coefficient of thermal expansion between a coefficient of thermal expansion of the second transformer and a coefficient of thermal expansion of the second transducer.

2. The apparatus of claim 1 , wherein the metallic material is a solder.

3. The apparatus of claim 1 , wherein the first transducer includes a piezoelectric element.

4. The apparatus of claim 3 , wherein the first transducer includes a stack of piezoelectric elements, and wherein the stack of piezoelectric elements are coupled to one another by the metallic material.

5. The apparatus of claim 4 , wherein the second transducer comprises a second stack of piezoelectric elements, and wherein the second stack of piezoelectric elements are coupled to one another by the metallic material.

6. The apparatus of claim 1 , wherein a precursor gas inlet is configured to route a precursor gas through the apparatus during operation of a chemical vapor deposition or atomic layer deposition system.

7. The apparatus of claim 1 , wherein the apparatus is configured to operate at pressures of less than 100 Torr.

8. The apparatus of claim 7 , wherein the apparatus is configured to operate at pressures of less than 20 Torr.

9. The apparatus of claim 1 , wherein the metallic material has a thickness of between about 25-50 μm.

10. The apparatus of claim 1 , wherein the coefficient of thermal expansion of the metallic material is about 2.2×10-5/deg-C.

Assignees

• Veeco Instr Inc

Inventors

• Cheng Chi-Jung
• Chin Leo
• Morath Christopher J
• Sinharoy Arindam
• Logue Raymond C

Classifications

• G01N2291/0212

  Binary gases · CPC title

• G01N2291/011

  Velocity or travel time · CPC title

• G01N29/024 Primary

  by measuring propagation velocity or propagation time of acoustic waves · CPC title

• G01N29/2437

  Piezoelectric probes · CPC title

• G01N2291/021

  Gases · CPC title