Measurement device and measurement method

Patent metadata

Field	Value
Publication number	US-10564265-B2
Application number	US-201715713841-A
Country	US
Kind code	B2
Filing date	Sep 25, 2017
Priority date	Sep 30, 2016
Publication date	Feb 18, 2020
Grant date	Feb 18, 2020

Abstract

A measurement device and measurement method are provided which are capable of measuring the inclination of a measurement target object surface both with a simple configuration and at high speed. The measurement device includes: a rangefinding light emitting section; a rangefinding unit configured to receive reflected rangefinding light; an optical axis deflection section provided on an optical path common to rangefinding light and reflected rangefinding light, and configured to deflect optical axes thereof; a motor configured to cause the optical axis deflection section to rotate; an emission direction detection unit configured to detect a deflection angle and deflection direction resulting from the optical axis deflection section; and a computation controller that measures the inclination of a measurement target object surface with respect to the emission optical axis on the basis of acquired coordinate data on the measurement target object surface.

First claim

What is claimed is:

1. A measurement device comprising:
a rangefinding light emitting section configured to emit rangefinding light;
a rangefinding unit configured to receive reflected rangefinding light reflected from a measurement target object and perform rangefinding;
an optical axis deflection section provided on an optical path common to the rangefinding light and the reflected rangefinding light, and configured to deflect optical axes of the rangefinding light and the reflected rangefinding light at the same deflection angle and the same direction as each other;
a motor configured to cause the optical axis deflection section to rotate about an emission optical axis of the rangefinding light;
an emission direction detection unit configured to detect a deflection angle and deflection direction resulting from the optical axis deflection section; and
a computation controller; wherein
a measurement target object surface is scanned in a circular shape with the rangefinding light by rotation of the optical axis deflection section; and
the computation controller measures an inclination of the measurement target object surface with respect to the emission optical axis on the basis of acquired coordinate data on the measurement target object surface.

2. The measurement device according to claim 1 , wherein:
the optical axis deflection section includes
a wedge prism, and
a deflection angle adjustment motor configured to cause the wedge prism to tilt about an axis orthogonal to the emission optical axis; and
a deflection angle of the rangefinding light can be varied by the deflection angle adjustment motor being driven.

3. The measurement device according to claim 2 , further comprising:
an orientation detection device capable of detecting an inclination angle and inclination direction with respect to the horizontal or the vertical; wherein
an inclination of the measurement target object surface with respect to the horizontal or the vertical is measured on the basis of the coordinate data and an orientation detection result.

4. The measurement device according to claim 3 , wherein the computation controller:
rotates the motor at a predetermined speed;
computes a difference between a target rotation angle and an actual rotation angle of the motor at intervals of a predetermined duration;
corrects the target rotation speed of the motor on the basis of the difference; and
controls the motor on the basis of the target rotation speed that is corrected and an actual rotation speed.

5. The measurement device according to claim 4 , further comprising an imaging section having an imaging optical axis parallel to and at a known distance from the emission optical axis.

6. The measurement device according to claim 1 , wherein:
the optical axis deflection section includes a pair of optical prisms each having a circular shape, the pair of optical prisms being independently rotatable and superimposed on each other; and
each of the pair of optical prisms includes
a rangefinding light axis deflection section formed at a central portion of each of the pair of optical prisms and configured to deflect the rangefinding light at a required deflection angle and in a required direction, and
a reflected rangefinding light axis deflection section formed at an outer circumferential portion of each of the pair of optical prisms and configured to deflect the reflected rangefinding light at a deflection angle and in a direction identical to those of the rangefinding light axis deflection section; and

the computation controller rotates the pair of optical prisms together as one at a constant speed.

7. The measurement device according to claim 6 , further comprising:
an orientation detection device capable of detecting an inclination angle and inclination direction with respect to the horizontal or the vertical; wherein
an inclination of the measurement target object surface with respect to the horizontal or the vertical is measured on the basis of the coordinate data and an orientation detection result.

8. The measurement device according to claim 7 , wherein the computation controller:
rotates the motor at a predetermined speed;
computes a difference between a target rotation angle and an actual rotation angle of the motor at intervals of a predetermined duration;
corrects the target rotation speed of the motor on the basis of the difference; and
controls the motor on the basis of the target rotation speed that is corrected and an actual rotation speed.

9. The measurement device according to claim 8 , further comprising an imaging section having an imaging optical axis parallel to and at a known distance from the emission optical axis.

10. The measurement device according to claim 1 , further comprising:
an orientation detection device capable of detecting an inclination angle and inclination direction with respect to the horizontal or the vertical; wherein
an inclination of the measurement target object surface with respect to the horizontal or the vertical is measured on the basis of the coordinate data and an orientation detection result.

11. The measurement device according to claim 10 , wherein the computation controller:
rotates the motor at a predetermined speed;
computes a difference between a target rotation angle and an actual rotation angle of the motor at intervals of a predetermined duration;
corrects the target rotation speed of the motor on the basis of the difference; and
controls the motor on the basis of the target rotation speed that is corrected and an actual rotation speed.

12. The measurement device according to claim 11 , further comprising an imaging section having an imaging optical axis parallel to and at a known distance from the emission optical axis.

13. A measurement method comprising the steps of:
emitting rangefinding light and receiving reflected rangefinding light reflected from a measurement target object surface;
deflecting the rangefinding light and the reflected rangefinding light by an optical axis deflection section;
rotating the optical axis deflection section about an emission optical axis of the rangefinding light to scan the measurement target object surface in a circular shape with the rangefinding light; and
finding a sine curve on the basis of acquired coordinate data on the measurement target object surface, and measuring an inclination of the measurement target object surface with respect to the emission optical axis on the basis of an amplitude and phase of the sine curve.

14. The measurement method of claim 13 , further comprising:
performing Fourier transformation on the sine curve; and
measuring the inclination of the measurement target object surface with respect to the emission optical axis on the basis of an amplitude and phase of a frequency component obtained from the Fourier transformation matching a rotation speed of the optical axis deflection section.

Assignees

• Topcon Corp

Inventors

• Inoue Takahiro
• Yanobe Satoshi
• Matsumoto Hideyuki
• Ohtomo Fumio

Classifications

• G01C1/04

  combined with cameras · CPC title

• G01B21/04

  by measuring coordinates of points · CPC title

• G01B21/22

  for measuring angles or tapers; for testing the alignment of axes · CPC title

• G01S17/89

  for mapping or imaging · CPC title

• G01C3/08

  Use of electric radiation detectors · CPC title