Method for producing a first electrode/active layer/second electrode stack

Patent metadata

Field	Value
Publication number	US-10559771-B2
Application number	US-201615736266-A
Country	US
Kind code	B2
Filing date	Jun 16, 2016
Priority date	Jun 16, 2015
Publication date	Feb 11, 2020
Grant date	Feb 11, 2020

Abstract

A process for producing a stack of a first electrode/active layer/second electrode, which stack is intended for an electronic device, in particular an organic photodetector or an organic solar cell, the process comprises the following steps: (a) depositing a first conductor layer on the front side of a substrate, in order to form the first electrode; and (b) depositing an active layer taking the form of a thin organic semiconductor layer, this layer including discontinuous zones; wherein this process further comprises the following steps: (d) depositing a resist layer on that side of the stack which is opposite the substrate, which is at least partially transparent; (e) exposing the resist layer via the back side of the substrate; (f) developing the resist layer; and (g) depositing a second conductor layer in order to form the conductive second electrode.

First claim

The invention claimed is:

1. A process for producing a stack of a first electrode/active layer/second electrode, wherein the stack is intended for an electronic device, in particular an organic photodetector or an organic solar cell, said process comprising following steps:
(a) depositing a first conductor layer on a front side of a substrate, in order to form the first electrode; and
(b) depositing an active layer taking a form of a thin organic semiconductor layer, the thin organic semiconductor layer comprising discontinuous zones; wherein the depositing active layer (b) further includes following steps, (d), (e), (f) and (g) wherein:
(d) depositing a resist layer of positive resist on a side of the stack which is opposite to the substrate, wherein the substrate is at least partially transparent;
(e) exposing the resist layer via a back side of said substrate;
(f) developing the resist layer; and
(g) depositing a second conductor layer in order to form the conductive second electrode wherein the discontinuous zones are defects that pass through the active layer.

2. The process as claimed in claim 1 , step (f) leading to formation of holes in the resist layer level with the discontinuous zones, and step (g) being carried out between steps (b) and (d), a step (h) of etching the conductive second electrode being carried out after step (f).

3. The process as claimed in claim 2 , comprising an additional step (i) of removing the resist after the etching step (h).

4. The process as claimed in claim 2 , comprising an additional step of depositing a passivating layer on the conductive second electrode, before step (d) of depositing the resist layer.

5. The process as claimed in claim 1 , step (f) leading to formation of holes in the resist layer level with the discontinuous zones, the process including two additional steps between steps (f) and (g), a step (j) of depositing a passivating layer on the resist layer and a step (k) of removing the resist.

6. The process as claimed in claim 5 , wherein before step (j), a step ( 1 ) of etching the active layer through the holes formed in the resist is provided.

7. The process as claimed in claim 5 , wherein a buffer layer is deposited on the active layer between steps (b) and (d), a step of etching the buffer layer then being provided between steps (k) and (g).

8. The process as claimed in claim 1 , wherein a step (c) of removing the conductive first layer locally via chemical attack, through the discontinuous zones of the active layer, is carried out after step (b).

Assignees

• Commissariat Energie Atomique
• Isorg
• Trixell

Inventors

• Verilhac Jean-Marie
• Charlot Simon

Classifications

• H01L31/022466

  Electricity · mapped topic

• H01L51/56

  Electricity · mapped topic

• H01L51/5206

  Electricity · mapped topic

• H01L51/5012

  Electricity · mapped topic

• H01L2251/568

  Electricity · mapped topic