Heterogeneous nanostructures for hierarchal assembly

Patent metadata

Field	Value
Publication number	US-10559755-B2
Application number	US-201916266580-A
Country	US
Kind code	B2
Filing date	Feb 4, 2019
Priority date	Apr 7, 2016
Publication date	Feb 11, 2020
Grant date	Feb 11, 2020

Abstract

A method of making a carbon nanotube structure includes depositing a first oxide layer on a substrate and a second oxide layer on the first oxide layer; etching a trench through the second oxide layer; removing end portions of the first oxide layer and portions of the substrate beneath the end portions to form cavities in the substrate; depositing a metal in the cavities to form first body metal pads; disposing a carbon nanotube on the first body metal pads and the first oxide layer such that ends of the carbon nanotube contact each of the first body metal layers; depositing a metal to form second body metal pads on the first body metal pads at the ends of the carbon nanotube; and etching to release the carbon nanotube, first body metal pads, and second body metal pads from the substrate, first oxide layer, and second oxide layer.

First claim

What is claimed is:

1. A carbon nanotube nanostructure, comprising:
a first carbon nanotube structure, comprising:
a carbon nanotube having a first end and a second end;
a first body metal pad arranged on the first end, the first body metal pad having face metal layers arranged on two opposing surfaces of the first body metal pad; and
a second body metal pad arranged on the second end, the second body metal pad having face metal layers arranged on two opposing surfaces of the second body metal pad; and

a second carbon nanotube structure, comprising:
a carbon nanotube having a first end and a second end;
a first body metal pad arranged on the first end, the first body metal pad having face metal layers arranged on two opposing surfaces of the first body metal pad; and
a second body metal pad arranged on the second end, the second body metal pad having face metal layers arranged on two opposing surfaces of the second body metal pad;

wherein a sidewall of the first body metal pad of the first carbon nanotube structure is functionalized with a chemical compound that bonds to the second carbon nanotube structure, and the first carbon nanotube structure and the second nanotube structure are arranged end-to-end.

2. The carbon nanotube nanostructure of claim 1 , wherein the face metal layers of the first carbon nanotube structure are functionalized with a chemical compound.

3. The carbon nanotube nanostructure of claim 1 , wherein the face metal layers of the second carbon nanotube structure are functionalized with a chemical compound.

4. The carbon nanotube nanostructure of claim 2 , wherein the chemical compound comprises a thiol functional group.

5. The carbon nanotube nanostructure of claim 4 , wherein the first body metal pad and the second body metal pad of the first carbon nanotube structure comprise gold.

6. The carbon nanotube nanostructure of claim 3 , wherein the chemical compound comprises a thiol functional group.

7. The carbon nanotube nanostructure of claim 6 , wherein the first body metal pad and the second body metal pad of the second carbon nanotube structure comprise gold.

8. The carbon nanotube nanostructure of claim 1 , further comprising a third carbon nanotube structure arranged over and in contact with the first carbon nanotube structure.

9. The carbon nanotube nanostructure of claim 8 , wherein the face metal layers of the first carbon nanotube structure are functionalized with a chemical compound that bonds with face metal layers of the third carbon nanotube structure.

10. The carbon nanotube nanostructure of claim 1 , wherein the carbon nanotubes of the first carbon nanotube structure and the second carbon nanotube structure comprise a semiconducting material.

11. The carbon nanotube nanostructure of claim 1 , wherein the carbon nanotubes of the first carbon nanotube structure and the second carbon nanotube structure comprise a metallic material.

12. The carbon nanotube nanostructure of claim 1 , wherein the first body metal pad and the second body metal pad of the first carbon nanotube structure are aluminum, platinum, gold, tungsten, titanium, or a combination thereof.

13. The carbon nanotube nanostructure of claim 1 , wherein the first body metal pad and the second body metal pad of the second carbon nanotube structure are aluminum, platinum, gold, tungsten, titanium, or a combination thereof.

14. The carbon nanotube nanostructure of claim 1 , wherein the first body metal pad and the second body metal pad of the first carbon nanotube structure comprise titanium.

15. The carbon nanotube nanostructure of claim 1 , wherein the first body metal pad and the second body metal pad of the second carbon nanotube structure comprise titanium.

16. The carbon nanotube nanostructure of claim 1 , wherein the face metal layers arranged on two opposing surfaces of the first body metal pad comprise the same material.

17. The carbon nanotube nanostructure of claim 1 , wherein the face metal layers arranged on two opposing surfaces of the first body metal pad comprise the different material.

18. The carbon nanotube nanostructure of claim 1 , wherein the face metal layers arranged on two opposing surfaces of the second body metal pad comprise the same material.

19. The carbon nanotube nanostructure of claim 1 , wherein the face metal layers arranged on two opposing surfaces of the second body metal pad comprise the different material.

20. The carbon nanotube nanostructure of claim 1 , wherein the chemical compound is a positively charged group, a negatively charged group, or a neutral group.

Assignees

• IBM

Inventors

• Frank Martin M
• Han Shu-Jen
• Tulevski George S

Classifications

• Y10S977/938

  Field effect transistors, FETS, with nanowire- or nanotube-channel region · CPC title

• H01L51/0048

  Electricity · mapped topic

• H01L2251/303

  Electricity · mapped topic

• H01L51/0049 Primary

  Electricity · mapped topic

• H01L51/0575

  Electricity · mapped topic