Electronic devices having bilayer capping layers and/or barrier layers

Patent metadata

Field	Value
Publication number	US-10558284-B2
Application number	US-201916512574-A
Country	US
Kind code	B2
Filing date	Jul 16, 2019
Priority date	Jan 19, 2017
Publication date	Feb 11, 2020
Grant date	Feb 11, 2020

Abstract

In various embodiments, electronic devices such as thin-film transistors and/or touch-panel displays incorporate bilayer capping layers and/or barrier layers.

First claim

What is claimed is:

1. A touch-panel display comprising:
a substrate; and
an interconnect disposed over the substrate,
wherein the interconnect comprises:
(a) a bilayer barrier layer comprising a base layer and a dielectric layer disposed thereover, wherein (i) the base layer comprises an alloy of Cu and/or Mo with 0.5 weight %-50 weight % of one or more anodizable alloying elements selected from the list consisting of Ta, Nb, Al, Hf, Zr, Ti, and Mg, and (ii) the dielectric layer comprises an oxide, nitride, or oxynitride of the one or more anodizable alloying elements, and
(b) disposed over the bilayer barrier layer, a conductor layer comprising at least one of Cu, Ag, Al, or Au.

2. The touch-panel display of claim 1 , further comprising:
a plurality of conductive touch-panel row sensors (i) arranged in lines extending along a first direction and (ii) disposed over the substrate; and
a plurality of conductive touch-panel column sensors (i) arranged in lines extending along a second direction and intersecting the lines of the row sensors and (ii) disposed over the substrate,
wherein the interconnect (i) is disposed at a point of intersection between a line of row sensors and a line of column sensors, and (ii) electrically connects two column sensors or two row sensors.

3. The touch-panel display of claim 2 , wherein the interconnect extends over or under a row sensor and electrically connects two column sensors, and further comprising an insulating layer disposed between the interconnect and the row sensor and electrically insulating the interconnect and the row sensor.

4. The touch-panel display of claim 2 , wherein the interconnect extends over or under a column sensor and electrically connects two row sensors, and further comprising an insulating layer disposed between the interconnect and the column sensor and electrically insulating the interconnect and the column sensor.

5. The touch-panel display of claim 2 , wherein the row sensors and column sensors comprise a substantially transparent conductive material.

6. The touch-panel display of claim 5 , wherein the row sensors and column sensors comprise indium tin oxide.

7. The touch-panel display of claim 1 , wherein the substrate comprises an insulating material.

8. The touch-panel display of claim 1 , wherein the substrate comprises glass.

9. The touch-panel display of claim 1 , wherein the base layer comprises an alloy of (i) Mo and Nb, (ii) Mo, Ta, and Nb, (iii) Mo, Nb, and Ti, (iv) Mo and Ti, or (v) Mo, Nb, and Zr.

10. The touch-panel display of claim 1 , wherein the base layer comprises an alloy of Cu, Ta, and Zr.

11. The touch-panel display of claim 1 , wherein the dielectric layer is substantially free of Cu and/or Mo.

12. The touch-panel display of claim 1 , wherein the base layer comprises:
an interfacial portion disposed beneath and in contact with the dielectric layer; and
a bottom portion disposed beneath the interfacial portion.

13. The touch-panel display of claim 12 , wherein a concentration of at least one of the one or more anodizable alloying elements within the interfacial portion is less than a concentration of at least one of the one or more anodizable alloying elements within the bottom portion.

14. The touch-panel display of claim 12 , wherein the interfacial portion is substantially free of at least one of the one or more anodizable alloying elements.

15. The touch-panel display of claim 12 , wherein the interfacial portion is substantially free of all of said one or more anodizable alloying elements.

16. The touch-panel display of claim 1 , wherein the base layer comprises an alloy of Mo with 0.5 weight %-50 weight % of one or more anodizable alloying elements selected from the list consisting of Ta, Nb, Al, Hf, Zr, Ti, and Mg.

17. The touch-panel display of claim 1 , wherein the base layer comprises an alloy of Cu with 0.5 weight %-50 weight % of one or more anodizable alloying elements selected from the list consisting of Ta, Nb, Al, Hf, Zr, Ti, and Mg.

18. The touch-panel display of claim 1 , wherein the base layer comprises an alloy of Cu and Mo with 0.5 weight %-50 weight % of one or more anodizable alloying elements selected from the list consisting of Ta, Nb, Al, Hf, Zr, Ti, and Mg.

Assignees

• Starck H C Inc

Inventors

• Jalili Helia
• Dary Francois
• Cox Barbara

Classifications

• H10W20/425

  Barrier, adhesion or liner layers · CPC title

• H10W20/032

  of conductive barrier, adhesion or liner layers · CPC title

• G02F1/13338

  Input devices, e.g. touch panels · CPC title

• G02F1/136286

  Wiring, e.g. gate line, drain line · CPC title

• G06F3/041 Primary

  Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means · CPC title