Resist underlayer film-forming composition containing copolymer resin having heterocyclic ring
US-2015011092-A1 · Jan 8, 2015 · US
US10556986B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10556986-B2 |
| Application number | US-201615268706-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 19, 2016 |
| Priority date | Oct 23, 2015 |
| Publication date | Feb 11, 2020 |
| Grant date | Feb 11, 2020 |
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The Chemical Formula 1 is the same as defined in the detailed description.
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What is claimed is: 1. A polymer comprising a structural unit represented by Chemical Formula 1: wherein, in Chemical Formula 1, A 1 and A 2 are independently a substituted or unsubstituted aromatic ring group, or a substituted or unsubstituted heteroaromatic ring group, B is a divalent organic group, X is O, S, Te, Se, or NR a , wherein R a is hydrogen, a substituted or unsubstituted C1 to C30 alkyl group, a substituted or unsubstituted C3 to C30 cycloalkyl group, a substituted or unsubstituted C6 to C30 aryl group, a substituted or unsubstituted C7 to C30 arylalkyl group, a substituted or unsubstituted C1 to C30 heteroalkyl group, a substituted or unsubstituted C2 to C30 heterocycloalkyl group, a substituted or unsubstituted C2 to C30 heterocyclic group, a substituted or unsubstituted C2 to C30 alkenyl group, a substituted or unsubstituted C2 to C30 alkynyl group, a hydroxy group, a halogen atom, a halogen-containing group, or a combination thereof, Y is a substituted or unsubstituted C6 to C30 aryl group, or a substituted or unsubstituted C3 to C30 heteroaryl group, and * is a linking point. 2. The polymer as claimed in claim 1 , wherein Y is a substituted or unsubstituted monovalent group derived from compounds of Group 1: wherein, in Group 1, a linking point of each compound to Chemical Formula 1 is not limited. 3. The polymer as claimed in claim 1 , wherein the A 1 and A 2 are a group having a structure that the A 1 and A 2 are independently a single ring or about 2 to 4 fused rings. 4. The polymer as claimed in claim 1 , wherein A 1 and A 2 are independently a substituted or unsubstituted trivalent group derived from one of compounds of Group 2: wherein, in Group 2, Z 20 to Z 22 are independently nitrogen (N), CR b , or a combination thereof, wherein R b is hydrogen, a substituted or unsubstituted C1 to C10 alkyl group, a halogen atom, a halogen-containing group, or a combination thereof, Z 23 and Z 24 are independently C═O, O, S, CR c R d , NR e , or a combination thereof, wherein R c to R e are independently hydrogen, a substituted or unsubstituted C1 to C10 alkyl group, a halogen atom, a halogen-containing group, or a combination thereof, and a linking point of each compound to Chemical Formula 1 is not limited. 5. The polymer as claimed in claim 1 , wherein B is represented by Chemical Formula 2: wherein, in Chemical Formula 2, a and b are independently an integer of 0 to 2, and L is a substituted or unsubstituted divalent group derived from one of Group 3: wherein, in Group 3, M is a substituted or unsubstituted C1 to C5 alkylene group, O, S, SO 2 , or C═O. 6. The polymer as claimed in claim 1 , wherein the polymer has a weight average molecular weight of about 1,000 to about 20,000. 7. The polymer as claimed in claim 1 , wherein X is O, S, Te, or Se. 8. The polymer as claimed in claim 1 , wherein the polymer comprising a structural unit represented by Chemical Formula 1 includes a structural unit represented by one of the following Chemical Formulae 1a to 1e: 9. An organic layer composition, comprising: a polymer including a structural unit represented by Chemical Formula 1, and a solvent, wherein, in Chemical Formula 1, A 1 and A 2 are independently a substituted or unsubstituted aromatic ring group, or a substituted or unsubstituted heteroaromatic ring group, B is a divalent organic group, X is O, S, Te, Se, or NR a , wherein R a is hydrogen, a substituted or unsubstituted C1 to C30 alkyl group, a substituted or unsubstituted C3 to C30 cycloalkyl group, a substituted or unsubstituted C6 to C30 aryl group, a substituted or unsubstituted C7 to C30 arylalkyl group, a substituted or unsubstituted C1 to C30 heteroalkyl group, a substituted or unsubstituted C2 to C30 heterocycloalkyl group, a substituted or unsubstituted C2 to C30 heterocyclic group, a substituted or unsubstituted C2 to C30 alkenyl group, a substituted or unsubstituted C2 to C30 alkynyl group, a hydroxy group, a halogen atom, a halogen-containing group, or a combination thereof, Y is a substituted or unsubstituted C6 to C30 aryl group, or a substituted or unsubstituted C3 to C30 heteroaryl group, and * is a linking point. 10. The organic layer composition as claimed in claim 9 , wherein Y is a substituted or unsubstituted monovalent group derived from compounds of Group 1 wherein, in Group 1, a linking point of each compound to Chemical Formula 1 is not limited. 11. The organic layer composition as claimed in claim 9 , wherein the A 1 and A 2 are a group having a structure that the A 1 and A 2 are independently a single ring or about 2 to 4 fused rings. 12. The organic layer composition as claimed in claim 9 , wherein A 1 and A 2 are independently a substituted or unsubstituted trivalent group derived from one of compounds of Group 2: wherein, in Group 2, Z 20 to Z 22 are independently nitrogen (N), CR b , or a combination thereof, wherein R b is hydrogen, a substituted or unsubstituted C1 to C10 alkyl group, a halogen atom, a halogen-containing group, or a combination thereof, Z 23 and Z 24 are independently C═O, O, S, CR c R d , NR e , or a combination thereof, wherein R c to R e are independently hydrogen, a substituted or unsubstituted C1 to C10 alkyl group, a halogen atom, a halogen-containing group, or a combination thereof, and a linking point of each compound to Chemical Formula 1 is not limited. 13. The organic layer composition as claimed in claim 9 , wherein B is represented by Chemical Formula 2: wherein, in Chemical Formula 2, a and b are independently an integer of 0 to 2, and L is a substituted or unsubstituted divalent group derived from one of Group 3: wherein, in Group 3, M is a substituted or
containing heteroatoms · CPC title
derived from five- or six-membered heterocyclic compounds, other than imides · CPC title
with mixtures of two or more phenols which are not covered by only one of the groups C08G8/10 - C08G8/20 · CPC title
Copolymers · CPC title
with heterocyclic compounds · CPC title
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