Electrostatic chuck device
US-2017287764-A1 · Oct 5, 2017 · US
US10554154B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10554154-B2 |
| Application number | US-201916513593-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 16, 2019 |
| Priority date | Oct 9, 2014 |
| Publication date | Feb 4, 2020 |
| Grant date | Feb 4, 2020 |
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An electrostatic clutch is described comprising a plurality of micron-scale thickness electrodes, adjacent electrodes being separated by a thin film of dielectric material. A power source and controller apply a voltage across two electrodes, causing an electrostatic force to develop. When engaged, a force can be transferred through the clutch. A tensioning device maintains the alignment of the clutch when the electrodes are disengaged, but permits movement in at least one direction. In some embodiments, multiple clutches are connected to an output to provide variable force control and a broad range of torque input and output values. Moreover, the clutch can be used as an energy-recycling actuator that captures mechanical energy from negative work movements, and returns energy during positive work movements.
Opening claim text (preview).
What is claimed is: 1. An electrostatic clutch for use in an energy-recycling actuator, the clutch comprising: a first electrode comprising a conductive film, wherein the first electrode is associated with a housing; a second electrode comprising a conductive film, wherein the second electrode is associated with an object not connected to the housing; a third electrode comprising a conductive film, wherein the third electrode is positioned between the first electrode and the second electrode, wherein the third electrode is connected to an energy storing device connected to the housing; a dielectric material separating the third electrode from the first electrode and the second electrode; and a power source for applying an electric field across at least two of the first electrode, the second electrode, and the third electrode to develop an electrostatic charge. 2. The electrostatic clutch of claim 1 , wherein the electric field is applied across the first electrode and the third electrode to develop an attractive state between the first electrode and the third electrode, storing energy in the energy storing device. 3. The electrostatic clutch of claim 1 , wherein the electric field is applied across the second electrode and the third electrode to develop an attractive state between the second electrode and the third electrode, transferring energy from the energy storing device to the object. 4. The electrostatic clutch of claim 1 , wherein the dielectric material is comprised of a polymer composite containing barium titanate and titanium dioxide. 5. The electrostatic clutch of claim 1 , wherein at least one of the first electrode, the second electrode, and the third electrode comprise a flexible substrate coated with a conductive layer. 6. The electrostatic clutch of claim 5 , wherein the substrate is a polymer. 7. The electrostatic clutch of claim 5 : wherein the substrate is bi-axially oriented polyethylene terephthalate, wherein the conductive layer is sputter-deposited aluminum. 8. The electrostatic clutch of claim 1 , wherein the energy storing device is a spring. 9. The electrostatic clutch of claim 1 , wherein each of the first electrode, the second electrode, and the third electrode are parallel. 10. The electrostatic clutch of claim 1 , wherein the dielectric material is disposed on a front surface and a back surface of the third electrode. 11. The electrostatic clutch of claim 1 , wherein the dielectric material is disposed on a surface of the first electrode and a surface of the second electrode.
Electrically-actuated clutches (arrangements for synchronisation F16D23/02; clutches actuated directly by means of an electromagnet F16D27/00; automatic clutches F16D43/00 - F16D45/00; external control F16D48/00) · CPC title
Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect · CPC title
Magnetically- {or electrically-} actuated clutches; Control or electric circuits therefor (clutches with magnetisable particles F16D37/02; {with electro-rheological fluids F16D37/008}) · CPC title
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