Displacement devices and methods for fabrication, use and control of same

Patent metadata

Field	Value
Publication number	US-10554110-B2
Application number	US-201815920309-A
Country	US
Kind code	B2
Filing date	Mar 13, 2018
Priority date	Oct 27, 2011
Publication date	Feb 4, 2020
Grant date	Feb 4, 2020

Abstract

Displacement devices comprise a stator and a moveable stage. The stator comprises a plurality of coils shaped to provide pluralities of generally linearly elongated coil traces in one or more layers. Layers of coils may overlap in the Z-direction. The moveable stage comprises a plurality of magnet arrays. Each magnet array may comprise a plurality of magnetization segments generally linearly elongated in a corresponding direction. Each magnetization segment has a magnetization direction generally orthogonal to the direction in which it is elongated and at least two of the magnetization directions are different from one another. One or more amplifiers may be connected to selectively drive current in the coil traces and to thereby effect relative movement between the stator and the moveable stage.

First claim

What is claimed is:

1. A method for effecting displacement between first and second moveable stages on a stator, the method comprising:
providing a stator comprising a plurality of elongated coils shaped to provide a working region wherein traces of the coils are generally linearly oriented, the plurality of elongated coils comprising:
a first plurality of coil traces distributed over a first layer at a corresponding first stator Z-location, the first plurality of coil traces generally linearly elongated in a stator X-direction in the first layer; and
a second plurality of coil traces distributed over a second layer at a corresponding second stator Z-location, the second plurality of coil traces generally linearly elongated in a stator Y-direction in the second layer, the stator Y-direction generally orthogonal to the stator X-direction;
the first and second layers overlapping one another in a stator Z-direction in the working region, the stator Z-direction generally orthogonal to both the stator X-direction and the stator Y-direction; and

providing a first moveable stage comprising:
a first first magnet array comprising a plurality of first first magnetization segments generally linearly elongated in a stage X-direction, each first first magnetization segment having a magnetization direction generally orthogonal to the stage X-direction and at least two of the first first magnetization segments having magnetization directions that are different from one another; and
a first second magnet array comprising a plurality of first second magnetization segments generally linearly elongated in a stage Y-direction generally orthogonal to the stage X-direction, each first second magnetization segment having a magnetization direction generally orthogonal to the stage Y-direction and at least two of the first second magnetization segments having magnetization directions that are different from one another;

providing a second moveable stage comprising:
a second first magnet array comprising a plurality of second first magnetization segments generally linearly elongated in the stage X-direction, each second first magnetization segment having a magnetization direction generally orthogonal to the stage X-direction and at least two of the second first magnetization segments having magnetization directions that are different from one another; and
a second second magnet array comprising a plurality of second second magnetization segments generally linearly elongated in the stage Y-direction generally orthogonal to the stage X-direction, each second second magnetization segment having a magnetization direction generally orthogonal to the stage Y-direction and at least two of the second second magnetization segments having magnetization directions that are different from one another;

causing the first moveable stage to move past the second moveable stage in the stator X-direction, wherein causing the first moveable stage to move past the second moveable stage in the stator X-direction comprises:
imparting momentum on the first moveable stage in the stator-X direction by selectively driving current in at least one driver coil trace of the second plurality of coil traces to thereby effect movement of the first moveable stage in the stator X-direction relative to the second moveable stage;
overlapping a first portion of the first moveable stage with a first portion of the second moveable stage in the stator Y-direction;
after imparting momentum on the first moveable stage in the stator-X direction, using the momentum of the first moveable stage to cause the first moveable stage to move in the stator X-direction at least until a second portion of the first moveable stage is non-overlapping with a second portion of the second movable stage in the stator Y-direction by selectively reducing current in at least one shared coil trace of the second plurality of coil traces, the at least one shared coil trace comprising a coil trace that overlaps at least one first second magnetization segment and at least one second second magnetization segment in the stator Z-direction;
after the second portion of the first moveable stage is non-overlapping with the second portion of the second movable stage in the stator Y-direction, controlling the first moveable stage in the stator X-direction by selectively driving current in at least one non-shared coil trace of the second plurality of coil traces, the at least one non-shared coil trace overlapping only one or more first second magnetization segments of the first moveable stage from among the first second and second second magnetization segments.

2. The method according to claim 1 wherein selectively reducing current in the at least one shared coil trace of the second plurality of coil traces comprises turning off the at least one shared coil trace of the second plurality of coil traces.

3. The method according to claim 1 wherein the at least one driver coil trace of the second plurality of coil traces is on a first stator X-direction side of each second second magnetization segment.

4. The method according to claim 1 wherein the at least one non-shared coil trace is on a second stator X-direction side, opposite a first stator X-direction side, of each second second magnetization segment.

5. The method according to claim 1 comprising controlling the first moveable stage in the stator Y-direction while causing the first moveable stage to move past the second moveable stage in the stator X-direction.

6. The method according to claim 5 wherein controlling the first moveable stage in the stator Y-direction comprises selectively driving current in the first plurality of coil traces to cause relative movement between the second moveable stage and the stator.

7. The method according to claim 1 wherein selectively reducing current in the at least one shared coil trace of the second plurality of coil traces comprises reducing current in each of the shared coil traces of the second plurality of coil traces.

8. The method according to claim 1 wherein overlapping the at least a first portion of the first moveable stage with the first portion of the second moveable stage in the stator Y-direction comprises driving current in at least one coil trace of the second plurality of coil traces to thereby effect movement of the first moveable stage in the stator X-direction relative to the second moveable stage until the at least a first portion of the first moveable stage overlaps with the first portion of the second moveable stage in the stator Y-direction.

9. The method according to claim 1 wherein overlapping the at least a first portion of the first moveable stage with the first portion of the second moveable stage in the stator Y-direction comprises using the momentum of the first moveable stage to cause the first moveable stage to move in the stator X-direction until the at least a first portion of the first moveable stage overlaps with the first portion of the second moveable stage in the stator Y-direction.

10. The method according to claim 1 wherein selectively reducing the current in the at least one shared coil trace of the second plurality of coil traces comprises selectively reducing the current in the at least one shared coil trace of the second plurality of coil traces when more than half of a stage X-direction dimension of the first moveable stage overlaps the second moveable stage in the stator Y-direction.

11. The method according to claim 1 wherein the at least a first portion of the first moveable stage comprises at least one first second magnetization segment.

12. The method according to claim 1 wherein the at least a second portion of the first moveab

Assignees

• Univ British Columbia

Inventors

• Lu Xiaodong
• Usman Irfan-Ur-Rab

Classifications

• H10P72/00

  Handling or holding of wafers, substrates or devices during manufacture or treatment thereof · CPC title

• H02K3/28

  Layout of windings or of connections between windings (windings for pole-changing H02K17/06, H02K17/14, H02K19/12, H02K19/32) · CPC title

• H02K41/031 Primary

  of the permanent magnet type · CPC title

• H02K7/09

  with magnetic bearings · CPC title

• H02K41/02 Primary

  Linear motors; Sectional motors · CPC title