Film-forming material for semiconductor, member-forming material for semiconductor, process member-forming material for semiconductor, underlayer film-forming material, underlayer film, and semiconductor device
US-2024352203-A1 · Oct 24, 2024 · US
US10551740B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10551740-B2 |
| Application number | US-201815869727-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 12, 2018 |
| Priority date | Jan 16, 2017 |
| Publication date | Feb 4, 2020 |
| Grant date | Feb 4, 2020 |
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Provided is an antireflective-film attached transparent substrate, which contains a transparent substrate having two principal surfaces and an antireflective film formed on one of the principal surfaces of the transparent substrate, in which the antireflective-film attached transparent substrate has a luminous transmittance being in a range of 20% to 85% and a b* value of a transmission color being 5 or smaller under a D65 light source, and the antireflective film has a luminous reflectance being 1% or lower and a sheet resistance being 104Ω/□ or higher.
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What is claimed is: 1. An antireflective-film attached transparent substrate, comprising a transparent substrate having two principal surfaces and an antireflective film formed on one of the principal surfaces of the transparent substrate, wherein the antireflective-film attached transparent substrate has a luminous transmittance being in a range of 20% to 84% and a b* value of a transmission color being 5 or smaller under a D65 light source, and wherein the antireflective film has a luminous reflectance being 1% or lower and a sheet resistance being 10 4 Ω/□ or higher, wherein the transparent substrate is a chemically-strengthened glass substrate. 2. The antireflective-film attached transparent substrate according to claim 1 , further comprising an antifouling film on the antireflective film. 3. The antireflective-film attached transparent substrate according to claim 1 , wherein the principal surface of the glass substrate on which the antireflective film is to be formed, has undergone an antiglare treatment. 4. An antireflective-film attached transparent substrate, comprising a transparent substrate having two principal surfaces and an antireflective film formed on one of the principal surfaces of the transparent substrate, wherein the antireflective-film attached transparent substrate has a luminous transmittance being in a range of 20% to 84% and a b* value of a transmission color being 5 or smaller under a D65 light source, and wherein the antireflective film has a luminous reflectance being 1% or lower and a sheet resistance being 10 4 Ω/□ or higher, wherein the antireflective film has a multilayer structure built up of at least two dielectric layers differing from each other in refractive index, each dielectric layer in the multilayer structure is constituted mainly of at least one oxide selected from the group consisting of oxides of Si, Nb, Ti, Zr, Ta, Al, Sn, and In or constituted mainly of at least one nitride selected from the group consisting of nitrides of Si and Al, and at least one layer of the antireflective film with the multilayer structure contains dispersed fine particles of at least one chemical species selected from the group consisting of Ag, Mo, W, Cu, Au, Pd, Pt, Ir, Ni, Co, Fe, Cr, C, TiC, SiC, TiN, and CrN. 5. The antireflective-film attached transparent substrate according to claim 4 , further comprising an antifouling film on the antireflective film. 6. The antireflective-film attached transparent substrate according to claim 4 , wherein the transparent substrate is a glass substrate. 7. The antireflective-film attached transparent substrate according to claim 6 , wherein the glass substrate is a chemically-strengthened glass substrate. 8. The antireflective-film attached transparent substrate according to claim 7 , wherein the principal surface of the glass substrate on which the antireflective film is to be formed, has undergone an antiglare treatment. 9. The antireflective-film attached transparent substrate according to claim 4 , wherein the principal surface of the transparent substrate on which the antireflective film is to be formed, has undergone an antiglare treatment. 10. An antireflective-film attached transparent substrate, comprising a transparent substrate having two principal surfaces and an antireflective film formed on one of the principal surfaces of the transparent substrate, wherein the antireflective-film attached transparent substrate has a luminous transmittance being in a range of 20% to 84% and a b* value of a transmission color being 5 or smaller under a D65 light source, and wherein the antireflective film has a luminous reflectance being 1% or lower and a sheet resistance being 10 4 Ω/□ or higher, wherein the antireflective film has a multilayer structure built up of at least two layers differing from each other in refractive index, at least one layer of the layers in the multilayer structure is constituted mainly of silicon oxide, at least another layer of the layers in the multilayer structure is constituted mainly of a mixed oxide of at least one oxide selected from the group A consisting of oxides of Mo and W and at least one oxide selected from the group B consisting of oxides of Si, Nb, Ti, Zr, Ta, Al, Sn, and In, and the proportion of the content of the oxide of the group B to the total content of the oxide of the group A and the oxide of the group B in the mixed oxide is lower than 50% by mass. 11. The antireflective-film attached transparent substrate according to claim 10 , wherein the principal surface of the transparent substrate on which the antireflective film is to be formed, has undergone an antiglare treatment. 12. The antireflective-film attached transparent substrate according to claim 10 , further comprising an antifouling film on the antireflective film. 13. The antireflective-film attached transparent substrate according to claim 10 , wherein the transparent substrate is a glass substrate. 14. The antireflective-film attached transparent substrate according to claim 13 , wherein the glass substrate is a chemically-strengthened glass substrate. 15. The antireflective-film attached transparent substrate according to claim 14 , wherein the principal surface of the glass substrate on which the antireflective film is to be formed, has undergone an antiglare treatment.
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