X-ray transmission inspection apparatus and extraneous substance detecting method
US-2016041110-A1 · Feb 11, 2016 · US
US10551329B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10551329-B2 |
| Application number | US-201816120890-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 4, 2018 |
| Priority date | Sep 8, 2017 |
| Publication date | Feb 4, 2020 |
| Grant date | Feb 4, 2020 |
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The present invention makes it possible to check a target object highly accurately and quickly. Each of the electromagnetic wave reception regions includes m pieces of smaller regions which are arranged along a diameter of a circle in a plan view of a circular profile surface.
Opening claim text (preview).
The invention claimed is: 1. A checking device for checking a target object having a circular profile surface, which is a surface whose profile is a circle, while rotating the target object about an axis that passes through a center of the circle and extends in a direction substantially perpendicular to the circular profile surface, said checking device comprising: at least one electromagnetic wave source which irradiates the target object, which is being checked, with an electromagnetic wave that passes through the circular profile surface; and n pieces of electromagnetic wave reception regions for receiving the electromagnetic wave which has passed through the target object that is being checked, each of the n pieces of electromagnetic wave reception regions having m pieces of smaller regions, each of m and n being a natural number which is 2 or greater, and m×n pieces of smaller regions being arranged so as to satisfy any of (1) and (2) below: (1) for each of the n pieces of electromagnetic wave reception regions, the m pieces of smaller regions are aligned along a diameter of the circle in a plan view of the circular profile surface and; (2) as compared with an arrangement of (1), at least one set among sets of n pieces of smaller regions, which are apart from the center of the circle by identical distances, is arranged by being rotated about the axis. 2. The checking device as set forth in claim 1 , wherein: in at least one of the n pieces of electromagnetic wave reception regions, the m pieces of smaller regions have respective sizes that become larger in a direction along a circumference of the circle as a distance from the center of the circle increases in the plan view of the circular profile surface. 3. The checking device as set forth in claim 1 , wherein: in at least one of the n pieces of electromagnetic wave reception regions, suitability of the m pieces of smaller regions for capturing an image of a subject which moves fast is heightened as a distance from the center of the circle increases in the plan view of the circular profile surface. 4. The checking device as set forth in claim 1 , wherein: the at least one electromagnetic wave source is m×n pieces of electromagnetic wave sources, each of the m×n pieces of electromagnetic wave sources being provided such that a direction from each of the m×n pieces of electromagnetic wave sources to a corresponding one of the m pieces of smaller regions in each of the n pieces of electromagnetic wave reception regions is substantially perpendicular to the circular profile surface. 5. The checking device as set forth in claim 1 , wherein: the at least one electromagnetic wave source is one electromagnetic wave source, the one electromagnetic wave source being provided such that a direction from the one electromagnetic wave source to the center of the circle becomes substantially perpendicular to the circular profile surface. 6. The checking device as set forth in claim 1 , wherein: the n pieces of electromagnetic wave reception regions receive the electromagnetic wave from a certain portion of the circular profile surface at respectively different points in time; and said checking device detects a foreign substance adhering to the certain portion by analyzing an analytical image which has been obtained by adding up n pieces of images of the certain portion, the n pieces of images being obtained when the n pieces of electromagnetic wave reception regions receive the electromagnetic wave.
impurities, foreign matter, trace amounts · CPC title
using tomography, e.g. computed tomography [CT] · CPC title
image processing · CPC title
Image mosaicing, e.g. composing plane images from plane sub-images · CPC title
operating with electromagnetic waves {(operating with millimetre waves G01V8/005)} · CPC title
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