Processing liquid supplying apparatus, processing liquid supplying method and storage medium
US-2015159642-A1 · Jun 11, 2015 · US
US10550834B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10550834-B2 |
| Application number | US-201515126091-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 9, 2015 |
| Priority date | Apr 18, 2014 |
| Publication date | Feb 4, 2020 |
| Grant date | Feb 4, 2020 |
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A tube pump and a fluid delivery method, the tube pump including a plurality of pressing portions and a tube that delivers fluid. The pressing portions is spaced apart from each other in a rotational direction and provided for a rotation body turned by a drive unit and the tube is provided on an outer circumferential side of the rotation body. The tube pump includes a control unit that turns the rotation body opposite to a delivery direction until the rotation body reaches a predetermined angle so as to restore an area of the tube, pressed by the pressing portion on a most upstream side in the delivery direction, by an increase in pressure within the tube accompanied with a movement opposite to the delivery direction of the pressing portion adjacent to a downstream side in the delivery direction.
Opening claim text (preview).
The invention claimed is: 1. A tube pump comprising: a plurality of pressing portions, the pressing portions spaced from each other, by equal intervals, in a rotational direction, the rotational direction comprising a delivery direction and a direction opposite to the delivery direction, the plurality of pressing portions provided on a rotation body turned by a drive unit; and a tube that delivers fluid, the tube provided on an outer circumferential side of the rotation body, wherein the tube pump comprises a controller that, upon detection of a fluid delivery ON signal and prior to delivery of fluid, turns the rotation body in the direction opposite to the delivery direction so as to restore, from a pressed state to an unpressed state, an area of the tube, pressed by the pressing portion on most a upstream side in the delivery direction, by an increase in pressure within the tube accompanied by a movement, in the direction opposite to the delivery direction, of the pressing portion adjacent to a downstream side and turns the rotation body in the delivery direction, the turning in the opposite direction being by an angle less than an angle defined by the intervals between adjacent pressing portions. 2. The tube pump as set forth in claim 1 , wherein the controller maintains a rotational position of the rotation body, to which the rotation body was moved by the turning of the rotation body in the direction opposite to the delivery direction, for a predetermined time. 3. A fluid delivery method using a tube pump, the tube pump comprising: a plurality of pressing portions, the pressing portions spaced from each other, by equal intervals, in a rotational direction, the rotational direction comprising a delivery direction and a direction opposite to the delivery direction, the plurality of pressing portions provided to a rotation body turned by a drive unit; and a tube that delivers fluid, the tube provided on an outer circumferential side of the rotation body, the method comprising: turning, at a time when fluid delivery is commanded and prior to delivery of fluid, the rotation body in a direction opposite to the delivery direction, so as to restore from a pressed state to an unpressed state, an area of the tube, pressed by the pressing portion on most a upstream side in the delivery direction, by an increase in pressure within the tube accompanied by a movement, in the direction opposite to the delivery direction, of the pressing portion adjacent to a downstream side in the delivery direction, and then turning the rotation body in the delivery direction, the turning in the opposite direction being less than an angle defined by the intervals between adjacent pressing portions. 4. The fluid delivery method as set forth in claim 3 , wherein a rotational position of the rotation body, to which the rotation body was turned by the turning in the direction opposite to the delivery direction is maintained for a predetermined time. 5. The tube pump according to claim 1 , wherein, when the rotation body is rotated in the direction opposite to the delivery direction, a pressing portion that is located on the most upstream side, in the delivery direction, is estranged from the tube. 6. The fluid delivery method according to claim 3 , further comprising rotating the rotation body in the direction opposite to the delivery direction such that a pressing portion that is located on the most upstream side, in the delivery direction, is estranged from the tube. 7. The tube pump according to claim 1 , the controller being configured to stop the rotation body at a stop position where an area of the tube on the upstream side is pressed and occluded by the pressing portion on the most upstream side in the delivery direction and fluid delivery is stopped. 8. The fluid delivery method according to claim 3 , stopping the rotation body at a stop position where an area of the tube on the upstream side is pressed and occluded by the pressing portion on the most upstream side in the delivery direction and fluid delivery is stopped.
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